AVS2000 Thursday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
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Click a Session in the first column to view session papers.
| Session | Thursday, October 5, 2000 | ||||||||||
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| 2:00 PM | 3:00 PM | 4:00 PM | 5:00 PM | ||||||||
| BI+ |
Substrate and Attachment Chemistry Effects on Adsorption and Single-Base Mismatch Discrimination on Immobilized Oligonucleotide Arrays
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Investigation of DNA Hybridization on Surfaces by Surface Plasmon Fluorescence Spectroscopy (SPFS)
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Fluorescence Detection of Surface DNA Hybridization Reactions Based on Surface Structural Changes
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Silicon Surface Chemistry for DNA Immobilization
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BARC: A Magnetoresistive Biosensor1
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A Biosensor Based on Force Differentiation1
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Encapsulation of Smart Polymers in Silica: Stimuli-Responsive Porous Hybrid Materials That Incorporate Molecular Nano-Valves
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Adsorption Behavior and Optical Properties of Surface-Adsorbed Polystyrene Nano Particles
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Formation and Patterning of Supported Fluid Lipid Bilayers on a High Refractive Index Substrate
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| DI+ |
High Density Thin Film Ferroelectric Nonvolatile Memories
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Process Window Extension of TiN Diffusion Barrier using Pre-oxidation of Ru and RuOx Film for (Ba,Sr)TiO3 Dielectric Film
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Atomic Polarization and Screening Charge by Variable Temperature Scanning Probe Microscopy of Ferroelectric Surfaces
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Film-formation Mechanisms, Microstructure, and Properties of BST Thin Films Grown By MOCVD
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Epitaxial (Ba,Sr)TiO3 on MgO for Room Temperature Microwave Phase Shifters
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High Temperature Etch Processing for FeRAM MFM Capacitor Stack Fabrication
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| MC-ThA |
In-situ Control of Wet Chemical Etching of Patterned Bulk-GaAs using Real Time Spectroscopic Ellipsometry
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In- and Ex-situ Characterization by Second-harmonic Generation of the RPECVD Oxidation and Nitridation of Silicon and Ex-situ Comparisons with Other Optical Techniques
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What Is Needed and What Is Practically Available for Small Area, Small Depth, Chemistry Sensitive Analysis in the Semiconductor Wafer Processing Industry
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Dopant-Induced Contrast of Si Devices in PEEM
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Elemental Mapping of Sub-µm Particles and Structures by LASER-SNMS and TOF-SIMS
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Dose Quantity Effects on Nano-scaled Dot Size and Depth Profile of Gallium Implantation on Silicon by Finely Focused Ion Beam
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Ion Channeling Effects on the FIB Milling of Crystalline Materials
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XPS Analysis of Si Samples Prepared Using the FIB Lift-Out Technique
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Determining Area Selectivity in Small-Area XPS Analysis1
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| MI-ThA |
The Determination of Magnetostriction for Spin-Valve Devices with 5.0 nm and 10.0 nm Permalloy Layers
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Properties of GMR Multilayers Grown by RF Diode Sputtering
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GMR Sensing Elements for the Detection of Magnetic Microbeads in Biosensor Array
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Preparation of Magnetic Tunnel Junctions by Ionized Atom Beams
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Nonlinear Magneto-Optical Investigations of Magnetic Interfaces
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"Acoustical" and "Optical" Spin Modes of a Fe/Cr/Fe/Cr/Fe Multilayer with Ferro- and Anti-ferromagnetic Couplings
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Analysis of Tunneling Magnetoresistance Structures by Low Energy Electron Nanoscale Luminescence Spectroscopy
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Magneto-optical and Optical Spectroscopies of Fe/Si Multilayered Films
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| MM-ThA |
Stress Measurement in MEMS Devices
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Issues in MEMS Reliability and Characterization
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MOCVD PZT as a Pathway to Integrated Piezoelectric MEMS
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Deposition of Highly Oriented LiCoO2 Thin Films for Use as Cathodes in Thin Film Batteries
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Microstructure and Mechanical Properties of Polysilicon and Poly-SiC Films for MEMS
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Comparison of In-situ Boron-doped and In-situ Phosphorus-doped Polysilicon Films for Microelectromechanical Systems
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Investigation of the Friction and Adhesion Properties of BPT and BPTC Self-assembled Monolayers by AFM
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Viewing a Moving Surface Contact: An STM-QCM Study of Vapor Deposited Films on Metal Surfaces
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| MS-ThA |
Challenges in Modeling & Simulation of Semiconductor Equipment & Processes
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Modeling of Oxide CMP and Polish Pad Conditioning
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Mechanical Properties of a CuTa Interface by Molecular Dynamics
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Integrating Process Models, Equipment Logistics, and Factory Flow for Manufacturing Systems Optimization
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Plasma Reactor Simulation to Improve Film Deposition Uniformity
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First Principles Modeling of Gas-Surface Interactions in Low Pressure CVD Processes
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Etching of Silicon in HBr Plasmas for High Aspect Ratio Features
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Contamination Removal from Wafer with Deep Trenches
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In Situ Metrology for Cu Electroplating
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| NS+ |
Optical Sieves - How to Get the Light through Subwavelength Holes
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Near-field Optical Measurements of Two Types of the Super-resolution Near-field Structures
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Near Field Surface Photovoltage Microscopy
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Dual-Wavelength Scanning Near-Field Optical Microscopy
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Novel Scanning Near-field Optical Spectroscopy/Atomic Force Microscope Probes with High Polarisation Single/Double Slit and Cross Aperture Tips
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Optical Properties of Strained GaInP/InP Quantum Dots Studied with STM Based Electro-luminescence
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Silicon Nanostructures via Intense Ultrafast Electronic Excitation
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Microstructural and Optical Properties of Porous SiC
