ALD2017 Area Selective ALD Sessions

Click a Session Code to view its Abstracts

Topic Abstract Book
(371KB, May 5, 2020)
Topics | Time Periods | Schedule Overview

Session Code Start Session Name
AS-SuA Sunday, July 16, 2017 1:30 PM Area Selective Deposition I: Deactivation (1:30-3:30 pm)/Inherent Selectivity, Activation, Deactivation (4:00-5:30 pm)
AS-MoP Monday, July 17, 2017 5:30 PM Area Selective ALD Poster Session
Topic Abstract Book
(371KB, May 5, 2020)
Topics | Time Periods | Schedule Overview