ICMCTF2007 Session TS4P: TS1 Poster Session

Thursday, April 26, 2007 5:00 PM in Room Grand Foyer

Thursday Afternoon

Time Period ThP Sessions | Topic TS4 Sessions | Time Periods | Topics | ICMCTF2007 Schedule

TS4P-1 Nanostructured Composite Films Produced by Microwave Plasma-Assisted Chemical Vapor Deposition Combined with Sputter-Deposition Technique
Y. Pauleau, S. Kukielka (National Polytechnic Institute of Grenoble, France); A. Sylvestre (Joseph Fourier University of Grenoble, France); W. Gulbinski (The Technical University of Koszalin, Poland)
A hybrid deposition technique combining microwave plasma-assisted chemical vapour deposition of carbon from argon-hydrocarbon gas mixtures of various compositions and sputtering of a metal (copper, nickel) target was used to produce metal/carbon composite films. This deposition technique is based on a distributed electron cyclotron resonance ((DECR) microwave plasma chamber equipped with four microwave field applicators (antennae) located at the periphery of the deposition chamber. Permanent magnets contained within grounded casings of rectangular cross-section provided the 875 Gauss isomagnetic surface in the vicinity of each antenna along its entire length required for ECR conditions at an excitation frequency of 2.45 GHz. Copper/hydrogenated amorphous carbon (a-C:H) composite films have been deposited on single crystal silicon substrates at room temperature. The total pressure of argon-CH4 mixtures in the deposition chamber was maintained at 0.13 Pa while the CH4 concentration was varied from 0 to 100 %. The composition and crystallographic structure of copper-containing films were determined by Rutherford backscattering spectroscopy (RBS) and X-ray diffraction (XRD) techniques. The deposition rate in the range (26-21) nm/min and composition of films were dependent on the composition of the gas phase and bias voltage of the metal target. A large increase in carbon content (from 25 to 60 at.%) in the films was noticed with increasing CH4 concentration in the gas discharge from 60 to 70 %. The size of Cu crystallites in Cu/a-C:H films was in the range (5-30) nm. The resistivity of Cu/a-C:H films containing 20 to 25 at.% of carbon was approximately 2.5 x 10-6 ohm cm whereas the resistivity value can reach 10 ohm cm for a carbon content of 60 to 75 at.%.
TS4P-2 Growth and Characterization of Waterweed-Like SnO2 Nanowires
C.T. Li (National Tsing Hua University, Taiwan); J.M. Chen, C.T. Hsieh (Industrial Technology Research Institute, Taiwan); H.-C. Shih (National Tsing Hua University, Taiwan)

Waterweed-like SnO2 nanowires have been synthesized on the silicon substrate by thermal evaporation of the Sn powders. Waterweed- like SnO2 nanowires were prepared by a two-step process. At the first step, SnO2 nanowires with about 50 nm in diameter and more than 100 um in length were grown on the substrate. Afterwards, SnO2 nanowhiskers were grown on the nanowires as the second step. Because of the product synthesized by the two-step process, nanowhiskers can be grown on nanowires uniformly. X-ray diffraction indicates that the product belongs to the tetragonal structure. Scanning electron microscopy (SEM) reveals the average width of nanowires is 220 nm, and the width of nanowhiskers is 100 nm. High resolution transmission electron microscopy (HR-TEM, JEOL JSM-2100F) and selected-area diffraction (SAD) patterns show the growth direction of nanowires is along the [101] and nanowhiskers is along the {12}. Room temperature photoluminescence shows that waterweed-like SnO2 nanowires have three prominent emission bands at 562, 620, and 660nm.

[1]Z.R. Dai, Z.W. Pan, and Z.L. Wang, Adv. Funct. Mater. 2003, 13, No. 1, 9-24 [2]M. Law, X.F. Zhang, R. Yu, T. Kuykendall, and P. Yang, small 2005, 1, No. 8-9, 858-865 [3]S.H. Tsai, C.T. Shiu, S.H. Lai, H.C. Shih, Carbon 2002, 40, 1597-1600.

