AVS2006 Thursday Afternoon

A Fundamental Investigation of Erucamide Migration in Polyolefin Matrices

Phenomenological Relationships Between Chemistry and Mechanical Properties Derived from ToF-SIMS and Nanoindentation Observations

Multi-technique, Multivariate Analysis Methods for Enhanced Sample Characterization

Multi-Technique Characterization of Niobium Surfaces for Superconducting Radio Frequency (SRF) Accelerators

Ion Sputtering and the Static Limit for Nanoparticles

Optimised XPS Depth Profiling of Aluminium Surfaces

Characterization and Metrology Challenges in SiON Gate Thin Films for ULSI Technology

Ultimate Nanoprobing in UHV: Four independent Scanning Tunneling Microscopes Navigated by High Resolution UHV SEM

Nanostructured Titanium Surfaces for Bone Biotemplating Applications

Nonlinear Optical Studies of Transmembrane Polypeptide Incorporation into Supported Bilayer Membranes

Analysis of In-Vitro Biomineralization Processes Quantitatively by Quartz Crystal Microbalance (QCM)- and Transmission Electron Microscopic (TEM)- Explorations

Study of the Interfacial Water Structure on Sulfobetaine-Terminated Thiolate Self-Assembled Monolayers

Multi-Technique Characterization of Lipid/PEG Interactions and Oligonucleotide Microarrays

Effects of Annealing and Sample Processing Methods on Surface Molecular Orientation of Ultra-high Molecular Weight Polyethylene

NanoTribological Studies on the Mechanisms of O-Linked Glycosylated Proteins in the Boundary-Lubrication of Articular Cartilage

Interfacial Transport Properties in Metal-Molecule-Semiconductor Diodes

Oxygen-Modified Interaction of Evaporated Titanium with Organic Monolayers

Silicon-on-Insulator Based Nanogap Electrode Device for DNA Conductivity Measurements

Metallization of Organic Semiconductors: Interface Chemistry and Surface Morphology

Characterization of Device Grade ITO/Conductive Polymer Interfaces Using Low Intensity Photoemission Spectroscopy and Electrospray In-Vacuum Deposition

Contact-Related Effects in Organic Thin Film Transistors

Ag Islands Decorated by C₆₀

Ab Initio Study of High-k Gate Stack

Material and Electrical Properties of HfRuN Gate Electrodes on HfO₂

Spectroscopic Detection of Electronically Active Defects in Nanocrystalline Ti/Zr/Hf Elemental Oxides

Combining Ferroelectric Oxides and Semiconductors for Smart Transistors

Theoretical Analysis of the Interface between Zr(Hf)O₂ and Ge(100) for Ge-based MOSFET Devices

Sub-1 nm Equivalent Oxide Thickness Zirconium Doped Hafnium Oxide High-k Gate Dielectrics

Evaluation of Various Ru-insulator-Ru Capacitors with CVD-Ru Thin Films for Both Top and Bottom Electrodes

Three-dimensional Imaging of Nano-Voids in Copper Interconnects using Incoherent Bright Field Tomography

Critical Dimension Metrology: A Comprehensive Evaluation of Current Techniques in Spectroscopy-Based Scatterometry

Low Coherence Optical Intereferometry and Raman Scattering Spectroscopy for Stress Tensor Measurements

Micro-Probe CV and IV Analysis of Thin Dielectric Films in Product Wafer Scribe-Line Structures

Characterizing Copper Lines for Advanced Interconnect Using Normal Incidence Scatterometry

Leakage Current and Dopant Activation in Ultra-Shallow Junctions Following Ms-Anneals Measured by Non-Contact Junction Photo-Voltage Methods

Controlled Chemical Mechanical Polishing of Polysilicon and Silicon-Dioxide for Nanostructures

Properties of Carbon-Based Nanostructures Grown by Low-Pressure Plasma Enhanced Chemical Vapor Deposition

Prospects and Processing of Soft Materials

Synthesis of Suspended Single-Walled Carbon Nanotubes on Tips of Silicon Nanostructures Fabricated by Plasma Etching

Fabrication of Thin Silicon Nanodisk for Quantum Effect Devices Using Cl Neutral Beam Etching and Ferritin Iron Core Mask

Cool Plasma Functionalization of Nanodiamond Particles

ZnCdSe Ternary Nanophosphors

Multiphysics Modeling of Electrochemical Structuring Using Complex Tool Electrodes

Mechanisms and Selectivity for Etching of HfO₂ and Si in BCl₃ Plasmas

Plasma Etching of HfO2 in High-Density Chlorine-Containing Plasmas without RF Biasing

