Manufacturing Science and Technology Sessions

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MS-MoM Monday, October 2, 2000 8:20 AM Metrology for IC Manufacturing
MS-MoA Monday, October 2, 2000 2:00 PM Challenges in Semiconductor Manufacturing for the First Decade of the 21st Century
MS-WeA Wednesday, October 4, 2000 2:00 PM Process Integration (Cu/Low-k/300mm)
MS-ThM Thursday, October 5, 2000 8:20 AM Advanced Modeling and Control for IC Manufacturing
MS-ThA Thursday, October 5, 2000 2:00 PM Advanced Modeling for IC Manufacturing
MS-FrM Friday, October 6, 2000 8:20 AM Langmuir Award/Ultra Clean Society and Contamination Free Manufacturing
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