AVS1999 Tuesday Afternoon

A Microscopic View of Energetic Desorption Events

Theory of Multi-Atom Resonant Photoemission

Oxide-free Phosphate Films on Metals probed by Core and Valence Band X-Ray Photoelectron Spectroscopic Studies in an Anaerobic Cell

Spatial Resolution in Scanning Auger Microanalysis of Complex Systems

Atomic Level Characterization of Metal-Ceramic Interface Energetics and Dynamics via Ab Initio Methods

Surface Science Studies of Model Ziegler-Natta Polymerization Catalysts

Dynamic Monte Carlo Simulations of Catalytic Surface Reactions: CO + NO on Rhodium

Surface Characterization of Biomaterials with Protein Layers

Surface-plasmon Field-enhanced Fluorescence Spectroscopy and -Microscopy for the Evaluation of the Hybridization Reaction of Oligonucleotides

Characterization of Supported Biomimetic Films Using Broadband Vibrationally Resonant Sum-Frequency Generation

Biosensors in Biomaterials Research

Direct Probing of the Surface Ultrastructure and Molecular Interactions of Living Microbial Cells with Atomic Force Microscopy

Contact Mechanical Properties of Confined NIPAM Films at the Biomaterial Interfaces

Novel Biomaterials through Tailoring of Solid Surfaces

Photoisomerization and Photo-induced Alignment of Ordered Polymer Ultrathin Films Containing DNA and Polypeptide Layers: Possibilities for Optobioelectronic Substrates

Challenges in Gate Dielectric Scaling

Investigation of Titanium Nitride Gates for Tantalum Pentoxide and Titanium Dioxide Dielectrics

Separate and Independent Reductions in Direct Tunneling in Oxide/Nitride Stacks with Monolayer Interface Nitridation Associated with the i) Interface Nitridation and ii) Increased Physical Thickness

High K Gate Dielectrics for Sub-100nm CMOS

Evidence of Aluminum Silicate Formation at the Al₂O₃/Si Interface for Thermal and Plasma Enhanced Chemical Vapor Deposited Al₂O₃ Thin Films

Thermally Grown Gate Insulators for Heterostructure p-MOSFETs

Deposition of ZrO₂/SiO₂ Alloys by 300° Remote Plasma Processing for Alternative High-K Gate Dielectrics in Aggressively Scaled CMOS Devices

Nanoprobing Electrical Transport in Organic Semiconductors

Photolithographically Defined Pentacene Thin Film Transistors on Flexible Plastic Substrates

Reduced Process Complexity Organic Thin Film Transistors

Soft Lithographic Patterning and Low Temperature Film Deposition: Methods to Fabricate Amorphous Silicon Thin Film Transistors at Low Temperature

Low Damage Etching Utilizing Activated Hydrogen Beam for ITO Transparent Electrode in Flat Panel Display

Excimer Laser Processing for a-Si and poly-Si Thin Film Transistors for Imager Applications

Solid-phase Crystallization of Hydrogenated Amorphous Silicon-Germanium Alloy Films

Electronic Structure of Single Crystal CrO₂

Underlying Simplicity of Magnetic Dichroism in the Photoelectron Spectroscopy of Gd

Element-Resolved Magnetism Using Core-Resonant Magneto-Optical Techniques

Interatomic Effects in Resonant Photoemission in Fe/Cr Alloys and Bilayers

Dispersions of Metallic Quantum Well States in the Cu/fccM(100) [M = Ni, Co, Fe] Systems

Photoemission Study of Pseudomorphic Fe_xNi_1-x and Co_xNi_1-x Films on Cu(100)

Magnetic Properties of Fe-based Alloys

CD Control Optimization Methodology on Shallow Trench Isolation Substrate for Sub-0.25µm Technology Gate Patterning

Patterning of Xerogel in High Density Fluorocarbon Plasmas

Surface Science of Tungsten CMP Removal

Yield Improvement Through Multizone Uniformity Control of a CMP Process Utilizing a Pre and Post-Measurement Strategy

