ALD/ALE 2025 Sunday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

Hover over a paper or session to view details. Click a Session in the first column to view session papers.
Session Sunday, June 22, 2025
1:00 PM 2:00 PM 3:00 PM 4:00 PM 5:00 PM
TS-SuA
ALD for Hydrogen Technology
ALD Process Optimization Using Machine Learning: A Practical Tutorial for Domain Experts
ALD-Enabled Synthesis of Metal-Organic Framework Thin Films: Fundamentals to Applications
Break
The Importance of Interconnect Technology of Si Devices and The Extension of ALD Processes
Atomic Layer Etching: Basics, Chemistries, and New Developments
The Era of Atomic Scale Processing: When Area-Selective Deposition Meets Atomic Layer Etching
Sessions | Time Periods | Topics | Schedule Overview