AVS1997 Manufacturing Science and Technology Technical Group Sessions

Click a Session Code to view its Abstracts

Topics | Time Periods | Schedule Overview

Session Code Start Session Name
MS-MoM Monday, October 20, 1997 8:20 AM Contamination-Free Manufacturing I co-sponsored by the Ultra-Clean Society
MS+AS+VT-TuM Tuesday, October 21, 1997 8:20 AM Process and Defect Characterization for Semiconductors
MS-TuA Tuesday, October 21, 1997 2:00 PM Partnerships in R&D for Manufacturing Science
MS-TuP Tuesday, October 21, 1997 5:30 PM MS Poster Session
MS+VM-WeM Wednesday, October 22, 1997 8:20 AM Modeling of Processes and Equipment
MS+EM-ThA Thursday, October 23, 1997 2:00 PM Process Fundamentals
MS+VT-ThA Thursday, October 23, 1997 2:00 PM In Situ Sensors and Metrology
MS-FrM Friday, October 24, 1997 8:20 AM Real-Time Process Control
Topics | Time Periods | Schedule Overview