ALD/ALE 2024 Wednesday Morning

Ferroelectric Doped HfO₂: From Ald Processing to Device Applications

Interfacial Layer Engineering by Tungsten Oxide for Ferroelectric La-Doped Hf_0.5Zr_0.5O₂ Layer

Ultrathin HfO₂–ZrO₂ Multilayers Structures by ALD for Embedded Ferroelectric Non-Volatile Memories

Effects of Gamma Radiation on the Electrical and Structural Properties of Ferroelectric Hafnium Oxide-Based Capacitors

Enhancement of Ferroelectric Phase Formation of HfO₂/ZrO₂ Nanolaminate Films by Tuning HfO₂ and ZrO₂ Thicknesses Using Atomic Layer Deposition

Investigating the Impact of Process Parameters on the In-plane Strain of Ultra-Thin H­f_xZr_1-xO₂ Films

Thermal ALD IGO Channel Layer with High-thermal Stability (> 800 ^oC) for New Hybrid (Poly-Si/IGO) Vertical 3D NAND Application

Towards Neuromorphic Computing Using ALD Grown HfO₂ Based Memristive Devices

Novel Carbon-Doped HfO_x Memristor with Born-ON Characteristics Synthesized via ALD/MLD Combined Technique

Evolution of Structural Order in Doped Hafnia Thin Films by Atomic Layer Deposition for Emerging Device Applications

ALD HfZrO2 Films from Ferroelectric to High-k Applications

Tunable Superconducting Nb_xTi_1-xN by Fast Plasma-enhanced ALD for Quantum Applications

Atomic Layer Deposited Metal Nitrides (TiN and InN) and Metal Semiconductor Heterojunctions for Quantum Applications

Ceramic Thin-Film Composite Membranes with Tunable Subnanometer Pores for Molecular Sieving by Atomic Layer Deposition

Recent Developments and Emerging Applications in Atmospheric-Pressure Atomic Layer Deposition of High-Porosity Materials

Modulation Acceptor Doping of Silicon Nanowires using a SiO₂-shell doped with ALD Metal Oxide Monolayers

Conformality of Ternary Oxides by Spatial ALD: Monte Carlo Simulations and Experimental Study

Reusable Macroscopic HAR Test Kit Enabling Fast, Routine Characterization of Film Conformality

Superconformal ALD Using a Heavy Inert Diffusion Additive

Ald of Alumina-Silica Multilayers on Carbon Microfiber Fabrics: Microstructure and Potential as Refractory Oxygen Diffusion Barriers

Pillarhall Lateral High Aspect Ratio Assisted Unveiling of Secondary Growth Front and Background Reaction Mechanism in Atomic Layer Deposition

Helium Ion Microscopy on ALD Thin Films

Understanding the Amorphous Structure of Al- and Zn- Doped TiO₂ with an Automated 4D-STEM Analysis Pipeline

Non-Destructive Characterization of ALD Thin Films Using Angle-resolved XPS and Structure Modeling

Low-Temperature ALD of Metallic Cobalt for 3D Structures

Towards Deposition of Metallic Molybdenum Films from Molybdenum Hexacarbonyl in a Process Involving an Intermediate ALD Step and Subsequent Reduction

Growth of Metallic Ru Film by Oxidant-Free Atomic Layer Deposition Below 100 °C

Unveiling the Effect of the Starting Precursor on Ge₂Sb₂Te₅ Atomic Layer Deposition

Atomic Layer Deposition Equipment Vendors Market and Technology

Anisotropic and Isotropic Plasma-Enhanced Atomic Layer Etching Processes for Metals and Dielectric Materials for Semiconductor Devices

Plasma Atomic Layer Etching of Titanium Nitride with Surface Fluorination or Chlorination and Ar Ion Bombardment

Isotropic Plasma Atomic Layer Etching of Nickel Aluminide Binary Intermetallic Using a Super-Cycle Sequence Based on Hhfac and Al(CH₃)₃

Surface Effects in Quasi-ALE of Si: A Correlation with Ar⁺ Ion Energy

Atomic Layer Etching Study of Polycrystalline, Epitaxial and Doped ZnO Films Using in Situ Spectroscopic Ellipsometry

Atomic Layer Etching of Diamond for Epitaxy Preparation

Interest and Potential of Atomic Layer Etching for Selective Deposition

Insight into SF₆/H₂ Plasma Mixtures to Expand the Capabilities of ALE

Retarding-Field Energy Analyzer as a Tool to Find the Process Window for Plasma-Assisted Atomic Layer Etching and Quasi-Atomic Layer Etching

Resolving Composition and Crystal Structure of Fundamentally Novel MOF-Like Fe-Terephthalate Thin Films

Molecular Layer Deposition of Metal Organophosphonate Thin Films

Europium-Organic Luminescent Thin Films for Bioimiging Applications

ALD Young Investigator Award Finalist Talk: Inverted Living Molecular Layer Deposition: An Empowering Technique for Biomedical Applications

Hybrid Multilayer EUV Photoresist with Vertical Molecular Wire Structure

Chemical Transformations Mediated by Low-Energy Electrons within Vapor Phase Synthesized Al-based Hybrid Thin Films for Advanced Resist Applications: An In-Situ Investigation

Molecular Layer Deposition of Phosphorus Thin Films Using Bis-α-aminophosphine Chemistry