TS4P-3 Resistive Switching Properties of Sol-Gel Derived Mo-Doped SrZrO3 Thin Films
C.-C. Lin, C.-H. Huang, C.-C. Lin (National Chiao Tung University, Taiwan); C.-H. Lin (Winbond Electronics Corporation, Taiwan); T.-Y. Tseng (National Chiao Tung University, Taiwan)
The resistive switching behavior of Mo doped SrZrO3 (Mo:SZO) memory films synthesized by sol-gel method was investigated in this study. The structure and I-V properties of the memory films are closely related to rapid thermal annealing temperature. Based on experimental results, it is proposed that the original and low current state (L-state) of the memory films are relevance for intrinsic defects. On the other hand, the high current state (H-state) of the memory film slightly decreases with a decrease in the size of top electrode. This result implies that the H-state is dominated by localized conducting path. The slight decrease of current is due to the randomly distributed intrinsic defects inside the memory films. The conducting mechanism of the L-state is dominated by Frenkel-Pool emission while that of the H-state is dominated by Ohmic conduction. The good stability of H- and L-state under applied voltage of -1 V for more than 104 s is demonstrated, which exhibits the possibility of Mo:SZO film for practical nonvolatile memory application.
TS4P-5 Performance of Sol-Gel Deposited Zn1-xMgxO Films used as Active Channel Layer for Thin-Film Transistors
C.-Y. Tsay (Feng Chia University, Taiwan); H.-C. Cheng (National Chiao Tung University, Taiwan); M.-C. Wang (Feng Chia University, Taiwan); P.-Y. Lee (National Taiwan Ocean University, Taiwan); C.-K. Lin (Feng Chia University, Taiwan)
ZnO thin-film transistors (TFTs) have attracted numerous R&D interests due to its transparency and radiation tolerances compared to those of conventional a-Si TFTs. In addition, doping with ternary element, for instance Mg, Sn, Zr, etc., can vary the electronic properties, improve the transparent property, and decrease the surface roughness of ZnO thin films. In this study, Zn1-xMgxO (x=0 to 0.36) thin films were deposited on alkali-free glass substrates by sol-gel method. The deposited films were baked at 300°C for 10 minutes and then annealed at 500°C for 1 hr under air atmosphere. Microstructures, optical and electrical properties of Zn1-xMgxO thin films were investigated using X-ray diffraction, SEM, AFM, UV visible spectroscopy, Hall measurement, etc. It has shown that by doping Mg, the transparent property has improved from 80% of pure ZnO thin films. In the present study, Zn0.8Mg0.2O exhibited the best transparency of 92%, increasing by ~15%. Moreover, the ZnO TFTs performance was also improved significantly.
TS4P-6 High-Preformance Polycrystalline Silicon Thin-Film-Transistors with Surrounded Gate Electode on Multiple Nanowire Channels Structure
L.W. Feng (National Chiao Tung University, Taiwan); T.-C. Chang (National Sun Yat-Sen University, Taiwan); P.-T. Liu (National Chiao Tung University, Taiwan); S.C. Chen (National Tsing Hua University, Taiwan); Y.C. Wu, S.M. Sze, C.-Y. Chang (National Chiao Tung University, Taiwan)
This study first proposes a novel higher gate controllability thin-film transistors structure with multiple nanowire channels which were surrounded by gate electrode having oxide/nitride/oxide (ONO) gate dielectric. Experimental results appear that the surrounded multiple nanowire channels structure can provide superior ability in increasing the ON-current and in controlling leakage, thus the ON/OFF ratio can be improved. Besides, it has been reported that ONO structure can provide higher effective capacitance. Thus, the ON-current could be enhanced further more. The high performance of proposed surrounded gate-TFT structure with muti-channel provides a good driving capability for AM-LCD technology.
TS4P-8 The Novel Nonvolatile Memory Devices of Tin-Palladium Alloy Embedded in Polyimide using Sol-Gel-Spin-Coating Method
C.-H. Chen (National Tsing Hua University, Taiwan); T.-C. Chang (National Sun Yat-Sen University, Taiwan); P.-T. Liu (National Chiao Tung University, Taiwan); M.-C. Wang (National Tsing Hua University, Taiwan); S.M. Sze (National Chiao Tung University, Taiwan); J.R. Chen (Engineering, National Tsing Hua University, Taiwan)
The novel process of fabrication nonvolatile memory devices is proposed by sol-gel spin coating method. The metal Tin and Palladium have been dissolved in polyimide (PI) solution and then spun on silicon-dioxide wafer. Sequentially a HfO2 layer was capped as blocking-oxide layer. The device has been verified electric properties in terms of charge retention, and endurance. The C-V hysteresis about 1.4V has been observed at +-6V sweep range. For the endurance, the memory window has been observed after 105 program/erase (P/E) operation yet. It is promising to fabrication nonvolatile memory devices with low-power consumption.
TS4P-9 Novel Design of Durable Hydrophobic Film
K.-H. Cha (LS cable LTD., Korea); M.S. Hsu (NIST)