Modeling, A Tool for Technology Development

Simulations of TiN Barrier Films Deposited by I-PVD on High Aspect Ratio Features: Macrostructure and Composition

Investigation of Si and SiO₂ Etch Mechanisms Using an Integrated Surface Kinetics Model¹

Design of a Dual Frequency PECVD Reactor for Advanced Integrated Circuits Processing

Size, Shape, Strain, and Composition Inhomogeneities of In_0.5Ga_0.5As QDs Grown by Migration Enhanced Epitaxy

Cross-Sectional Scanning Tunneling Microscopy as a Probe of Atomic-Scale Order in MOVPE Grown GaInP¹

Interpreting Atomic-Scale Structure in Cross-Sectional STM Images of III-V Superlattices

The Importance of Many-body Effects in the Clustering of Charged Zn Dopant Atoms in GaAs

New Methods to Measure Electrical, Optical, and Magnetic Properties on the Nanometer Scale

Field Dependent Electric Potential Gradients at Atomically Abrupt Oxide Interfaces

Dynamics of Adsorbate Islands with Nanoscale Spacial Resolution: (OH)_n Formation during the NO/H₂ Reaction on Pt(001)

Measuring Average Tip-sample Forces in Intermittent-contact (Tapping) Force Microscopy in Air

Imaging the Near-field Intensity Gradients with a Tapping-mode Near-field Scanning Optical Microscope

Tailoring of Properties of Organic Thin Films by Interface Control

Ordering in Two Dimensions - Phthalocyanines, Perylenes, and Related Molecular Thin Films

Influence of Steps on the Orientation of Monolayer Films of Copper Phthalocyanine (CuPc) on Au(111)

Growth Modes of N,N'-bis-(1-naphthyl)-N,N'-diphenyl1-1,1-biphenyl1-4,4'-Diamine on Standard and Ultra-flat Indium Tin Oxide

Self-Assembled Monolayers on Indium Tin Oxide

Mechanism of Formation of Self-Assembled n-Octadecylsilane Monolayers on Indium-Tin-Oxide

Growth and Characterization of Poly(arylamine) Thin Films Prepared by Vapor Deposition

HREELS Study of Ultra-thin Polyaniline Films Grown on Cu(110) by Vapor Deposition of Aniline Tetramers

Infrared and Microwave Absorption Diagnostics of Plasmas for Silicon Oxide Etching and Deposition

Thomson Scattering with Gated Intensified CCD Detectors for Diagnostic of rf Discharge Plasmas

Determination of Electron Temperatures and Species Concentrations During Aluminum Etching

Peter Mark Memorial Award Address

Cavity Ring Down Spectroscopy for the Detection of Hydrocarbon Radicals during a-C:H Deposition

Characterization of Transformer Coupled Oxygen Plasmas by Trace Rare Gas-Optical Emission Spectroscopy and Langmuir Probe Analysis

Diagnostics of Large-area Plasma Produced by Surface Waves on a Metal Wall with Periodicity

UV Absorption Spectroscopy of Pulsed Fluorocarbon Plasmas

Noncommutative Band Offset at α-Cr₂O₃/α-Fe₂O₃(0001) Heterojunctions

Ultrathin Iron Oxide Films

Islanding, Facetting, and the Lattice Relaxation in the Growth of α-Fe₂O₃ on α-Al₂O₃

Surface Reconstructions of Fe₃O₄(001)

The Surface Structure of α-Al₂O₃(0001) Studied by LEED

Formation of Epitaxial Al₂O₃ on Ni₃Al(111) Studied by STM, HREELS, UPS, ΔΦ, and LEED

Surface Structure Determination of Yttrium-Stabilized ZrO₂(001) Surface Using X-Ray Photoelectron Diffraction

Epitaxial Growth and Characterization of Zirconium-Doped CeO₂(111) Thin Films on Yttria-Stabilized Zirconia(111)

