AVS1997 Monday Afternoon

Photoelectron Microspectroscopy Observations of a Cleavage Surface of Semiconductor Double Heterostructure

Study of the Oxidation of W(110) with Chemical State- and Time- Resolved Photoelectron Spectroscopy and Diffraction^**

Atomic XAFS; A New Tool in X-ray Absorption Spectroscopy

Direct Observation of the Complete Rehybridization of the Carbon Carbon Double Bond in Chemisorbed Propylene on Supported Silver Materials Using NEXAFS

Orientation and Electronic Structure of Ion-Exchanged Dye Molecules on Mica: An X-Ray Absorption Study

K-Edge Soft X-ray Absorption (NEXAFS) Spectroscopy In Surface Chemical Analysis of Polymers

Tribochemical and Thermochemical Reactions of Stearic Acid and Paraffin Oil on Metal Surfaces in Air as Measured by Ultra Soft X-ray Absorption Spectroscopy

Advances in Wafer Surface Trace Metal Analysis Using Synchrotron Radiation

Doping of III-Nitrides

Characterization of Hexagonal GaN(0001) Thin Films by X-ray Photoelectron Diffraction

A Novel Precursor for Aluminum Nitride Thin Film Growth: Quinuclidine Alane

UHV Arcjet Nitrogen Source for Selected Energy Epitaxy of Group III Nitrides by MBE

Optimization of InN for Ohmic Contact Formation

Status of High-Brightness III-Nitride Light Emitting Diodes (LEDs).

Selective ICP Etching of Group-III Nitrides in Chlorine and Boron Trichloride Based Plasmas

Composition and Doping Effects on Plasma Etching of Group III-Nitride Photonic Device Materials

Investigation of Charge Spreading and Trapping in SiO₂ Films by Ballistic Electron Emission Microscopy

Localized Degradation Studies of Ultrathin Gate Oxides.

Properties of Low-Temperature-Grown Ultrathin Oxide with Post-Oxidation Anneal

Oxynitridation of Si(100) Using a Remote Ar-N₂O Plasma

Development of Ultra-thin Gate Dielectric with Nitrogen Incorporation into Oxide for 0.25 micron Technology

The Growth and Composition of Ultrathin Oxynitride Films on Si(100)

New Method for Low-Temperature Si Oxidation

Atomic Layer Controlled SiO₂ Growth at Room Temperature Using Catalyzed Self-limiting Surface Chemistry

Electrical Properties of the Ultrathin (3nm) Silicon Oxide Film Grown by Low Density Oxygen Plasma at Room Temperature

Spin-Resolved Resonant Photoemission: Probe of Electron Correlation Effects in Magnetic Solids

Spin-Orbit and Exchange Interactions in Photoelectron Diffraction

Magnetic X-ray Linear Dichroism in Gd 5p Core Level Photoemission

Spin Polarization of 3s Photoemission Satellites

Magnetic Dichroism and Spin Polarization in Core-Level Photoemission from Itinerant Ferromagnets

STM-Based Measurements of Magnetic Multilayers

Voltage Dependence of Magnetic Tunnel Junctions

Determination of Magnetic Layer Switching of a Multilayer

Conductance and Stability of Atomic-Scale Gold Contacts under High Bias Voltages

Doping of Semiconducting Atomic Chains

Mechanical and Electronic Properties of Nanowires

Single Electron Charging Effect at Ag Droplets Grown on Sb-terminated Silicon Surface at Room Temperature

Spectroscopy and Imaging of Supported Gold Nanocrystals at Cryogenic Temperatures

Magnetic Nanostructures with 2D and 1D Entities

Imaging Current Flow in High Temperature Bi-Superconductors

Direct Measuring the Conductance Distributions of Conducting Paths in Percolating Ni_x(SiO₂)_1-x Thin Films by Conducting Atomic Force Microscopy

Evaluation of Plasma Charging Damage During Polysilicon Gate Etching Process in a Decoupled Plasma Source (DPS) Reactor

Efficient Two-Dimensional Simulation of Electronegative RF-Discharges in the Low Pressure Regime

Feature Evolution Simulations of Silicon Trench Etching with Comparison to Experiment

Profile Modeling and Comparison to Experiments for Microtrenching in Cl₂ Etching of Si in an Inductively Coupled Plasma Reactor¹

Profile Evolution Simulation of High Density Plasma Etching of Patterned Polysilicon

A 2-D Kinetic Plasma Sheath-Feature Topography Model

Characterization and Optimization of a Dry Etching Process for Silicon Nitride Spacer Formation

An Investigation of Aspect Ratio Effects in Deep Sub-Micron Metal Etching

Etch Profile Simulation Using Level Set Methods

Cross-Transport of Multiple Species in the Transition to Molecular Flow Regimes

The Dynamics and Some Fundamental Research Problems Associated with Monochrome and Color Plasma Display Panels

Analysis of the Discharge Mechanism of He-Ne-Xe Gas Mixture in a Surface Type AC PDP

Discharge Characteristics of Various DC-PDP Cell Structures

Study of VUV Emission Spectra from AC Plasma Display Panel

The "Invariant" and "Invariable" Scaling of Planar Magnetron Sputtering from 200 mm Silicon to Meter Square LCTFT Display Applications

Advantages of Using A High Density Plasma Source for FPD Plasma Processing.

