AVS1997 Monday Morning

Variable Temperature AFM on Electrically Insulating Surfaces

Si-Based Heterolayer and Device Structures Observed by Cross-Sectional STM

Effects of Crosslinking on the Spreading of 150 nm Polymer Particles

High Pressure Adsorbate Structures Studied by Scanning Tunneling Microscopy: CO on the Pt(111) Surface

Evaluation of Phase Separation in PVC/PMMA Blends using Photoelectron and Ion Imaging

Laboratory Size Micro-XPS System with a Laser-Plasma X-ray Source

The Application of a Spherical Mirror Analyser to High Resolution Imaging XPS

Understanding Bonding in Glass Fiber Materials Through a Comparison of Large and Small Area X-ray Photoelectron Images and Spectra

X-ray Spectro-microscopy; A New Technique for Materials Science

New Trends in Lightwave Communications

Novel Optoelectronic Devices using Wafer Bonding

III-V Technology, Materials and Processing for Photonic Integration

Fibers for the 21st Century: Materials Challenges

Optical Communication Technology Challenges for Polymeric Integrated Optic Waveguide Circuitry

Optical Demultiplexer Devices for Communication Systems using Wavelength Division Multiplexing

Atomic Scale Processes During Oxidation at Si(001)-SiO₂ Interfaces

Experimental and Theoretical Studies of the Initial Water-Induced Oxidation of Si(100)-2x1

Real-Time Core-Level Spectroscopy of Initial Thermal Oxide on Si(100)

High Resolution XPS Study of Ultrathin Oxynitride Films on Si(100).

Direct Observation of Si Lattice Strain and its Distribution in the Si(001)-SiO₂ Interface Transition Layer with Medium Energy Ion Scattering Spectroscopy

Optimization of Si-SiO₂ Interface Chemistry and Structure by Combined Plasma and Rapid Thermal Processing.

Processing Dependence of the Structure and Electrical Characteristics of the Si/SiO₂ Transition Layer.

Si/SiO₂ Interface Roughness: Comparison between Surface Second Harmonic Generation and X-ray Scattering

Measurements of Nitrided SiO₂/Si Interface Roughness By Crystal Truncation Rod Profiling

Recent Improvements in Measuring Ultrathin Oxynitride Layers Using Secondary Ion Mass Spectrometry (SIMS)

Oscillatory Exchange Coupling in Magnetic Multilayers.

Fe/Rh Multilayers: Magnetic and Structural Characterization

Magnetic Anisotropy and Atomic Structure of the Fe/GaAs Interface*

Structural and Magnetic Phases of Ultrathin Fe Wedges on Diamond (100)*

Exploring Step-Induced Magnetic Anisotropies in Ultrathin Films

Co on Stepped Cu(100) Surfaces: A Comparison of Experimental Data with Monte Carlo Growth and Micromagnetics Simulations.

Direct Observation of Interface Roughness Dependence of Interfacial Magnetism using Diffuse X-ray Resonant Magnetic Scattering

Correlating Changes in Magnetic Roughness with Variations in the Helicity Dependent Soft X-ray Resonant Diffuse Scattering

Ultra Clean Society's Activities for Manufacturing Science and Technology

Real-Time Monitoring of Scattered Laser Light by a Single Particle of the Order of Several Tens Nanometers in the Etching Chamber in Correspondence with its Equipment Status

Pit-Free Electropolishing of Aluminum and its Application for Process Chamber

TEOS/O₃ CVD to Employ a Clean and High Density Ozone Generator

Integrated Compact Gas Delivery System

Etching/Deposition Uniformity in Flat Parallel Electrode Plasma Systems Using Shower Head

Self-Consistent Particle Simulation of Radio-Frequency CF₄ Discharge with Implementation of All Ion-Neutral Reactive Collisions

Suppression of Impurity-Backdiffusion in Vacuum Pumping Systems for Ultraclean Low-Pressure Semiconductor Processing

High Density Microwave Plasma Source without Magnetic Field for Large Area PECVD and Plasma Oxidation

Highly-Reliable Ultra Thin Gate Oxide Formation by Employing a New Water Vapor Generator

Molecular Aspects of Friction: Systematic Studies of the Frictional Properties of Selectively Fluorinated Self-Assembled Monolayers

Mechanical Properties of Alkylsilane Monolayers with Mixed-Chain-Length

Applications of Multi-task Scanning Probes to Friction and Adhesion

Nanofriction and Nanoimaging at the Insulator-Liquid Interface

Atomic-Scale and Nano-Scale Frictional Behavior of Clean and Hydrogen-Terminated Diamond(111) Surfaces

Quantized Friction and Atomic Lattice Resolution in AFM Imaging

Nanotribology of Single Crystal Metals

Friction at Sub-Micron Lengthscales

Growth and Tribological Properties of Thin Ice Films.

Scanning Force Microscope Observations of Corrosive Wear in Single Crystal Carbonates and Phosphates

Plasma Charging in ULSI Fabrication

The Physics of Plasma-Induced Charging Damage

Plasma Measurements and Plasma Damage in a High-Density, Inductively Coupled Metal Etcher

Radiation Damage Effects in a High Density Plasma

Pattern Dependent Wafer Charging in an Inductively Coupled Metal Etch System

Reduction of Electron Shading Effect on Gate Etching using High Pressure HBr Gas Chemistry

Mechanisms Involved in Plasma Charging Induced Device Damage

Non-Contact Electrical Characterization of Plasma Damage

Observation of Channel Shortening in n-MOSFETs Arising from Interconnect Plasma Processing

Wafer Level Ion Energy Analyzer for Plasma Analysis

A Compact Floating Energy Analyzer for Measuring Energy Distributions of Ions Bombarding a rf Biased Electrode

Preliminary Empirical Results Suggesting the Mapping of Dynamic in situ Process Signals to Real Time Wafer Attributes in a Plasma Etch Process

Spectral Interferometry -- A Novel Process Control Diagnostic.

