AVS1997 Manufacturing Science and Technology Technical Group Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| MS-MoM | Monday, October 20, 1997 8:20 AM | Contamination-Free Manufacturing I co-sponsored by the Ultra-Clean Society |
| MS+AS+VT-TuM | Tuesday, October 21, 1997 8:20 AM | Process and Defect Characterization for Semiconductors |
| MS-TuA | Tuesday, October 21, 1997 2:00 PM | Partnerships in R&D for Manufacturing Science |
| MS-TuP | Tuesday, October 21, 1997 5:30 PM | MS Poster Session |
| MS+VM-WeM | Wednesday, October 22, 1997 8:20 AM | Modeling of Processes and Equipment |
| MS+EM-ThA | Thursday, October 23, 1997 2:00 PM | Process Fundamentals |
| MS+VT-ThA | Thursday, October 23, 1997 2:00 PM | In Situ Sensors and Metrology |
| MS-FrM | Friday, October 24, 1997 8:20 AM | Real-Time Process Control |