ALD2017 Monday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Monday, July 17, 2017 | |||||||||||||||
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| 1:30 PM | 2:30 PM | 3:30 PM | 4:30 PM | |||||||||||||
| AA-MoA |
Atomic Layer Deposited Ta-doped ZrO2 for DRAM Capacitors
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High Capacitance 3D MIM Structures Achieved by ALD Deposited TiO2 for Advanced DRAM Applications
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Seed-layer Effects on the Crystallization and Electrical Characteristics of ALD-grown Ta2O5 Thin Films
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Electrode Induced Variation in Voltage Nonlinearity of ALD Al2O3 and HfO2 Metal-Insulator-Metal Capacitors (MIMCAPs)
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High-Voltage Nanolaminate Metal-Insulator-Insulator-Metal (MIIM) Tunnel Diodes using ALD Al2O3 and Ta2O5
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Capacitance Maximization of Ultra-thin Si-capacitors by Atomic Layer Deposition of Anti-ferroelectric HfO2 in High Aspect Ratio Structures
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Ferroelectricity in Ternary HfO2-ZrO2-La2O3 Mixed Oxide Grown by ALD
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A Study on the Oxygen Source and Annealing Temperature Effects of Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films
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Coffe Break & Exhibits
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Thickness Dependence of Polarization Response in (Hf,Zr)O2
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ALD as a Primary Contributor Towards Enabling Key Materials in the Memory Roadmap
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Plasma-Enhanced Atomic Layer Deposition of Oxygen Deficient TaOx Thin Films for Resistive Switching Memory Applications
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Monitoring Resistive Switching Properties of ALD Grown Al2O3/HfO2 Nanolaminate ReRAM Structures by iin-situ Reducing Plasma Treatments
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Properties of ALD Ferroelectric Si-doped HfO2 Characterized with Noncontact Corona-Kelvin Metrology
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| AF-MoA |
FTIR and NMR Analysis of ALD Al2O3 on poly-L-lactone Acid Powder and Electrospun Fibres
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Bulge Testing of Freestanding ALD Thin Film Membranes
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Infiltrated Zinc Oxide in Polymethylmethacrylate: An Atomic Cycle Growth Study
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Study on Atomic-Layer-Deposited Al2O3 Dielectric Films with a New Small Angle X-Ray Scattering Method
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Evaluating Mechanical Properties of Free-standing ALD Al2O3
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Secondary Electron Yield of Nano-oxide Thin Films Measured by Spherical Collector with Pulsed Electron Irradiation
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Electrical Characterization of Platinum Thin Films Deposited by Plasma-Enhanced ALD and Magnetron Sputtering
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A Facile Control of Major Carriers on Atomic Layer Deposited SnOx Thin Film by using Various Oxygen Reactants
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Coffe Break & Exhibits
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Activation of Metal Amidinate ALD Precursors on Surfaces and Implications for Film Growth
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Surface Chemistry during Atomic-Layer Deposition of Pt Studied with Vibrational Sum-frequency Generation
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Mechanistic Study of the Atomic Layer Deposition of Titanium Dioxide Films from Ethylcyclopentadienyltris(dimethylamido)titanium and Ozone or Water
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The Role of Surface Chemical Functionality in the Initial Stages of Deposition for Copper and Silver Precursors
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Reaction Mechanism of ALD Zirconium Oxide using Alkylamido-Cyclopetadienyl Zirconium Precursors
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Elucidation of Distinct Electric Characteristics of ALD Oxides on Highly Ordered GaAs(001) and In0.53Ga0.47As(001) Surfaces using Synchrotron Radiation Photoelectron Spectroscopy
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| ALE+ |
In situ Spectroscopic Methods for Atomic Layer Etching and Atomic Layer Deposition
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An in situ Optical Diagnostic Study of the Process Conditions that Affect the Etch per Cycle in ALE of SiO2
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New Innovative Etching Approaches for Future Generation by Controlling the Surface Reaction at Atomic-Level
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Controlled Layer-by-Layer Etching of ALD Grown Ta2O5 Thin Films
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Atomic Layer Etching Mechanism of 2D MoS2 Layers
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ALD & Quasi-ALE Patterning Application in EUV Contact Etch
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Coffe Break & Exhibits
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Boron Nitride Growth at Room Temperature Using Electron Enhanced Atomic Layer Deposition (EE-ALD)
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Catalyzed Atomic Layer Deposition of Silicon Oxide at Ultra-low Temperature using Alkylamines
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Low Resistance ALD TiN from Low Temperature Thermal N2H4 + TiCl4
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Study of the Isotropic Behavior of AZO Conductivity Deposited by Atomic Layer Deposition - Effect of Film Thickness
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Growth Behaviour and Stability of Atomic Layer Deposited MoO3 by Mo(CO)6 and H2O/O3 Precursors
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Characterization of Al2O3 and HfO2 Grown on Metal Surfaces with Thermal and Plasma Enhanced Atomic Layer Deposition
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| EM+ |
Unique Inorganic-Organic Hybrid Materials by ALD/MLD as Enablers of Next-generation Applications?
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Atomic/molecular Layer Deposition of Luminescent Inorganic-Organic Hybrid Erbium Pyridine Dicarboxylate Thin Films
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Molecular Layer Deposition of Manganese-Ethylene Glycol Hybrid Films
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Synthesis, Characterization, and Electrochemistry of Molybdenum-1,2-Ethanedithiol Hybrid ALD Films
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Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Polymer Nanopillars Generated by Infiltration Synthesis
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Kinetics of Vapor Phase Infiltration: Fitting Theory to Experimental Measurements
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Vapor Phase Infiltration for Doping Conducting Polymers
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Coffe Break & Exhibits
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Catalysts Modified by ALD for Harsh Biomass Conversion Processes
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Effects of Alumina Incorporation by Particle Atomic Layer Deposition on Sintering and Microstructure of Yttria-Stabilized Zirconia (8YSZ)
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Low-Temperature ALD Cobalt Sulfide for High-Efficient Hydrogen Evolution Textiles
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Atomic Layer Deposition of Platinum: An Avenue to the Scalable Synthesis of Ultra-low-loading Fuel Cell Catalysts?
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Pd-Ag Bimetallic Nanograin-Decorated Nylon Nanofibers: Efficient Catalytic Reduction of 4-Nitrophenol
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Size-Selective Catalysts with an Ultra-Thin Porous Shell Prepared by Molecular Layer Deposition
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