The micro-electromechanical system technology has been receiving much attention in the past decade for its potential applications. One of the obstacles that needs to overcome to achieve the MEMS technology a step further is stiction and meniscus effect by moisture. It is because that as component scales go down to nanometer scale, the surface force represented by meniscus force in humid atmosphere is the dominant factor affecting the microsystem failure.

So far there are plenty of works about hydrophobic film to prevent the effect of moisture for a long time, most of those films could not sustain over long time due to the water penetration through pinholes of film. The motivation of this work is to design the durable hydrophobic film in molecular level based on the fundamental understandings of the tribochemistry and molecular combination.

The design concept is composed of 3 steps. First, chemically bonded stearic acid molecules were introduced by mechanical activation, which induce the exo-electron emission. This process can make a chemical bonding between stearic acid molecule and silicon substrate as strong as conventional self assembled monolayer films. After that, the secondary molecules were added to increase the packing density and mobility of film. Finally, a UV induced polymer net is added on top of combined molecules to prevent loss of molecules through oxidation or evaporation. The thickness of total film should be less than 3nm.

We identify the hydrophobic property of film was not changed after heating at 150deg for 6hr and also immersion in water for 140hr.

TS4P-10 Photocatalytic Disinfection of Phytopathogenic Bacteria by Dye-Sensitized TiO2 Thin Film Activated by Visible Light
K.S. Yao, D.-Y. Wang, C.Y. Chang, K.W. Weng, L.Y. Yang (Mingdao University, Taiwan)
Many semiconductor materials have the characteristic of photocatalyst. Titanium dioxide (TiO2) is the most popular among them. Irradiation with light is required for any photocatalyst to be function. Depending on the difference of the material, the wave range of absorbance is from ultraviolet light to visible light. However, the photocatalyst materials which absorb the visible light will attract much attention in the future. Therefore, the photocatalytic inactivation of phytopathogenic bacteria including Enterobacter cloacae SM1, Erwinia carotovora subsp. carotovora 3 and E. carotovora subsp. carotovora 7 by TiO2 thin film doped photosensitive dye (5, 10, 15, 20- tetraphenyl- 21H, 23H- porphine nickel) under irradiation with visible light (>400 nm) was evaluated. The results showed that TiO2 thin film doped photosensitive dye had good transmittance. Meanwhile photodegrading efficiency of Indigo dye was about 1.2 times than those of control treatments after irradiated with visible light for 4 h. The inhibition rates of TiO2 thin film doped dye against E. cloacae SM1, E. carotovora subsp. carotovora 3 and E. carotovora subsp. carotovora 7 in the visible spectral region were more than 90%.
TS4P-11 Physical Characteristics of Metal/Carbon Composite Films Prepared by Microwave Plasma-Assisted Deposition Technique
A. Sylvestre (Joseph Fourier University of Grenoble, France); S. Kukielka, Y. Pauleau (National Polytechnic Institute of Grenoble, France); W. Gulbinski (The Technical University of Koszalin, Poland)

Nickel/hydrogenated amorphous carbon (a-C:H) films have been deposited on single crystal silicon, Ni coated Si and stainless steel substrates at room temperature by combining sputter-deposition of metal and microwave plasma-assisted chemical vapor deposition of carbon from argon-methane mixtures of various compositions. The composition of films was investigated by Rutherford backscattering spectroscopy (RBS), nuclear reaction analyses and elastic recoil detection analyses (ERDA). The crystallographic structure of films was determined by X-ray diffraction (XRD) techniques.