Plasma Sensors for Diagnostics and Control in Semiconductor Process Development and Manufacturing

A Deposition-Tolerant Ion Flux Probe for In-Situ Process Control

High-Density Plasma Diagnostics: Using Optical Emission Spectroscopy to Determine Electron Temperature, Plasma Density and Cl₂ Percent Dissociation

RF Electrical Measurements as Sensors for Physical Properties of Plasmas

Real-Time Control and Modeling of Plasma Etching.

Surface Composition and Topography of Compound Semiconductors after Sputtering.

Ion-Implanted Reference Materials for the Semiconductor Industry

Quantitative Analysis by Static SIMS: Exploiting All the Information in the Spectra

Surface Analysis Using Slow, Highly Charged Ions like Au⁶⁹⁺

Contribution of SIMS Analysis to Characterization of GaN and Related Compounds

Orientation and Order in Microcontact-Printed, Self-Assembled Monolayers of Alkane Thiols on Gold, Investigated with NEXAFS

Ordered Thiophene, Methanethiol, and Benzeneselenol Monolayers on Au(111) formed by Gas- and Liquid-phase Deposition: New Insights into the Chemisorption Mechanism.

Nucleation and Growth Phenomena in Organic Amphiphile Monolayers

Forced Alignment of Adsorbed Organic Monolayers During STM Observation.

Molecular Monolayer Dynamics: Atomistic Potentials and Ensemble Responses

Simulation of Interfaces using Molecular Dynamics

Effect of the Environment on the Molecular Orientation of Thiol Monolayers Investigated by Second Harmonic Generation (SHG)

Self-Assembled Monolayers of n-alkane Thiols: Investigation of Chain Length Dependence by Nonlinear Optical Vibrational Spectroscopy

Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100) Surface

The Influence of Surface Modifiers on the Kinetics of Methanol Electrooxidation at Platinum Surfaces

Clean and Modified Oxide Surfaces: Structure and Reactivity

Metal Adsorption Calorimetry and Adhesion Energies on Clean Single-Crystal Oxide Surfaces

Oxygen Adsorption and Oxide Formation on Ni₃Al(111)

The Growth and Characterization of Ag and Au Clusters on Al₂O₃/Re(0001)

Laser Desorption Mass Spectrometry and Vibrational Spectroscopy of Hydrocarbon Chemistry on Hydroxylated and Non-Hydroxylated Al₂O₃ Surfaces

Thermal and Electron-Stimulated Desorption of Na from Amorphous SiO₂ Films Grown on a Re(0001) Surface.

CO Oxidation on Gold-Covered Pt(335), A Potential Sensor Electrode

The Interaction of Sulfur with Metal/Oxide Surfaces

Structure and Stability of ZrO₂ Surfaces and the Ni/ZrO₂ Interface

Diffusion of Hydrogen on Si(001) by Hot STM and Atomistic Modelling

Adsorbate Influence on the Diffusion of Individual Pt Atoms on Pt(110)

Diffusion of Hydrogen and Deuterium on Ni(111) over a Wide Temperature Range: Exploring Quantum Diffusion on Metal Surfaces

Hydrogen Inhibition of Exchange Diffusion on Pt(100)¹

Diffusion of Pt Adatoms and Dimers on Pt(111)

In-Situ STM Experiments and Predictive Modeling of Grain Growth Kinetics in Two Dimensions.

Separating Out the Prefactor and the Step Edge Barrier of Interlayer Diffusion for Ag/Ag(111) Homoepitaxy

Surface Segregation of Low-Energy Ion-Induced Defects in Silicon

Quantum Coherence in Tip-Surface Transfer of Adatoms in AFM/STM

Elementary Steps of Lateral Translation of Cu, Pb, Pb2 and CO Studied by Low Temperature STM

Polycrystalline Silicon Thin Films for Active-Matrix Flat-Panel Displays

Characteristics of Amorphous and Polycrystalline Silicon Films Deposited at 120 °C by ECR-PECVD

Plasma Conditions for the as-grown Low Temperature Poly-Si Formation on the SiO₂ Substrate by a Sputtering and PECVD Processes

Vacuum Deposition Processes for Large Area, Roll-to-Roll Flexible Substrates

Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Thin Films Deposited at Very Low Temperatures for Thin Film Transistors on Plastic Substrates.

Low Temperature Plasma Deposition of Silicon Nitride from Silane and Nitrogen Plasmas

Real Time Substrate Misalignment Monitoring and Recalibration

The National Technology Roadmap for Flat Panel Displays

Post Deposition Reduction of Noble Metal Doped ZnO Films

Development and Scale-Up of a Multifunctional Antireflection Coating, Sputter Deposited on Plastic Film

Product Manufacturability, Process Scale-up and Technology Transfer

The Transition to 300mm Silicon Wafer Process Equipment

Scale-Up for Semi-Conductors of Dual Magnetron Sputtering using Pulsed Power

Scaling Up of Sputtering Processes to Industrial Dimensions

Real-Time In-Situ Ellipsometric Studies for Rapid Scale-up of TiN Thin Film Growth by Magnetically-Enhanced Reactive Unbalanced Magnetron Sputtering