AVS 69 Friday Morning
Sessions | Time Periods | Topics | Schedule Overview
        Hover over a paper or session to view details.
        Click a Session in the first column to view session papers.
    
    
| Session | Friday, November 10, 2023 | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| 2D+ | 
                                 
                                    Stochastic Computing Enabled by 2D Memtransistors
                                    
                                 
                             | 
                            
                                 
                                    Electrical Characteristics of Semi-Metallic 2H-NbSe2 for Scalable Interconnects
                                    
                                 
                             | 
                            
                                 
                                    Magneto-Transport Measurement and Maximum Entropy Mobility Spectrum Analysis in Semiconductor Substrates for Graphene Growth
                                    
                                 
                             | 
                            
                                 
                                    What Are 2D Materials Good for?
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    The Study of Internal Ion Transport in Ionic CuInP2S6
                                    
                                 
                             | 
                            |||||
| AP+ | 
                                 
                                    Atomic Layer Etching of SiO2 via H2/SF6 Plasma and TMA
                                    
                                 
                             | 
                            
                                 
                                    Area Selective Deposition of HfO2 on Oxide and Nitride Surfaces
                                    
                                 
                             | 
                            
                                 
                                    Surface Functionalization of SiNx over SiO2 with Aldehydes to Enable Area-Selective Atomic Layer Deposition
                                    
                                 
                             | 
                            
                                 
                                    Surface Reactions During Atomic Layer Etching of Platinum by High-Density Nitrogen-Oxygen Plasma and Organic Acid Vapor
                                    
                                 
                             | 
                            
                                 
                                    Isotropic Plasma-Thermal Atomic Layer Etching and in-Situ Atomic Layer Deposition Passivation of Aluminum Films for Superconducting Quantum Devices
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            |||||
| AS+ | 
                                 
                                    Correlative Analysis Using Time-of-flight Secondary Ion Mass Spectrometry for Beam Sensitive Samples
                                    
                                 
                             | 
                            
                                 
                                    Secondary Ion Mass Spectroscopy of Battery Surface and Interface Chemistry – Metrology and Applications
                                    
                                 
                             | 
                            
                                 
                                    Characterizing Ion Distribution at the Solid-Electrolyte Interface in Solid-State Lithium Ion Batteries with ToF-SIMS
                                    
                                 
                             | 
                            
                                 
                                    A Perspective on X-ray Photoelectron Spectroscopy (XPS) Peak Fitting, and Reporting of XPS Data Acquisition and Peak Fitting Parameters in the Literature
                                    
                                 
                             | 
                            
                                 
                                    Unsupervised and Supervised Machine Learning Applied to ToF-SIMS of an Organic Matter-Rich Mudstone with Molecular Biomarker
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    Probing Thin Film Interfaces at the Nanoscale by Low Energy Ion Scattering
                                    
                                 
                             | 
                            
                                 
                                    The Effect of Instrument Settings, Sample Distance, and Tilt on TofsimsSecondary Ion Intensities
                                    
                                 
                             | 
                            
                                 
                                    Evaluation of Unaltered and Irradiated Nuclear Graphite Surfaces through Integrated Traditional XPS and HAXPES Techniques
                                    
                                 
                             | 
                ||
| EM1+ | 
                                 
                                    Thin Film Challenges and Opportunities in a 3D-Evolving Memory Landscape
                                    
                                 
                             | 
                            
                                 
                                    Patterning Challenges in the Era of Vertical Scaling
                                    
                                 
                             | 
                            
                                 
                                    Plasma Etch Challenges and Innovations to Enable sub-26nm Pitch L/S Patterning with High-NA EUV
                                    
                                 
                             | 
                            
                                 
                                    Area-Selective Deposition with Carborane and Aromatic Self-Assembled Monolayer Blocking Layers
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            ||||||
| EM2-FrM | 
                                 
                                    Enabling Novel Infrared (IR) Materials for Next-Generation Applications
                                    
                                 
                             | 
                            ||||||||||
| HC+ | 
                                 
                                    CO Characterized Pt/Cu(111) Single Atom Alloy (SAA) for the Hydrogenation of Unsaturated Aldehydes
                                    
                                 
                             | 
                            
                                 
                                    Efficient Catalyst and Protection Layer of Ni/α-Al2O3 Catalysts for Improved H2O/CO2 Reforming Reaction of CH4via Atomic Layer Deposition
                                    
                                 
                             | 
                            
                                 
                                    Complementary Outer Atomic Layer Analysis of Catalyst Materials Using LEIS
                                    
                                 
                             | 
                            
                                 
                                    Size-Selected Ptn Cluster Electrocatalysts for Alcohol Oxidation
                                    
                                 
                             | 
                            
                                 
                                    Calorimetric Energies of Metal Atoms within Nanoparticles on Oxide and Carbon Supports: Improved Size Dependencies, Adhesion Energies and Trends versus Metal Element with the Spherical Cap Model
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            |||||
| IB1-FrM | 
                                 
                                    An Air-Free Transfer Mechanism For FIB SEM
                                    
                                 
                             | 
                            ||||||||||
| IB2-FrM | 
                                 
                                    Correlative and In Situ TEM/APT Technique Reveals Insights into Early Oxide Film Formation in a High Entropy Alloy
                                    
