Papers

AVS2017 Session EW-TuM: Exhibitor Technology Spotlight

Tuesday, October 31, 2017 10:20 AM in Room West Hall

Tuesday Morning

Start	Invited?	Item
10:20 AM		EW-TuM-8 Development of a Novel Single Cold Cathode Ionization Gauge with Operation from High Vacuum to Atmosphere using Advanced Manufacturing Techniques Dave Kelly, Gerardo Brucker (MKS Instruments, Inc., Pressure and Vacuum Measurement Group) Cold cathode ionization gauges (CCIGs) have been used for decades to make high vacuum measurements on a variety of production equipment. Traditionally, wide-range CCIGs involve multiple gauge techniques for pressure measurement, making this technology cost-prohibitive and not as robust for many industrial applications. In order to expand the scope of CCIG technology to address cost-sensitive and rugged applications, we have developed an innovative wide-range CCIG. This new CCIG utilizes a one gauge technique – gaseous discharge – which is capable of measuring pressures from high vacuum to atmosphere. Advanced manufacturing techniques were employed that allowed for the testing and selection of low-cost construction materials that are well suited for industrial environments. Moreover, these manufacturing techniques allowed for a design of this new gauge to be easily serviceable during routine preventive maintenance cycles, lowering the overall cost of ownership for a given application. The result of this development yielded a manufacturable low-cost wide-range CCIG capable of accuracy that meets the needs of the industry from 1E-7 Torr to atmosphere.
10:40 AM		EW-TuM-9 New Developments from Thermo Fisher Scientific Timothy Nunney, Paul Mack, Christopher Deeks, Adam Bushell (Thermo Fisher Scientific, UK) In this presentation we will highlight the latest developments in surface analysis and materials analysis instrumentation from Thermo Fisher Scientific.