ALD2020 Wednesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details. Click a Session in the first column to view session papers.
| Session | Wednesday, July 1, 2020 | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 10:00 AM | 11:00 AM | ||||||||||
| LI3-WeM |
Welcome & Introduction
|
Surface Reactions Between Metals and Diketone induced by Gas Cluster Ion Bombardments
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ALE 2020 Best Student Paper Award Talk: Isotropic Plasma ALE of Al2O3 using SF6 Plasma and TMA
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Break
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Monolayer Lithography: Exploiting Inhibition Contrast from the Extreme Ultraviolet Irradiation of Organic Monolayers for Area Selective Depositions
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Super-Conformal ALD of Metallic Mo Films by Simultaneous Deposition and Etch
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Process Optimization in Atomic Layer Deposition Using Machine Learning
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ALD/ALE Student Awards, Closing Remarks, & Sponsor Thank You
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