ALD2020 Tuesday Morning

Atomic Layer Deposition Enabling Higher Efficiency Solar Cells

Atomic Layer Deposition of Zn_1-xMg_xO and Zn_1-xMg_xO: Al as Transparent Conducting Films for Chalcopyrite Solar Cells

Tuning Properties of ALD Oxide and Sulfide Materials for Photovoltaic Applications

Solar Cells Based on Phase-Pure Sb₂S₃ by Atomic Layer Deposition Forming Planar and Coaxial Heterojunctions

Metal Oxide Infilling of Quantum Dot Thin Films: Charge Separation, Stabilization, and Solar Cell Formation

ALD of Al₂O3 on Perovskite Solar Cells: Role of Active Interfacial Engineering

Ultrathin TiN by Thermal ALD as Electrically Conducting Li-ion Diffusion Barrier for Integrated 3D Thin-Film Batteries

Atomic Layer Deposition of Nitrogen Doped Al- and Ti-Phosphate for Li-ion Battery Applications

Passivation of Lithium Metal Anodes with ALD Aluminum Fluoride

Next-Generation Li-ion Batteries Enabled by Large-Area Atmospheric-Pressure Spatial Atomic Layer Deposition

ALD Al₂O₃ and MoS₂ Coated TiO₂ Nanotube Layers as Anodes for Lithium Ion Batteries

Molecular Layer Deposition for Stabilization of Electrochemical Materials

Automated Design of Thermally Stable Heteroleptic Precursors by Computational Screening

Unravelling the Reaction Mechanisms of Trimethyl Borate for the Atomic Layer Deposition Boron- and Hydrogen-Doped Alumina Films with Non-uniform Transversal Doping Profiles

Role of Ions in Film Conformality and Quality during Plasma-Assisted ALD of SiO₂ and TiO₂

ALD Conformality: Effects of Process Parameters on the Simulated Saturation Profile

Highly Selective Atomic Layer Etching for Semiconductor Application

Aspect-Ratio Dependence of Isotropic Thermal ALE and Mitigation Thereof

Precise Ion Energy Control with Tailored Waveform Biasing for Atomic Layer Etching

GaN Damage Evaluation After Conventional Plasma Etching and Anisotropic Atomic Layer Etching

Analysis of Ion Energy Dependence of Depth Profile of GaN by In-situ Surface Analysis

Atomic Layer GaN Etching by HBr Neutral Beam

Welcome and Introduction

Thermal Atomic Layer Deposition of Noble Metal Films Using Non-Oxidative Coreactants

Mixing It Up: Tuning Atomic Ordering in 2-D Mo_1-xW_xS₂ Alloys by ALD

Deposition of Conductive PEDOT Thin Films with EDOT and ReCl₅ Precursors

Resistless Lithography Based on Local Surface Modification of Halogenated Amorphous Carbon

Mimicking Chitin and Chitosan Type of Functionality with Novel Thin Films Grown by Molecular Layer Deposition

Closing Remarks & Sponsor Thank You