AVS1996 Thursday Morning

Enhanced Differential Charging during X-ray Photoelectron Spectroscopy as an Analysis Technique

New Approaches to the Control of Insulator Surface Charging in Surface Spectroscopy

Glass Surfaces

Determination of the Silanol and Molecular Water Concentration of Glass Surfaces

A Scanning Tunneling Microscopy and Tunneling Spectroscopy Study of the Reduced LiNbO\sub 3\ (0001) Surface

Structure and Composition of Oxidized Aluminum / NiO (100) Interfaces

Growth of SiO\sub 2\ by Tetraethoxysilane Pyrolysis on MgO Thin Films and Mo(100)

XPS Studies of Crystalline and Amorphous Alkali-Aluminosilicates

Nanofabrication by Self-organizing Heteroepitaxy

Compositional Stability of Alloy Thin Films

Interfacial Properties and Relaxation of Epitaxial InAs Layers Grown on Gaas

Monte Carlo Simulations of the Transition between Step Flow and Island Growth Modes in OMCVD of GaAs

Various Factors Influencing the Interfacial Roughness in InGaAs/GaAs Heterostructures: A Cross-sectional Scanning Tunneling Microscopy Study

Nanometer-scale Investigations of Alloy Formation in Compound Semiconductor Structures

Atomic Level Investigation of the Growth of Si/Ge by UHV CVD

Ge Growth on Hydrogen Passivated Si(001) and Si(111) Surfaces

In Situ Measurements of Temperature-Dependent Strain Relaxation of Ge/Si(111)

Electroluminescent Materials and Displays

Effects of Annealing and Stress on the SrS:Ce Thin Film Electroluminescent Phosphor

Electron Spectroscopy Studies of Interface Formation between Metal Electrodes and Luminescent Organic Materials

Effects of Metals on Luminescence of Organic Materials

Measurement of ZnS Valence Band by XPS

Luminescence Characteristics of Tb Doped Yttrium Oxysulphide Films Deposited by Spray Pyrolysis

Molecular Beam Epitaxy of Electroluminescent Phosphors

Photoemission Studies on the k-Space Origin of the Long Period Oscillation in Fe/Cr Multilayers

Density Functional Studies of Mixed Fe-Cr Interfaces

Exchange Coupling Across Iron Silicides in Fe/Si Multilayers

A Manganite-Cuprate Superlattice: Study of Magnetic Coupling

Magnetic and Superconducting Properties of Ferromagnetic/Superconducting Multilayers: Ni/Nb

Ferromagnetic/Superconducting Multilayers: Fe\sub 4\N/NbN

Surface and Interface Issues in Magnetoelectronic Devices

Size Effects in Submicrometer Spin Valve Magnetoresistive Random Access Memory Devices

Patterning of Cu, Co, Fe and Ag for Magnetic Nanostructures

Microcontamination Analysis in the Semiconductor Manufacturing Environment

Application of Spectral Analysis on Atomic Force Microscopy (AFM) Images: A Study on Si (100) Surfaces

New Models and Methods for Analysis of Particles and Defects

Particle Evaluation in the Tungsten Etch Back Process

Practical Limits of EDS in Semiconductor Thin Film Analysis

Defect-induced Redeposition in Target Sputtering

Imaging ESCA: Can You Analyze What You Can't See?

Secondary Ion Mass Spectrometry of a Copper Polyimide Thin Film Packaging Technology

The Fabrication of Nanostructured Organic Materials by Means of a Chemically Modified Template

Novel Chemical Approaches to Pattern Transfer using Self-assembled Monolayer Resists

Sulfone Containing Self-assembled Monolayers as Electron Beam Resists

Electron Beam Profiles and Limits to Nanolithography with the STM

Nanolithography with Electrons

Nanofabrication using Selective Thermal Desorption of SiO\sub 2\/Si Induced by Electron Beams

Energy Distribution Measurement of the e-beam from the Electron Beam Microcolumn Aligned by STM

Nanometrology and the Molecular Measuring Machine

Measuring a Focused Ga-ion Beam Profile using an Etch-stop Process and Atomic Force Microscopy

High Precision Calibration of a Scanning Probe Microscope (SPM) for Manufacturing Applications

Negative Ion Assisted Etching of Silicon with Low Energy

Analysis of a High Throughput, Reliable, WSi/poly Gate Etch System with Proven 0.25 \mu\m \+-\ 0.025 \mu\m 3-sigma CD Control and High WSi:poly Selectivity

Optical Diagnostics of Inductively Coupled Plasmas: Experiment and Simulation

Atomic Scale Simulation of Ion-Enhanced Etching: From Picoseconds to Minutes

Optical Investigation of the Etching of Si and Ge in an Inductively Coupled Cl\sub 2\/Ar Plasma

Spatial Emission Profile and Neutral Density Depletion in an Electron Cyclotron Resonance Plasma

Ion and Neutral Temperatures in Inductively Coupled Plasma Etching Reactors

The Influence of Different Mechanisms on the Angular Dependence during Dry Etching

Energy and Angle Distributions of Reflected Ions and Sputtered Species within Microfeatures in Plasma Processing

Effects of NO Addition on the Chemical Downstream Etching of Silicon Nitride and Tungsten

