AVS1996 Monday Morning

Chemical Imaging and Small Volume Analysis by Secondary Ion Mass Spectrometry

An Approach for 3D Quantification in Secondary-Ion Mass Spectrometry Analysis

Chemical Imaging with a Laser Desorption/Laser Postionization Mass Spectrometer

Laser Postionization of Sputtered Organics: A TOF-MS Study of Secondary Neutral Emission of Organic Overlayers

Temperature-Programmed Static SIMS of Silicon Wafers Modified with Photosensitive Silanes

Composition of Chemical Domains at Surfaces of Geological Materials by X-ray Absorption Microscopy

Comparative Magnetic-Field Imaging, Electric-Field Imaging, and Scanning Auger Microscopy Study of Metal-Matrix Composites

Combining Time of Flight SIMS with ESCA for Organic Surface Analysis

Scattering and Recoiling Imaging Spectrometry (SARIS)

What's Chemical Sensing Have to Do with Interfaces?

"Smart" Polymer-Protein Conjugates

An Electrochemical Method Towards Assembling Microscopic Arrays of Biological Receptors

Cell-Based Sensors

Combinatorial Chemistry

Advantages of Miniaturizing DNA-based Diagnostic Instrumentation

Influence of Surface Morphology in Surface-based DNA Computing

Physical Characterization and Hybridization Reactions of Surface-Bound DNA Probes

Chemical Reactions at Bonded Interfaces: Silicon Wafer Bonding

Physical Processes for Thin Silicon Film Exfoliation

Initial Oxide Formation on SiGe Studied by Ultrahigh Resolution XPS

The Surface Reaction during Silicon Oxidation Studied by MEIS

Selective Oxidation and Low pH Chemical Etching Route to Smooth Si(100) H-terminated Surfaces

Fundamental Chemistry of Molecular Precursors on Compound Semiconductor Surfaces

Photo Chemistry of Dimethylcadmium on Compound Semiconductor Surfaces

Novel Method for Growing CdS on CdTe Surfaces for Passivation and Heterojunction Formation

Metal Dependent Fermi-level Movement in the Metal/Sulfur-passivated InGaP Contact

Site-Specific Carbon Doping by MOVPE

Digital Light Processing\super TM\: The Digital Window to the Networked Society

A DARPA Perspective on Flat Panel Displays

Field Emission Display Product Design

Measurements and Modeling of VUV Emissions from Opposed Electrode Flat Panel Display Pixels

Optical Interference Lithography for Field Emission Flat Panel Displays.

Characterizing Flat Panel Display Materials using Quadrupole-based SIMS

Design for Manufacture of FPD Modules

The Application of Advanced Process Control to Semiconductor Manufacturing in Today's Factories

Neural Network - Plasma Process Implementations in Production

FDC/MBPC, Current and Near Term Possibilities in SC Manufacturing

Advanced Process Control in Plasma Processing

A Production Evaluation of Real-Time Statistical Process Control on a Sub-0.5\micron\m TCP Metal Etch Process

Advanced Process Control - How Outside Expertise Can Help

Scanning Thermal Microscopy at Sub-10 nm Spatial Resolution

Infrared Detection and Imaging using Microcantilevers

Thermovoltage in Scanning Tunneling Microscopy

Functionalization of STM Tips with C\sub 60\

Distinguish between Adatoms in Faulted and Unfaulted Halves of Si (111) 7x7 by Noncontact Atomic Force Microscopy

Non-Optical Feedback in Scanning-Probe Microscopes using a Piezo Tuning Fork as a Sensor

Molecular and Nanoscale Electronic Properties of Organic Thin Films

Probing the Nano-defect Induced CDW Metastable States by Low-T UHV STM

Surface Science at LHe Temperatures with a New Dedicated Low Temperature UHV STM System

A Novel UHV SPM Capable of Three-Axis Movement, Variable Temperature Imaging and MFM

Langmuir Probe Measurements in a Planar Inductive Coupled RF Discharge

Plasma Uniformity Study in a 300mm Inductively Coupled Oxide Etch Tool with Diagnostics and Simulations

Assessment of Coil Design and Internal Structures on Ion Flux Uniformity using a 3-Dimensional Model of Inductively Coupled Plasma Tools

Numerical Modeling of Neutral Gases in High Density Plasmas

Robot Assisted Three Dimensional Optical Emission Tomography of Inductively Coupled Plasma

Determination of Plasma Electron Temperatures by Trace Multiple Rare Gas Optical Emission, and Applications of Advanced Actinometry in High-Density Plasmas

Fine Pattern Etching by Parallel Plate Type Reactor in Low Operating Pressure using Plasma Transport from Gas Puff Plasma Source

Electron Temperature Control using Mesh Grid Bias and its Application in CF\sub4 \/Ar Plasma

Fast Dry Etching with New High-Density Plasma Source

Full Wave Helical Resonator: The First Capacitively Compensated Inductive Plasma Source

Plasma Properties and Gas Phase Reactions in Inductively-Coupled High Density Plasma Chemical Vapor Deposition

DSMC Simulation of Reactor Feature Scale Flows

Reactivity Measurements of SiH in the Deposition of a-Si:H from Silane and Disilane Plasmas using Plasma Enhanced Chemical Vapor Deposition