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Development of a Photon Detection STM for Inelastic Light Emission
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| PS1-ThA |
Plasma Surface Modification of PET and Acrylic Coating Surfaces
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Exploring Chemical Mechanisms behind Hydrophilic Surface Modification of Polymeric Membranes by Low-temperature Plasma Treatment
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The Mechanisms of Anisotropy Control in Plasma Etching Processes
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Pulsed Plasma Polymerisation of Acrylic Acid
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Control of Ion Energies in RF Plasmas used for the Surface Modification of Polymers
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Surface Chemical Patterning by Plasma Polymerization
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The Relationship between Deprotection and Film Thickness Loss during Plasma Etching of Chemically Amplified Resists
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Study of Defects Induced on Graphite Surface by Low Pressure Argon Plasma
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Novel Technique to Enhance Etch Selectivity of Carbon ARC over PR based on O2/CHF3/Ar Gas Chemistry
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| PS2-ThA |
Ion Energy Control for Enhanced Plasma Etch Selectivity
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Temperature and Bias Effects in ICP Etching of Silicon Dioxide
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Control of Incident Fluxes and Surface Reactions in the Etching of Dielectric Materials
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Reaction Mechanisms and SiO2 Profile Evolution in Fluorocarbon Plasmas: Bowing and Tapering1
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Etching Mechanism of Silicon Nitride Film in Self-aligned Contact Etching Process
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High-performance Silicon Dioxide Etching for High-aspect Contact Holes
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Selective Etching of SiO2 in High Density Fluorocarbon Plasmas for Applications in Micro-systems
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Trench Etch Processes for Dual Damascene Patterning of Low-k Dielectrics
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| SC+ |
Kinetics of GaN Growth and Decomposition
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Carbonization of Si (111) by Gas Source Molecular Beam Epitaxy using Triethyl Gallium and Subsequent GaN Growth
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Epitaxial III-V Nitride Growth on SiC(0001) by Means of A3Σu+ Metastable Molecular Nitrogen
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Crystal Growth Kinetics and Transport in GaN Epitaxial Lateral Overgrowth
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Thick GaN on Si Substrate by Hydride Vapor Phase Epitaxy using Epitaxial Lateral Overgrowth Technique
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Growth and Electronic Structure of ScN, a New Refractory III-V Semiconductor
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Structure and Optical Properties of ScN(001) Grown by Molecular Beam Epitaxy
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ScN Thin Films and Thin Film Devices
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| SS1+ |
Real Time TEM Observations of the Oxidation of Silicon
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Comparison of Electrochemical Corrosion Properties and Oxidation Kinetics of Ozone- and Oxygen-formed Aluminum Oxide Films
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Temperature Dependent Adsorption of Oxygen on TiO2 (110): A Photoemission Study
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Water Reactions at Plutonium Oxide: Surface Chemistry
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Studies of Water Plasma Treatments on Silicon Oxide Films
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The Nature of Oxygen at Rocksalt and Spinel Oxide Surfaces
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Direct Observation of Native Hydrogen Adatoms on Rutile TiO2(110) Surface
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Work Function Changes and Surface Chemistry of Oxygen and Hydrogen on Indium Tin Oxide
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Adsorption of Atomic Hydrogen on Both Polar Surfaces of ZnO
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| SS2+ |
Friction at High Speeds1
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Energy Dissipation Thresholds During Interfacial Shear
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Chemical and Mechanical Contributions to the Friction In Self-Assembled Monolayers on Au Surfaces
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Atomic and Molecular Level Insight into Discreet Frictional Events
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Molecular Tribology of Highly Ordered Monolayers
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The Effect of C60 on Interfacial Friction and Wetting of Toluene
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Mechanical Behaviour of Confined Films: An In-situ Study of Silane Monolayers by Second Harmonic Generation (SHG)
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New Aspects of Friction Force Microscopy in Ultra-high Vacuum
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| TF-ThA |
Criteria for Choosing Transparent Conductors
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Preparation of Transparent Conducting Thin Films using Multicomponent Oxides Composed of ZnO and V2O5 by Magnetron Sputtering
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Properties of Transparent conducting CdO-In2O3-SnO2 Thin Films Prepared by Pulse Laser Deposition (PLD)
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Expanding Thermal Plasma Deposition of Natively Textured ZnO for Thin Film Solar Cell Applications
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Effects of Excess Oxygen Introduced during Sputter Deposition and Post Annealing under a High Oxygen Pressure on Carrier Mobility in Indium-tin Oxide Films
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Preparation and Properties of Transparent Conductive Aluminum-doped Zinc Oxide Thin Films by Sol-Gel Process
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Synthesis and Characterization of TCO Cobalt-Nickel Spinel Films
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Effect of Vacuum Deposited Polymer Substrate Roughness on ITO Electrical and Optical Properties
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Properties of Sol-Gel Prepared (ZnO)y(CdO)1-y Thin Films, with Low Concentrations of Cd in Solution
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| VT-ThA |
A Practical Guide to the use of Bayard-Alpert Ionization Gauges
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The Ultimate Resolution of Commercial Spinning Rotor Gauges
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Extending the Upper Pressure Limits of Cold-Cathode Gauges
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An Absolute Vacuum Gage Based on the Q Value of the Vibration of a Silicon Micro Cantilever
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Performance of the Axial-symmetric Transmission Gauge Improved for the Measurement of Wide Pressure Range
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Study of Thermal Transpiration of Capacitance Diaphragm Gauge by DSMC Method
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Intelligent Flow Measurement and Control
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Summary of the Extreme High Vacuum and Surface Conditioning Workshop
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