The grain size of Ni and Ni3C and magnitude of residual stresses were determined as functions of the composition of films. The nanohardness and elastic modulus of films were obtained from the load-displacement nanindentation curves. Ball-on-disk tribological tests for films deposited on steel substrates were conducted in room air at room temperature under a load of 1 N with a sliding speed of 5 cm/s. The minimum value of the friction coefficient was 0.25 for films containing about 75 at.% of carbon.

The dielectric properties of Ni/a-C:H films deposited on Ni coated Si substrates were investigated as functions of the frequency and temperature varying from 0.1 Hz to 1 MHz and from - 150°C to 175°C, respectively. For Ni/a-C:H composite films of 360 nm in thickness containing 19 at.% of nickel, the dielectric constant was higher than 300 at a frequency of 1 Hz. The dielectric constant value for these films was observed to decrease from 300 to 200 as the frequency was varied from 1 Hz to 10 kHz. The temperature and frequency effect as well as the nickel content effect on the dielectric properties of Ni/a-C:H films are discussed.

TS4P-12 Texture and Orientation Response of Ti Films Deposited on Different Organic Underlayers
P.J. Henry, S.F. Shuler, S.C. Street, M.L. Weaver (The University of Alabama)
A systematic study comparing the morphology and growth of Ti films on n-Si<100> substrates and n-Si<100> substrates covered with different self-assembled monolayers (SAMs) is presented. The organic underlayers in this study include CH3(CH2)18Si(Cl)3, G4/NH2 PAMAM, G4-50%C12 PAMAM, G8/NH2 PAMAM, and (3-aminopropyl)trimethoxysilane. The films have been deposited using d.c. magnetron sputtering and characterized using x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS). Grain size, texture, and orientation changes in the film have been observed when deposited on different SAMs. These observations will be compared with XPS data to determine the interactions of the Ti film with the underlayer.
TS4P-13 Formation of Germanium Nanocrystals by Rapid Thermal Oxidizing SixGeyOz Layer
W.-R. Chen (National Chiao Tung University, Taiwan); T.-C. Chang (National Sun Yat-Sen University, Taiwan); P.-T. Liu, C.-H. Tu, C.-Y. Chang (National Chiao Tung University, Taiwan)
A new method to fabricate Ge nanocrystals by rapid thermal oxidizing SixGeyOz thin film was investigated in this study. The size of Ge nanocrystal at 600°C for 60sec was about 6nm by the transmission electron microscope (TEM) analysis. In addition, the oxidation caused the Ge nanocystals were discretely distributed in the SiO2/GeO2 film. The over-oxidation was found for the condition of rapid oxidation at 900°C for 60sec. The nucleated Ge nanocrystals were oxidized to become germanium oxide for the formation of GeO2 by the analysis of X-ray Photoelectron Spectroscopy (XPS). The obviously memory window was found in the C-V hysteresis curve for the formation of Ge nanocrystals or GeO2 nanocrystals in the thermal oxidized SixGeyOz layer. The program/erase efficiency was also discussed by the threshold voltage shift versus program/erase time for both types of nanocrystals. The program/erase efficiency of hole is superior to electron due to the larger band offset in conduction band in GeO2 nanocrystal sturcure. Furthermore, the larger electron affinity for Ge nanocrystals than GeO2 nanocrystals causes the better retention time and endurance. The ease process for fabricating nonvolatile memory by introducing Ge component in SiO2 was achieved in the study. In addition, the process is compatible with the current fabrication technology.
Time Period ThP Sessions | Topic TS4 Sessions | Time Periods | Topics | ICMCTF2007 Schedule