ALD2017 Area Selective ALD Sessions
Topic Abstract Book
(371KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AS-SuA | Sunday, July 16, 2017 1:30 PM | Area Selective Deposition I: Deactivation (1:30-3:30 pm)/Inherent Selectivity, Activation, Deactivation (4:00-5:30 pm) |
| AS-MoP | Monday, July 17, 2017 5:30 PM | Area Selective ALD Poster Session |