                                 
                             | 
                            
                                 
                                    Applications of Advanced Focused Ion Beam System to Energy Storage Materials
                                    
                                 
                             | 
                            
                                 
                                    The Fabrication of Ruthenium single crystal specimen with Focused Ion Beam and Field Ion Microscopy for Atom Probe Tomography
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            |||||||
| IB3-FrM | 
                                 
                                    Modeling and Experimental Demonstrations of Ion-Solid-Gas and Photon Beam Interactions During Nanoscale Synthesis
                                    
                                 
                             | 
                            
                                 
                                     Displacement Damage and Total Ionizing Dose Response of Ga2O3 MOSFETs 
                                    
                                 
                             | 
                            
                                 
                                    Helium Ion Microscopy for Morphological Analysis of Thrombi Extracted via Thrombectomy for Acute Stroke
                                    
                                 
                             | 
                ||||||||
| MS-FrM | 
                                 
                                    Energy Efficient Scaling in Microelectronics: Enabling a New Era in Computing for a Sustainable Future
                                    
                                 
                             | 
                            
                                 
                                    Improving Asic Energy Efficiency from Systems to Silicon
                                    
                                 
                             | 
                            
                                 
                                    Atomic Precision Advanced Manufacturing for Tunnel Field Effect Transistors
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    Materials, Devices, and Packaging Opportunities Towards a Super Energy Efficient Future
                                    
                                 
                             | 
                            ||||||
| PS+ | 
                                 
                                    EUV Lithography Patterning towards Devices Nano Scaling
                                    
                                 
                             | 
                            
                                 
                                    Break Healing and LER Mitigation for Low Dose EUV Exposure
                                    
                                 
                             | 
                            
                                 
                                    Carbon Resist Microlens Etching in DF-CCP CF4 Plasmas: Comparison between Modeling and Experiments
                                    
                                 
                             | 
                            
                                 
                                    Investigations of Surface Reaction Mechanisms in Euv Induced Hydrogen Plasmas
                                    
                                 
                             | 
                            
                                 
                                    Area Selective Processing Based on Physisorption to Improve Functions of Extreme Ultraviolet Resist
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    Recent Advances in Ga2O3 Material Development at AFRL
                                    
                                 
                             | 
                            
                                 
                                    Reverse Lift-Off Process to Avoid Sidewall Artifacts Resulting from Dry Etching “Challenging” Materials
                                    
                                 
                             | 
                            
                                 
                                    Control of Ge/Si Core/Shell Nanoparticles Growth In Pulsed Nonthermal Plasmas
                                    
                                 
                             | 
                ||
| PS+ | 
                                 
                                    Electrolyte Engineering for Nitrogen Fixation by Plasma Electrolysis
                                    
                                 
                             | 
                            
                                 
                                    Two Atmospheric Pressure Plasma Jets Driven by Phase-Shifted Voltages: A Method to Control Plasma Properties at the Plasma–Surface Interface
                                    
                                 
                             | 
                            
                                 
                                    Plasma Chemistry in Atmospheric Pressure Gases and Liquids: Fundamentals and Novel Applications
                                    
                                 
                             | 
                            
                                 
                                    Increasing Adhesion of Polyurethane Painting on Aluminum by Atmospheric Pressure Plasma Jet Treatment
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    Fundamentals of Atmospheric Pressure Discharges for Plasma Catalytic Applications
                                    
                                 
                             | 
                            
                                 
                                    Atmospheric Pressure Inductively Coupled Torus Torch System for 3D Printing the Silicon-Nanofiber (Si/CNF) Anodes for Li-ion Batteries
                                    
                                 
                             | 
                            
                                 
                                    Design and Functionality of a Low-Frequency Pulsed Plasma System
                                    
                                 
                             | 
                |||
| TF+ | 
                                 
                                    Membrane Design by Atomic Layer Deposition
                                    
                                 
                             | 
                            
                                 
                                    Ultrathin Transferable MOF/Polymer Janus Thin Films with Tunable Turing Morphologies
                                    
                                 
                             | 
                            
                                 
                                    Growth of Metal-Organic Framework Thin Films by a Vapor-Assisted Conversion Method
                                    
                                 
                             | 
                            
                                 
                                    Enhancing the Electrical and Optical Properties of Thermochromic VO2: The Impact of Nanostructuring and Gold Nanoparticles
                                    
                                 
                             | 
                            
                                 
                                    Atomic Layer Deposition of Sn-doped MoO2 Electrode Films with Distorted Rutile Structure for High-performance TiO2-based DRAM Capacitors
                                    
                                 
                             | 
                            
                                 BREAK 
                                    
                                 | 
                            
                                 
                                    Area Selectivity and Crystallographic Orientation of Zif-8 Films Deposited by Molecular Layer Deposition
                                    
                                 
                             | 
                            
                                 
                                    Electron-Beam Assisted Solvent-Free Bottom-Up Patterning of Zeolitic Imidazolate Frameworks
                                    
                                 
                             | 
                            
                                 
                                    Al2O3 Atomic Layer Deposition on a Porous Matrix of Carbon Fibers (FiberForm) for Oxidation Resistance
                                    
                                 
                             | 
                            
                                 
                                    Mesoporous UiO-66-NH2 Thin Film Growth on TiO2 Coated Fabrics Using Atomic Layer Deposition (ALD) for Enhanced Organophosphate Degradation
                                    
                                 
                             | 
                |