AVS2005 Tuesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, November 1, 2005
12:00 PM 1:00 PM
EW-TuL
Cold Cathode/Quartz Crystal Combination Gauge
Seal Life Test of 300mm Hybrid Chamber in PVD Thermal Cycle Environment
Robust System Identification and Optimized Tuning for Control of Evaporation Processes: Benchmark Study Results of Manufacturing Performance
Internet-Enabled Vacuum Training System
CompuVac NT - A New Generation Vacuum System Design Tool
Sessions | Time Periods | Topics | Schedule Overview