Ashing of Photoresist with a Plasma-based Source of Hyperthermal Neutral Atoms

Plasma Processing in Medical Device Manufacturing

Plasma Treatment of Polymers: The Effects of Energy Transfer from an Argon Plasma on the Surface Chemistries of Polystyrene, Low Density Polyethyene, Polypropylene and Polyethylene Terephthalate

Novel CVD of "Teflon-like" Insulating Biomaterials

RF Inductively Coupled Plasma with Internal Antenna for Deposition of HMDSO-based Barrier Coatings

Alkyl Ketenes as Gas-Phase Precursors of Photoluminescence Chromophores in Plasma Polymerized Films

Plasma Chemistry in Methane rf Glow Discharges

Fast Deposition of a-C:H: Increasing Quality with Increasing Growth Rate

Density Functional Theory of Chemical-Reaction Dynamics

A Monte-Carlo Approach to the Oxidation of CO on Platinum

Chemisorption of Co on the Ir(111) Surface: Adsorption and Desorption Kinetics Measured with In Situ Vibrational Spectroscopy

Theoretical Study of the Catalytic Oxidation of CO at Ru(0001)

Mechanism For CO Oxidation on Ru(001)

Oxygen and Carbon Monoxide on Rh(110): Adsorption, Desorption and Reaction Kinetics by Real Time X-ray Photoemission Spectroscopy

Cyanide Intermediates in Catalytic Reduction of NO by C\sub 2\H\sub 4\ on Rhodium (111)

The Dissociative Chemisorption of Nitrogen on Iron(111) at Elevated Pressures

Surface Studies of Model Supported Catalysts: Rh/CeO\sub 2\(100)

IRAS Studies of Monometallic and Bimetallic Pd, Cu, and Au Catalysts Supported on Al\sub 2\O\sub 3\ Thin Films

Unexpected Structure and Properties of \omega\-substituted Thiol Monolayers on Gold

Surface Characterization of Terminally Functionalized Alkanethiol Self-assembled Monolayers and Mixtures

The Surface Structure of Self-Assembled Fluorinated Thiolate Monolayers

Scanning Tunneling Microscopy and Tunneling Spectroscopy of Self-assembled Monolayers of Polyoxometalates

The Interfacial Structure of Self-assembled Alkanethiol Monolayers in Equilibrium with Water at Ambient Temperature

Temperature-Programmed Desorption of Chemical Probes from Self- Assembled Monolayers

A Combined SFG and NEXAFS Determination of Molecular Orientation of a Self-assembled Monolayer

Compositional Imaging of Patterned Self-assembled Monolayers using Scanning Probe Microscopies: Effects of Chain-Length, Packing, and Density

Structural Correspondence between Layered, Crystalline Silver Alkanethiolates and Correspondent Self-assembled Monolayers

TOF-SIMS Investigation of Molecular Overlayers: Thiols on Gold

Magic Size Effects for Heteroepitaxial Island Diffusion

Influences of Cluster Mobility on Coarsening of Adatom and Vacancy Clusters

Formation, Diffusion, & Coarsening Processes for Ag Clusters on Ag(100)

Selective Deposition of Al on H/Si(100) Surfaces

A Helium Atom Scattering Study of the Structure and Dynamics of Epitaxial Thin Films of Lead Adsorbed on Cu(111)

Charge Limited Cluster Growth from Deposition and Segregation

Kinetics of Mound Formation in Epitaxial Growth

STM Evidence for the Step Density Interpretation of RHEED Intensity Oscillations in GaAs(111)A and (110) Homoepitaxy

Giant Interfacial Stress in Metal on Metal Heteroepitaxy

The Effect of Substrate Misorientation on Nucleation and Strain Relaxation for Epitaxially Grown CaF\sub 2\ on Si(111) Substrates

Microstructure Control in Semiconductor Metallization

Copper Diffusion into Aluminum Metallizations Determined by Auger Electron Spectroscopy Elemental Imaging

Copper Deposition into Contact Holes using Self-sustained Magnetron Sputtering

Growth and Carbon Incorporation Chemistry of Dimethylaluminum Hydride

Interfacial Reaction Pathways and Kinetics in Polycrystalline Al/W and Al/TiW Bilayers

Crystallographic Texture of TiSi\sub 2\ as a Function of Deep Submicron Structure Geometry and Processing Conditions

Development of Microstructure in Titanium Silicide CVD

Thin Film Markers for Monitoring Vacancy Diffusion Outside the Growth Zone during Alloy Phase Formation

Properties of TiN/Pd Multilayer and Alloy Thin Films

Deposition and Characterization of TiB\sub 2\ and Ti-B-N Films

Technology Update on Hard Coatings for Cutting Tools

Influence of rf Substrate Bias on the Properties of CN\sub x\ Films Prepared by Reactive Magnetron Sputtering

Ion Beam Induced Surface Graphitization of CVD Diamond for X-ray Beam Position Monitor Applications

Determination of the Direction of Stress in a Polycrystalline Diamond Film using Polarized Raman Spectroscopy

Evidence of Aging Effects in Sputtered ZrN Films from Positron Annihilation

Properties of ZrO\sub 2\ Films on Sapphire Prepared by ECR Oxygen Plasma Assisted Deposition

Growth of Stoichiometric Al\sub 2\O\sub 3\ Thin Films by Controlably-Unbalanced Magnetron Sputtering of a Non-oxidized Al Target in Ar/O\sub 2\ Gas Mixture