ALD2020 Wednesday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
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Click a Session in the first column to view session papers.
| Session | Wednesday, July 1, 2020 | |||||||||||||||
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| 1:00 PM | 2:00 PM | 3:00 PM | 4:00 PM | |||||||||||||
| AA-WeA |
Study of ALD HfO2-Based High-k for GaN Power Devices and Ferroelectric Devices
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The Effect of Oxygen Source on Ferroelectricity of Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Film
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Deposition of Inherently Ferroelectric Films by ALD Using ZrD-04 and HfD-04
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Ferroelectricity of 300°C Low Temperature Fabricated HfxZr1−xO2 Thin Films by Plasma-Enhanced Atomic Layer Deposition using Hf/Zr Cocktail Precursor
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Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling
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Break
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Atomic Layer Annealing of AlN to Template The Growth of High Thermal Conductivity Heat Spreader Films
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Precision Defect Engineering of Metal/Insulator/Metal (MIM) Diodes Using Localized ALD Transition Metal Impurities
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Two-Dimensional Electron Gas at the Interface of an Atomic-Layer-Deposited Binary Oxides Ultrathin (< 5 nm) Film Heterostructures
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| AS-WeA |
Area-Selective Atomic Layer Deposition of 2D WS2 Nanolayers using Inhibitor Molecules
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Kinetic Modeling of Ru Area-Selective Atomic Layer Deposition on Nanopatterns
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Area-Selective Atomic Layer Deposition on Chemically Similar Materials
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Area-Selective Atomic Layer Deposition Al2O3 using a Small Thiol Inhibitor and Effects of Precursor Size
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Break
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Effect of Copper Surface Condition on Passivation Characteristics for Applications to Area Selective Atomic Layer Deposition
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Top and Bottom Ta2O5 Topographical Selective Deposition on 3D structures by Plasma Enhanced Atomic Layer Deposition
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| EM-WeA |
Enhanced Stretchability in Inorganic-Organic Alucone Thin Films Deposited from Long-Chain Organic Precursors
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Self-Terminating Molecular Layer Deposition of Polyurea and Growth Rejuvenation via Precursor Linking Group Selection
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Break
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Vapor-Phase Infiltration Synthesis of Organic-Inorganic Hybrid Nanocomposite Resists for Next-Generation Nanolithography
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Synthesis of SiAlCO Polymer Derived Ceramics (PDC) Thin Films using Molecular Layer Deposition
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| NS1-WeA |
Atomistic Simulation of ALD of 2D Transition-Metal Dichalcogenides
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ALD of MoSe2 using New Precursors
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Low Temperature Creation of Layered-MoS2 Thin Films on Large Area High Aspect Ratio Substrates
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Gas Sensing Characteristics of MoxW1-xS2 Synthesized by Atomic Layer Deposition
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| NS2-WeA |
Visualizing the Nucleation of ALD on Polymers
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Pt-Doped In2O3 Thin Films: Control of the Chemical State and Structure via ALD
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Study of Tuning Size, Coverage and Shape of Pd Nanoparticles Using Atomic Layer Deposition Through X-ray Based In-situ Characterization
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| TU2-WeA |
Wednesday Tutorial Welcome & Sponsor Thank You
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Growth Mechanisms and Selectivity During Atomic Layer Deposition
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Self-limiting Surface Reactions for Atomic-level Control of Materials Processing
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Fundamentals of ALE – Optimizing Passivation and Etch*
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Questions & Answers
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Session Over - View On Demand Presentations
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