A Growth Model for the Fast Deposition of a-Si:H

Influence of Gas Phase Species on Silicon Oxide Film Properties for Films Deposited using ECR TEOS + O\sub 2\ and Silane + O\sub 2\ Plasmas

A Study of the Mechanisms of Deposition of SiO\sub 2\ by PECVD of Alkoxysilanes

Microwave Spectroscopic Measurements of Oxidation Products in TEOS/Oxygen ECR Silicon Oxide Deposition Plasmas

Atomic Absorption Measurements of Silicon in ECR Oxide Deposition Plasmas

Measurement of Ion Enhanced Deposition during PECVD of SiO/sub/2 using the Effect of Glass Substrates on Deposition Rate

Electrical Properties of Plasma Fluorinated Silicon Oxide Films Deposited at Room Temperature

Effect of Temperature on Plasma-induced Charging Damage in PECVD Processes

Real-Time Photoelectron Emission Microscopy of Lubrication on a Real Surface

Fluid Structure, Dynamics, and Solvation Forces in AFM

Adhesion Force Analysis of Interactions between AFM Tips and Substrates Modified with Organosilanes

Tribological Atomic Force Microscopy Studies of Grafted Organo-Silanes Monolayers

Friction and Adhesion at an Incommensurate Solid-Solid Interface

External and Internal Vibrations of Large Hydrocarbons Adsorbed on Metal Substrates

Surface Reactivity and Frictional Properties of Titanium Carbide (100)

Use of Sputtering and Negative Carbon Ion Sources to Prepare Carbon Nitride Films

Reduction of Friction through Finite-Size Effects

Tapping Mode/Phase Imaging of Composite Surfaces

UHV Friction Force Microscopy Studies of Ionic Materials

The Dissociative Adsorption of Hydrogen: From Simple Metals to Alloys

Vibrationally Resolved Core Level Photoemission of Chemisorbed Hydrocarbons

Influence of Adsorbates on the Ultrafast Electron Dynamics in Image Potential States at a Metal Surface

Femtosecond Photoemission Study of Electron Relaxation in Two-dimensional Layered Electron System

Measurements of Surface State Transitions on the Bare Diamond C(100) and C(110) Surfaces

Surface Fermi Contours and Phonon Anomalies on H/W(011)

Surface Electronic Structure of GaN(0001)

Photoemission Study of As/InP(110)

Strain-induced Depopulation of the Surface State in Epitaxial Ag Films on Si(111)

Visible-Light-Induced Etching of Br/GaAs(110)

Photo-Dynamics and Molecular Orientation of Ethyl Bromide on GaAs(110)

Vibrational Excitation Dynamics in Photodesorption.

Hot Electron Femtochemistry at Surfaces using Tunnel Junctions

Femtosecond Laser-induced Desorption of CO from Cu(100): Comparison of Theory and Experiment

Rotational and Translational Energy Distributions of CO Photodesorbed from Ag(111)

Thermal and Photon-induced Desorption of NH\sub 3\ and ND\sub 3\ from Ag(111)

Physisorption and Photodesorption of Formyl Fluoride on Ag(111)

Translational Energy Measurements from Bimolecular Photoreactions on Pt(111)

H\sub 2\O Resonant Desorption from Ice Multilayers using the Mark III Infrared Free Electron Laser

Microstructural Development in Cubic Boron Nitride Films

Growth Mechanism and Structural Studies of Sputtered PbTiO/sub 3/ Thin Films Epitaxially Grown on Miscut (001) SrTiO/sub 3/

Texture Development and Surface Morphology of Polycrystalline Al Films Deposited by Magnetron Sputtering on Epitaxial W(001) and Ti\sub x\W\sub 1-x\(001) Underlayers

Studies on Growth Texture in Fe and FeTaN using Under Layers

Nucleation and Growth of Aluminum Films on Sapphire (0001)

Tayloring of Titanium and Boron Nitride Films by Energy Controlled Plasma Beam Processes

Mass Spectroscopic Analyses of the Pathways for "Reactive" Species Incorporation during Reactive Magnetron Sputtering

The Effect of Oblique Sputtering on Microstructural Modifications of ZnO Thin Films

Ti\sub 1-x\Al\sub x\N-CrN Multi-layer PVD Films Deposited by a Reactive Unbalanced Magnetron Sputtering Technique

A Very Low Cost and High Reliability Flangeless Bellowless Aluminum Alloy Vacuum Beam Pipe in a High Energy Accelerator

The Surface Analysis and ESD Test on Ozone Gas Treated Aluminum Alloy

Operational Experience of Novel Vacuum Chambers Incorporating Massive Titanium-Sublimation Pumping in the CESR Interaction Region

Installation of a 14mm Vacuum Chamber for an Undulator in the 1.3 GeV Storage Ring at SRRC

Calculated Physical Adsorption Isotherms of Neon and Radon on a Heterogeneous Surface

Fabrication and Performance of the APS Accelerator Vacuum Systems

Study of Distributed Ion-pumps in CESR

Tests of an Environmentally Safe UHV Cleaning Process for BNL Accelerators and Storage Rings

Fine Structure Dependent Hydrogen Permeation in Titanium Nitride Films for Extremely High Vacuum Application

Synchrotron Radiation Induced Desorptions on Aluminum Surfaces