Structure and Dynamics of KTaO₃(001) via Elastic and Inelastic Helium Atom Scattering¹

Deposition of Highly Oriented Mg₃(VO₄)₂ Thin Films for Use in Catalysis Studies

Medard W. Welch Award Address: Halogen Etching of Si with Emphasis on Atomic-Scale Processes

Micrometer-scale "Grooves" and Step Bunching during Extended Oxidation-induced Etching of Si(001) Surfaces

The Structure of Steps on Hydrogen-Passivated Si Surfaces

Microscopy of Si(001) Surface Defects Produced by keV He Ion Irradiation at Low Temperatures

A Variable Temperature Scanning Tunnelling Microscopy Study of Si(100) Etching Dynamics

Dissociative Adsorption and Recombinative Desorption of H2 on Si(100)-2x1

Novel Mechanisms for Plasma Etch Front and CVD (Chemical Vapor Deposition) Growth Front Roughening

Resonance-Enhanced Multiphoton Ionization Studies of the Etching of Silicon by Molecular Chlorine

Femtosecond Photo-induced Dynamics on a Cleaned and a Chlorinated Si(111) Surfaces

Mechanisms and Energetics in Diffusion of O2-Molecules and H-atoms on Si(1x1)-7x7 Surfaces

Real-Time Imaging of Step Motion on Cu(100) with the Low Energy Electron Microscope¹

Diffusion and Dynamics of 2D Clusters on Crystal Surfaces

Sulfur's Effect on Cu(111) Surface Morphology

Influence of Adsorbates on the Self-diffusion of Pt Adatoms and the Stability of Pt Dimers

Study of Subsurface Hydrogen in Pd(111) by STM

Enhanced Interlayer Mass Transport and Dynamics of Film Smoothening on a Symmetry-broken Ag(111) Surface

Ion-Enhanced Surface Diffusion: Experiment and Simulation

The Effect of As₄ Flux on the Ga Diffusion on the GaAs(001)-(2x4) Surface

Preparation of Co and CoN_x Thin Films by Unbalanced r.f. Magnetron Sputtering

Microstructural Control of Thin Silicon Films Grown by Reactive Magnetron Sputtering Utilizing Low Energy Ion Bombardment

PVD of Thin Film Silicon: How Fast Light Atom and Slow Heavy Ion Bombardment During Growth Promote Low-Temperature Crystallinity

Deposition Behavior and Film Characteristics of Aluminum Oxide Deposited using High Frequency Pulsed-DC Magnetron Reactive Sputtering

AC Reactive Sputtering of Dielectric Films using a Dual Magnetron

Characterization Studies of Reactively Pulsed Magnetron Sputtered Alumina Films

Change in Surface Roughness with the Thickness of TiO₂ Film Grown on MgO(001) by Ar-ion Beam Sputtering

Chemical Vapor Deposition of Alpha Aluminum Oxide for High Temperature Aerospace Sensors

Phase Development of Radio Frequency Magnetron Sputter Deposited Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (90/10) Thin Films

Ultra Thin DLC Film as Magnetic Disks Overcoat

Tribological Properties of Protective Carbon Coatings Used in Magnetic Storage Devices Investigated on a Sub-Nanometer Scale

Ultrathin Overcoats For Magnetic Media: Is Hardness What We Are Looking For ?

Air Bearing Collision Dynamics

Interaction of Fluoroalcohols and Fluoroethers with Various Types of Carbon Overcoats

Angle Resolved ESCA Methods: Molecular Conformation of Fluorocarbon Lubricant

Airbearing Designs for High Density Recording

Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975)

Evolution of Integrated Circuit Vacuum Processes: 1962-1975

History of Plasma Ashing and Plasma Etching in the Semiconductor Industry from 1950 to 1975

History of Commercial Ion Implantation

Application of Sub-atmospheric Plasmas to Semiconductor Device Processing

Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes