AVS2004 Monday Morning

Application of TOF-SIMS to Environmentally Relevant Surface and Interfaces

Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for 2 and 3 Dimensional SIMS Analysis

Fundamentals and Applications of a New Bi-cluster Liquid Metal Ion Source

TOF-SIMS Studies using a Newly Developed C₆₀⁺ Primary Ion Gun: Fundamental Aspects and Applications

ToF-SIMS Quantitation of PDMS at the Surface of a Dehydrated Commercial Hydrogel Material

SIMS Trace Uranium Measurements in HfO Films with the ims-1270

Improved Analysis of Bulk Insulators using Magnetic Sector SIMS with O₂⁺ Primary Beam and Electron Beam Adjacent to Analysis Area

Ionization of Al Atoms Emitted from Al Metal

High-Resolution Structural and Dynamic Characterization of Proteins on Biomaterial Surfaces

Protein-Surface Interactions Studied with Internal Reflection Ellipsometry

Angle-resolved Imaging Surface Plasmon Resonance

Feasibility Study of a Waveguide Excitation Fluorescence Microscope for Micro and Nanoscale Characterization of Bio-Interfaces

In situ Sum Frequency Generation Characterization of Peptide Monolayers on Hydrophobic and Charged Surfaces

Measurement of Conformational Changes of Surface Bound Biomolecules: a Novel Strategy for Analytical Biosensing

Study of Metal Film-Tethered (Bio)Molecules in Aqueous Solution by Enhanced ATR-IR Spectroscopy

Investigation of Fibrinogen Displacement from Oxide Surfaces

Probing the Conformation of Hydrated Molecular Adsorbates on Solid Interfaces Using Long Period X-ray Standing Wave Fluorescence

Impact of Electron-Phonon Coupling on Thermal Boundary Resistance by Molecular-Dynamics Simulation

Thin Film SiGe Superlattice Micro Refrigerators Flip-Chip Bonded with IC Chips

Interfaces, Functionalization and Heat Flow in Nanoscale Materials.

Thermal Transport in Nanostructured Materials

Thin Film Micro Refrigerators for on Chip Thermal Management

Micro- and Nanoscale Thermal Phenomena in Magnetic Recording Heads

Transport and Mechanics in Hard and Soft Nanomaterials

Porous Thin Films for MEMS and Nano Applications

Nanotribological Characterization of Perfluoropolymer Thin Films for BioMEMS Applications

Multi-scale Friction Experiments Using Atomic Force Microscopy and Surface Micromachined Interfaces

Deposition and Characterization of Nitrogen-Doped Polycrystalline SiC Films for MEMS Applications

Characterization of Nanotribological Properties and Surface Chemistry of Advanced Nanostructured Carbon Materials for MEMS and NEMS Applications

Critical Issues in Epitaxial Growth of Pulse Laser Deposited AlN Films for MEMS and NEMS based RF Resonators

Vapor Phase Uptake of Mobile Organophosphates for MEMS Lubrication Purposes

Mechanical and Electrochemical Characterization of Gold Membranes on a Drug Delivery MEMS Device

Microfabrication and Nanomechanical Characterization of Polymer MEMS for Biological Applications

Quantitative Analysis of Electronic Properties of Carbon Nanotubes by Scanning Probe Microscopy: from Atomic to Mesoscopic Length Scales

Electronics and Optoelectronics with Single Carbon Nanotubes

Ballistic Transport of Hole in 4µm Carbon Nanotube Channel Transistor with Coulomb Blockade Effect

Carbon Nanotube Photo-detectors

Field Electron Emission from Aligned Carbon Nanotube Bundles at an Ultra-Low Threshold of 1 V/µm

Modeling of Gas-modulated Carbon Nanotube Schottky Barrier

Environmental Effects on Double Wall Carbon Nanotube Field Effect Transistors

Electrical Characterization of Carbon Welds between Multiwalled Carbon Nanotubes

Stiffness and Nonlinear Mechanical Properties of Single-Walled Carbon Nanotube Bundles

Etching of SiC and SiCN with Tetrafluoroethane/Oxygen Reactive Plasma

Investigation of Fundamental Etching Reaction of Organic Low Dielectric Film Using Ion Beams with Radical Injection

Fluorocarbon Surface Chemistry in Dual Frequency Capacitively Coupled Discharges for Dielectric Etching: A Comparison with Inductively Coupled Plasmas

Low-k and Porous Low-k Sidewall Roughening: Fluorocarbon Plasma and Beam Measurements

The Effects of Pore Morphology on the Diffusive Properties of a Porous Low-K Dielectric

Using In-vacuo Electron-Spin-Resonance and Infrared Spectroscopy Technique in the Analysis of Surface Reactions of Low-k films during/after Plasma Processes

Minimizing low-k Damage during In-situ Photoresist Strip

Comparison of In-situ and Ex-situ Resist Strip Process for Ultra Low-k/ Cu Interconnect

Impact of Different Ashing Plasmas on Porous and Dense SiOCH

Analysis of Ash-Induced Modification of Porous Organosilicate Glass Inter-Level Dielectric Materials on Patterned Structures Utilizing Electron Energy Loss Spectroscopy and Angular Resolved XPS

Highly Selective Etching of Si₃N₄ to SiOC by Precise Ion Energy Control for sub-90 nm Dual Damascene Formation

