ALD2020 Atomic Layer Etching Sessions

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Abstract Book | Topics | Time Periods | Schedule Overview

Session Code Start Session Name
ALE1-MoA Monday, June 29, 2020 1:30 PM ALE of Metals and Alloys
ALE2-MoA Monday, June 29, 2020 4:15 PM ALE of Metal Oxides
ALE-MoP Monday, June 29, 2020 5:45 PM Atomic Layer Etching Poster Session
ALE1-TuM Tuesday, June 30, 2020 9:00 AM ALE Selectivity and Anisotropy
ALE2-TuM Tuesday, June 30, 2020 10:00 AM ALE for GaN Devices
ALE1-TuA Tuesday, June 30, 2020 1:00 PM ALE of Si-based Materials
ALE2-TuA Tuesday, June 30, 2020 4:30 PM Novel ALE Techniques and Materials
Abstract Book | Topics | Time Periods | Schedule Overview