Electron Cyclotron Resonance Plasma Etching of Oxides and SrS and ZnS-based Electroluminescent Materials for Flat Panel Displays

Arc-Suppressed RF Magnetron Sputtering for ITO Film Preparation using Time Modulation Technique

Final-State Effects in Quantitative XPS Analysis: the Ion and the Photoelectron^**

Creating a Rulebase for Interpretation of XPS: A Guide for both Human-based and Computer-based Experts

Sharing of AES and XPS Spectral Data through Internet

Universal Description of Elastic Electron Scattering Effects in XPS/AES Peak Attenuation

Loss Functions of Various Materials Obtained from XPS Spectra

Calculation of Electron Inelastic Mean Free Paths in Germanium, Gadolinium, and Dysprosium

Direct Measurements of Atomic-Scale Surface Kinetics on Si(001)

Prenucleation Structures of Ge Adatoms on Si(100)-2x1¹

Growth Kinetic Influences on the Morphology and Photoluminescence of Three-Dimensional Islands Formed by Chemical Vapor Deposition in Si_1-xGe_x/Si Multilayers on Si(001)¹

Intrinsic Stress upon Stranski-Krastanov Growth of Ge on Si(001)

Improved Accuracy in Monitoring Si Monolayer Incorporation in GaAs during MBE

Observation of Nanometer Scale Surface Clustering on ZnSe Epilayers Grown by Molecular Beam Epitaxy on GaAs(001)

First Principles Study of AlN Epitaxial Layers on SiC

Nanoscopic Droplets Studied using Scanning Polarization Force Microscopy

Soft-Landed Ions to Recreate Aqueous Interfaces

Effects of Water on the Chemistry and Morphology of NaCl Surfaces: Implications for Atmospheric Chemistry of Sea Salt Particles.

Chemistry at the Surfaces of Model Tropospheric and Stratospheric Cloud Particles

H₂O Adsorption and Desorption on a Well-Defined α-Al₂O₃(0001) Surface

An Investigation of Liquid Sulfuric Acid Films in Ultrahigh Vacuum.

Reaction of H₂S on Naturally Occurring Pyrite: Effects of Short Range Order

ToF-SIMS Studies of Organic Reactivity on Single Particles

Effect of Sulfur on Oxide Adhesion on Fe(111)

The Interaction of Water with the (012) Surface of α-Fe₂O₃: Experiment and Theory

Growth and Surface Structure of FeO(001) Epitaxial Thin Films

Photoexcited Fe₂O₃ Surfaces: Properties and Chemisorption

Core-level X-ray Photoelectron Spectra and X-ray Photoelectron Diffraction of RuO₂(110) Grown by Molecular Beam Epitaxy on TiO₂(110)

Studies of the Defect Chemistry on (110) and (100) TiO₂ Surfaces

Synthesis and Structure of Metal Clusters Supported on TiO₂(110): A Scanning Tunneling Microscopy Study

Oxygen-Induced Reconstruction of a TiO₂(110) Surface: A Scanning Tunneling Microscopy Study

Atomic Resolution UHV STM of Insulating Oxides: NiO and UO₂

Characterization of Defective Oxide Surfaces by Surface-Sensitive and Titration Techniques

Chromaticity and Electroluminescent Efficiency of Atomic Layer Epitaxy SrS:Ce Thin Films

XPS Analysis and Semiempirical SCF/CI Modeling of Ce⁺³ Core Level Electrons in Ca_{x√sub 1-x}Ga₂S₄

Deposition and Luminescence Characterizations of ZnGa₂O₄ Thin Films Prepared by rf magnetron sputtering

FED Display Manufacturing Challenges

Properties of Fluorine-Doped Tin Oxide Films Produced by Low-Pressure Chemical Vapor Deposition using Tetramethyltin.

Preparation of Transparent Conducting ZnO-In₂O₃-SnO₂ System Multicomponent Oxide Films by R.F. Magnetron Sputtering

High Dielectric Constant BaSrTiO₃ Thin Films for EL Displays

The Effect of the Base Layer on the Conductivity and Structure of dc Magnetron Sputtered Thin Silver Films.

Vacuum Arc Broad Metal Ion Beams Techniques TAMEK for Material Surface Modification

Improvement of Tribological Properties Using Pulsed High Power Ion Beams

Pulsed Electron-Beam Technology for Surface Modification of Metallic Materials

Metal Vapor Source with High Intensity Flow for Thin Film Technology

Ion Beam Sputter Deposition and Characterization of Aluminum Oxide and Aluminum Nitride Thin Films for Gap Dielectrics and Spin Tunneling Devices

Femtosecond Laser Ablation Processes and Deposition of Thin Films

Structural and Electrical Properties of Biaxially Oriented Conductive La_{0.5√sub 0.5}CoO₃ Thin Films on SiO₂/Si

Growth and Characterization of Epitaxial SrRuO₃ Thin Films on SrTiO₃ MgO and Al₂O₃ by Pulsed Laser Ablation.

Laser Diode Spectroscopic Study of HCl and Its Application for In Situ Monitoring of a Process Chamber

High Rate Cleaning of Surfaces using Atmospheric Pressure Generation of Reactive Metastable Species

Detection and Filtration of Large Particle Concentrations in CMP Slurries

Recent Experiences with In Situ Contamination Monitoring & Control

A Study of the Behavior of H₂O at Low Concentrations

Contamination Measurement and Control in Vacuum Systems

Excimer Laser Cleaning of Wafer Backside Metallic Particles

Clustered Dry Cleaning of Residue from an ICP Oxide Etch