Effects of Low Energy Nitrogen Plasma on the Removal of HfSiON

Vacuum-Ultraviolet Induced Photocurrents in Plasma-Charged, Atomic Layer Deposited, HfO2/SiO2/Si Dielectric Stacks*

Mechanisms of Plasma-Induced Damage during Ion-Assisted Chemical Etching of Indium-Zinc-Oxide Films in Reactive Plasma Chemistries

Reactive Plasma for High Aspect Ratio Etching and Surface Modification

Atomic Layer Etching of III-V compounds using a Low Angle Forward Reflected Neutral Beam

Improvement of Programming Characteristics of Ge2Sb2Te5 Thin Films by Incorporating SiO2 for Application of PcRAM

A Generic Framework of Surface Kinetics Modeling for Plasma-Surface Interactions

Modeling of Roughness Evolution and Instability during Si Plasma Etching

C₄F₆/Ar Plasma Modeling by using Feature Simulation and Elementary Reaction Analysis

Dry Process under Competition Among Charging, Etching, and Deposition

Edge Effects in Reactive Ion Etching: The Wafer- Focus Ring Gap*

Development of High Aspect Ratio, Selective Si Etch Model in CCP Halogen Plasma

Global Model of a Dual Frequency Capacitive Discharge

Particle-in-Cell Simulation of Beam Extraction Through Grid Holes with Application to Neutral Beam Sources

Characterization of Inorganic Nanomaterial Composite Coatings

Microstructure and Surface Properties of Ti-Si-C Nanocomposite Thin Films Deposited by dc Magnetron Sputtering

Characterisation of Nanocomposite Alumina-Zirconia Thin Solid Films Deposited by Reactive Dual RF Magnetron Sputtering

Tailoring the Nanostructure and Surface Properties of Nanocrystalline Diamond Thin Films on Micro-End Mills for Micro-manufacturing Applications

Growth Study of TiN- and TiCxNy-based Superhard Nanocomposite

Preparation and Characterization of Reactively Sputtered Al_xCoCrCuFeNi Oxide Films

Magnetron Sputtered Nanolaminate Coatings for Debonding of Segmented Structures

Dimensional Attributes of Enhancements in Nanocrystalline Ta-V Layered Structures

Effect of Pt on Clean and Oxidized Surfaces of (Ni, Pt)₃Al

The Hydrogen Cycle on the CeO₂ <111> Surface

Microscopic Studies on Dynamic Processes on Metal Oxide Surfaces Relevant to Oxide Catalyses

Oxidation of NiAl(111)

Substrate-controlled Limiting Thickness for Nanoscale Alumina Film Growth on Single Crystal Nickel Aluminides under non-UHV Conditions

NOx Storage Capacity and Thermal Aging of BaO/theta-Al2O3/NiAl(100) Model Catalyst

Molecular Understanding of NOx-Storage-Reduction Catalysts: NO2 and H2O Adsorption on BaO/theta-Al2O3/NiAl(100)

Oxygen-induced Surface Structures of Nb(110) Studied by LEED, AES and STM

Investigation of the Tribology of Diamondlike Carbon and SAMs using Molecular Dynamics

Interfacial Force Microscopy of Viscous Water on Hydrophilic Surfaces

Design of Environmentally Friendly Lubrication Systems through Surface Grafting of Ultrahydrophilic High-density Polymer Brushes

Mechanical Properties of Alkanethiol Monolayers on Gold: A Force Spectroscopy Approach

Observations of Microslip in Realistic Microscopic Contacts with Combined Nanoindentation and Quartz Microbalance

The Effect of Filling and Temperature on the Mechanical Responses of Carbon Nanotubes

Assessing nanomechanical properties and nanoscratch resistance of Me-ZrN and ZrN thin films using Atomic Force Microscope

Field Emitter Arrays: Issues and Opportunities

Field Emission Performance in Various Vacuum Conditions and Multistage Field Enhancement Effect of Tungsten Oxide Nanowires

Digital Electrostatic Electron-Beam Array Lithography (DEAL) Prototype Improvements

Cathodoluminescence Degradation of Y₂SiO₅:Ce Thin Films

Computational Study of the Initial Stage of Pulsed Laser Deposition of SrTiO₃ Thin Films

Dynamics of Ultrafast Laser Generated Ablation from Metals and Semiconductors Close to the Ablation Threshold

Electrical Conduction in Pulsed-Laser Deposited As- and Ga-doped ZnO Films

Nanoscale Laser Processing and Micromachining of Biomaterials and Biological Components

Laser Desorption from Polytetrafluoroethylene at 157 nm -- A Possible Reactant Source for Thin Film Growth