ALD/ALE 2024 Tuesday Afternoon

Toward All-ALD Halide Perovskite Solar Cells

Plasma-enhanced Atomic Layer Deposition of Tunable Cobalt Nitride Thin Films Enabled by Sequential N₂ Plasma Exposure

Hybrid Solar Cells Comprising Inorganic and Organic Materials Through Vapor Phase Infiltration

Mitigating the Cross-Ion Migration Towards Perovskite Using a Conformal Layer of Alumina via Atomic Layer Deposition

Thermoelectric Properties of Sb₂Te₃-based Ferecrystals based on Atomic Layer Deposition

Atomic Layer Deposition for Photoelectrochemical Solar Fuel Production

ALD Young Investigator Award Finalist Talk: How Instability Can Be Beneficial for Electrocatalysis: The Case of Nickel Sulfide Oxygen Evolution Reaction Precatalyst

Diffusion–Reaction Modeling for Atomic Layer Deposition on Spheres: Comparison with Experimental Data

Highly Durable Pt Based Fuel Cell Catalysts via Atomic Layer Deposition

Catalyst on Top? Importance of the Final Layer of an ALD Deposited Catalyst. Ni-Fe Catalysts Deposited by ALD

Enhanced Oxygen Evolution Reaction Catalysts by PE-ALD: Atomically Dispersed Co₁ and Fe₁ Supported on Ultra-thin Films of Doped NiO_x

Optimization of Photocurrent Response of Atomic Layer Deposited Ti_XFe_2-XO₃ Photoanodes

New Class of Tin Precursors Targeting Low Temperature ALD Processing

Novel Synthesis Route for Atomic Layer Epitaxy of BaSnO₃

Microwave Enhanced ALD of Al₂O₃

Atomic Layer Deposition of SnO Film Using Liquid Sn(EtCp)₂ Precursor and Combinations of H₂O and H₂ Plasma

A New Water Assisted ALD Process for Sc₂O₃ Using a Volatile Liquid Precursor

Atomic Layer Deposition of Crystalline Molybdenum Trioxide and Suboxide Thin Films

Promising Precursor Chemistry for ALD of Lithium-Based Thin Films

Benchmarking 4 Different Cobalt Precursors for Atomic Layer Deposition of Complex Cobalt Oxides

Machine Learning Assisted Surface Reaction Study of Al(Me)3 and Water on OH/Si(111)

Quantum Chemical Investigation on the Reaction Mechanism of Atomic Layer Deposition of ZrO₂ from Heteroleptic CpZr(N(CH₃)₂)₃ Precursor and Ozone

Microkinetic Modelling to Reveal How the Atomic-Scale Mechanism of Deposition or Etch Plays Out at Feature and Reactor Scale

First-Principles Based Comprehensive Surface Kinetic Modeling for Molybdenum ALD Film Growth

Modelling the Ligand Exchange Process for the Atomic Layer Deposition of Metal and Metal Oxide Thin Films

Sustainable Atomic Layer Processing for Semiconductor Applications

Life Cycle Assessment of GaN ALD

Specialization of Atomic Layer Etching to Address Sustainability Challenges

Thermal Al₂O₃ Atomic Layer Etching Using HF and Hacac Reactants: Etch Enhancement from Refluorination by Product HF During Hacac Reaction

Elucidating Gas Phase and Surface Reactions of Atomic Layer Etching

Thermal Atomic Layer Etching of Ta with NbCl₅ and O₂

Atomic Layer Etching of Tantalum: Unlocking the Etching Mechanism by in-Vacuo XPS Studies

Application of Machine Learning to Atomic-Scale Process Development

Surrogate Models for One-Shot ALD and ALE Process Transfer Across Reactors and High Aspect Ratio Substrates

Ligand-Assisted Surface Layer Formation in Wet Atomic Layer Etching of Molybdenum

Wet Atomic Layer Etching of Ruthenium

Combined Dry-Wet ALE for Tungsten: A Surface Characterization Study

Selective Deposition of Al₂O₃ on Patterned Polymer Substrates using Vapor Phase Infiltration

Sequential Infiltration Synthesis of Al₂O₃ in PMMA and PLA Thin Films: Convergence of Results Across Experimental Data and Theoretical Studies

Expanding the Toolbox of Vapor Phase Infiltration Processes

Organic-Inorganic Hybrid Thermoelectric Materials Through Vapor Phase Infiltration

Surprising, Simultaneously Enhanced H₂/CO₂ Selectivity and H₂ Permeability in Polymer Gas Separation Membranes by 1-Cycle Alumina Atomic Layer Deposition: The Effects of Inadvertent Vapor-Phase Infiltration

ALD Young Investigator Award Finalist Talk: Combining ALD Infiltration and Pressure-Assisted Sintering for Fabrication of Electrically Conductive Nanocomposites

ALD on Particulate Materials: A Comprehensive Review of Processes, Support Materials and Applications

Tuning MoCl₅ Self-Etching Effect for Deposition of 2D MoS₂ on 300mm Wafer by Thermal ALD

Low-Temperature ALD of SbO_X/Sb₂Te₃ Multilayers with Boosted Thermoelectric Performance

Enhancing Electrical Properties of 2D WS₂ Grown by ABC PE-ALD with Ion Energy Dose Control

Impact of ALD Precursor Choice on Nucleation and Growth of Dielectrics on 2D Materials

Noble Metal Nanoparticles Functionalized 2D Transition Metal Dichalcogenides by Atomic Layer Deposition for Enhanced Sensing Properties Toward Amino Acids