ICMCTF2000 Session VS: Vendor Session

Monday, April 10, 2000 3:30 PM in Room Sunrise

Monday Afternoon

Start	Invited?	Item
3:30 PM		VS-7 CC800/9: The New Coating System for Cutting Tools G. Erkens, T. Leyendecker, R. Wenke, H.-G. Fuss, St. Esser (CemeCon, Germany) CemeCon presents the new CC800/9, the newest type of coating system that follows the seccessful CC800/8 system, the system that made TiAlN coatings on cutting tools commercially available for the very first time. The CC800/9 is the result of straight and consequent development work in the field of thin film technology exclusively for cutting tool applications. The CC800/9 takes the benefits from the 13 years experience of continous operation of CC800 models at tool manufactures and in coating service. It adds the advantages of latest design, components and materials to produce highest quality products in short time and at reasonable cost. The CC800/9 firstly provides the capability to produce all current and most modern coatings like TINALOX _TM, SUPERTIN_TM, ALOX_TM, CCPLUSC_TM and much more just in one coating system. Upcoming future coatings will certainly be applied on the CC800/9 as well, wether r.f., puls technique or hybride technique i.g. in combination with PACVD is neccassary. A new challenge for everybody who desires newest technique for in house production with a high potential for the future but also for those who want to share the benefit from newest developments in the coating service.
3:50 PM		VS-8 New Generation Rotary And Rod Magnetrons T. Van Vorous (VCC, Ltd.) VCC, Ltd. recently introduced the CRM series of Cylindrical Rotary Magnetrons and the RM-2 series of Rotary Magnet Rod Magnetrons. This paper will describe the unique new features of these coating devices. Some of these features include computer designed magnetics that eliminate the higher end erosion of present competitive models and provide target utilization of over 85%. The cathodes have a modified water flow design to allow higher power input and use of standard pipe dimensions for targets so that available materials can easily be used. Other features will also be described. The paper will also address several significant problems in use of these devices that need assistance from other vendors. It will also compare the use of these devices with planar magnetron cathodes in similar industrial applications.
4:10 PM		VS-9 Energy Approach for Thin Film Characterization M.M. Misiak, T.J. Wyrobek (Hysitron, Inc.); Z.R. Rymuza (Warsaw University of Technology, Poland) Performance and lifetime of machine parts and tools can be improved dramatically using thin film coatings. Hardness, defined as a ratio of force applied to the indenter and area of the imprint, characterizes plasticity of material. The definition of hardness with minor modifications is used for evaluation of thin films down to several nanometers. Advanced testing machines, such as Hysitron's TriboScope, can record force and displacement applied to the indenter during the process of nanoindentation. The recorded data is used to determine the area of imprint induced by indenter in tested material. However, only the maximum value of applied force is used for analysis in current hardness evaluation algorithms. Loading-unloading curve can provide more information on mechanical behavior. Derivation of energy associated with the process of nanoindentation leads to the quantitative comparison of samples. A new method for in-situ evaluation of nanoindentation in terms of energy approach is presented. Energy dissipation is derived from the loading-unloading curve by means of genetic algorithm and numerical integration routines. Experimental results and comparison between different coatings and substrates using energy approach is disclosed.
4:30 PM		VS-10 Simultaneous Quasi-static and Acoustic Emission Monitoring of Nanoindentation A. Daugela, T.J. Wyrobek (Hysitron, Inc.) Nano scale contact mechanics play important role in the thin film evaluation. Nanoindentation technique is used for qualitative measurement of hardness and Young’s modulus while nanoscratch is utilized in determination of breakthrough force and friction coefficient. However, new methods need to be explored due to the fact that coatings are getting thinner. For instance, quasi-static nanoindentation technique is not applicable for hard disk drive tribo coatings less then 10nm thick. Acoustic Emission monitoring in combination with quasi-static indentation can extend limits of nanoindentation and nanoscratch technique. Destructive by nature, nanoindentation and nanoscratch processes release elastic strain energy stored in the local contact area between interacting endenter and specimen. Cracking at nano scale occurs due to loading as well as adhesive unloading of the tip and generates elastic and SAW propagating from the contact zone into the surrounding media. Elastic waves and SAW are monitored by the specially designed AE sensor which is integrated into the three capacitance plate based nanoindentor. Due to the small size of the contact, wave propagation phenomena is observed starting from a few hundred kHz to several MHz. Experimental quasi-static loading-unloading curves are correlated with the AE signal bursts. Advanced signal processing is an essential feature of the newly developed technique. Continuos and digital wavelet transform, together with the short digital fast Fourier transform, are utilized for AE signal decomposition. Digital eigenvalue filtering and cross-correlation techniques are employed for the separation of AE signal in order to correlate them with fracture events.
4:50 PM		VS-11 Dynamic Testing Technique for Characterization of Visco-elastic Materials S.A. Downs, O.L. Warren, A. Daugela, T.J. Wyrobek (Hysitron, Inc.) Polymer films have found widespread use as corrosion and scratch-resistant coatings on hard surfaces. Conventional testing techniques are inadequate for testing of thin films and must be replaced by other methods such as nanoindentation techniques. Due to the strongly time-dependant properties of thermoplastic materials, conventional quasi-static nanoindentation testing cannot fully characterize their mechanical properties. Dynamic testing methods have proven to be successful with a variety of materials in determining the storage and loss moduli, which are important parameters in fully understanding the properties of a coating. Hysitron developed nanoscale dynamic testing, which is an improved method for the evaluation of mechanical properties of visco-elastic thin films. The industry-leading force and displacement resolution of Hysitron’s transducer provides accurate measurement of the stiffness and damping characteristics of visco-elastic materials. Results from a comparison of several scratch-resistant polymeric coatings will be presented.
5:10 PM		VS-12 PVD Coatings onto Metallic Sheets and Strips - Equipment and Technological Considerations J. Brückner, U. Willkommen (Leybold Systems + Service GmbH, Germany) The PVD coating of metallic sheets and stripes is well known since many years. In many applications the properties of these coatings were not sufficient and the estimated manufacturing costs were too high. It has been demonstrated by fundamental investigations that it is possible to achieve extremely high deposition rates onto large areas applying specially developed plasma activation processes. These processes are key features to overcome the current application limitations of PVD coatings. In this presentation an overview concerning the basic processes available now will be given. For pre-treatment a magnetically enhanced plasma etching with a pulsed power supply is used. The electron beam evaporation provides highest deposition rates at lowest deposition costs for this application. New technical principles are required to operate the EB technology in connection with high plasma densities. These new results have been realized in a new generation of coating systems for metallic sheets and strips which has been developed by the Leybold Systems + Service GmbH in cooperation with the Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik Dresden. This new in-line deposition equipment provides the possibility to produce coatings under industrial like conditions up to coating widths of 500mm and substrate speeds of 1m/s
5:30 PM		VS-13 High Productive Deposition of Multi -layer Thin Films in In-line plants R. Fendler, W. Hentsch, C. Raensch (FHR Anlagenbau GmbH, Germany) The S750 in-line sputtering system, developed by FHR Anlagenbau GmbH, Dresden, Germany is useable for the continuous high production of double sided sputtered multi-layer films for a wide variety of applications. The key features of this equipment, such as high productivity, excellent film performance, high equipment reliability and low maintenance cost will be demonstrated with the example of a multi-layer contact deposition system for electronic components in a manufacturing environment. With the concept of a modular design the system is quite useful and prepared for state-of-the-art sputtering processes for reactive films and the integration of substrate preconditioning, like ion etching, and others.