Challenges Facing Deep Trench Silicon Etching for Present and Future Trench Technology Nodes

Etching High Aspect Ratio Structures in Si using SF₆/O₂ Plasma: Experiments and Feature Scale Modeling

Etch Rate and Profile Evolution Model for High Aspect Ratio Etch in HBr/NF3/O2 Plasma

Optimal Chamber Aspect Ratio of an Inductively Coupled Plasma Etcher for Advanced Gate Application

Highly Anisotropic and Damage-free Gate Electrode Patterning in Neutral Beam Etching Using F₂ Based Gas Chemistry

Silicon Recess Formation During High Density Plasma Polysilicon Gate Etching

Deep Cryo-Etching for Silicon Structures

Atomic-scale Simulations of Spontaneous and Ion-assisted Etching of Silicon

X-ray Photoelectron Spectroscopy Analyses of SiGe and Si Surfaces after Selective Etching of Si

Heterointerfaces and Magnetism in Ferromagnetic Semiconductor Heterostructures

Structural and Magnetic Properties of a Magnetic Semiconductor MnGeN₂ Grown by MBE

Thermal Stability of GaCrN Epitaxial Layers

Structural Characterization of GaMnN Thin Films Grown by Chemical Beam Epitaxy (CBE).

Induced Host Moments and Mn Electronic Structure in Mn-Doped Iii-V Ferromagnetic Semiconductors

Intrinsic Versus Extrinsic Nature of Co Doped TiO₂ Diluted Magnetic Semiconductor Thin Films

Ferroelectric Field Effect on Ferromagnetism in Diluted Magnetic Insulator Anatase Co:TiO₂

Applications of a Dilute Magnetic Semiconductor Based on AlN

Ferromagnetism and Polaron Percolation in Mn_xGe_1-x Dilute Magnetic Semiconductor

Structure and Hardening in TiN/a-SiNx Multilayers and Self Organizing Ti1-xAlxN Films

Structure and Optical Behavior of As-Grown and Annealed Titania/Alumina Nanolaminate Films

The Growth of Depth-Graded WSi₂/Si Multilayer Linear Zone Plates*

Early Stages of Oxidation at 800°C for CrAlON Superlattice Coatings used to Improve Oxidation Resistance of Steel Plates for Applications as SOFC Interconnects^*

Oxide Nanolaminate Coatings for Protection Against Perforated Pitting Corrosion in Stainless Steel

Environmentally Friendly Plasma Electrolytic Processes for Corrosion and Wear Protection of Lightweight Metals

Evaluation of Plasma Polymer Coatings in Corrosion Protection of Aluminum Alloys

Nano-coatings for Complex Uneven Surfaces Cellular Foams & Nano-fibers of Carbon

Electronic Stablization of Nanophase Separation Along Si Atomic Chains

The Hammett Equation in Single Molecule Chemistry: Probing a Linear Free Energy Relationship One Molecule at a Time

Benzene on Au{111} at 4 K: Observation of Molecular Cascades and Substrate-Mediated Interactions

Listening to Atom Dynamics During Atomic Manipulation

Electronic Structure and Excitations at the Atomic Scale

Quantum Well States in Thin Films of Pb on Si(111)

Newns-Anderson Model for Chemicurrents

Direct Observation of Electron Emission from a Metal Surface Due to Scattering of Vibrationally Excited Molecules

Co-Adsorption of Polar Molecules with SF₆ on Ru(0001): Effect on Adsorption Geometry, Ion Yields and Electron-Mediated Chemistry

Spin-Resolved Plasmon Dispersion of Gd(0001)

Atomic-level Control of Chemical Properties of Si(100) with Dopant Impurities

Chemistry on Surfaces of Thin Films and at Thin Film/Silicon Buried Interface: Vinyltrimethylsilane and (hfac)Cu(VTMS) on Si(100)-2x1 and on TiCN/Si(100)

Functionalization of Semiconductor Surfaces

Adsorption of Amines on Germanium and Silicon Surfaces

Silicon Surface Chemistry of Substituted Triazines

Carbonyl Chemistry at the (100)-2x1 Semiconductor Interface

Adsorption of Chiral Enantiomers of 2,3 butanediol on Si(100)

Self Assembly on Si(114)-(2x1): Molecular Attachment Via Alkene Functional Groups

Adsorption of Cata-condensed Aromatic Compounds on Si(100)

Ideal Methyl Termination of the Si(111) Surface

Atomic Layer Deposited Barriers for Copper Interconnects

Effects of Surface Chemistry on ALD Ta(N) Barrier Formation on Low k Dielectrics

Evaluation of Plasma Enhanced Atomic Layer Deposition TaN for Metal Gate Electrode Application

Nucleation and Electrical Characterization of Ruthenium formed by Selective Area Atomic Layer Deposition

Atomic Layer Deposition for Metal Gate and Capacitor Electrodes

Infrared Analysis of HfO₂ ALD from Hafnium Diethyl-Amide on SiO₂ and Si-H surfaces

Area-selective Atomic Layer Deposition for high-κ Dielectric Materials

SiO₂ Atomic Layer Deposition Using HSi[N(CH₃)₂]₃ and H₂O₂

Radical-Enhanced Atomic Layer Deposition of Pure and Erbium-Doped Y₂O₃ Thin Films