AVS1999 Thursday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Thursday, October 28, 1999 | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| AS-ThM |
The Real World: Surface Analysis Applications and Innovations in Industry
|
Effect of Sputtering Gas on Cleaning Al-Based Intermetallics and the Determination of Surface Compositions based on Auger Analysis
|
Failure Mechanisms of Adhesively Bonded Hot Dipped Galvanised Steel Studied by Small Area XPS
|
Novel X-ray Sensor Suite for In Situ Optimization of Thin Film Architectures
|
A 300mm SAM, with EDX and FIB for Full Wafer Defect and Thin Film Characterization
|
A Study of the Surface Chemistry and Physical Properties Related to Adhesion of the Polyimide Passivation Layer by XPS, FTIR, and Contact Angle Measurements
|
Diffusion of Large Molecules on Metallic Surfaces using TOFSIMS
|
Identification of Surface Chemical Functional Groups in Reverse Osmosis Membranes: An X-ray Photoelectron Spectroscopy Study
|
|||
| BI-ThM |
Nucleation and Growth of Calcium Phosphate on Self-Assembled Monolayers
|
Surface Modification of a Model Biomaterial by UV-Laser and/or Electron Beam Irradiation1
|
Synthesis and Surface Characterization of Peptide-Modified Interpenetrating Polymer Networks that Control Biomineralization
|
Osteoblast Behavior on Surfaces with Varied RGD Peptide Surface Concentrations Prepared Using Gold-Thiol Self-Assembly
|
Molecular Recognition at the Protein-Biomineral Interface
|
Kinetics and Interfacial Energy Studies of Biomineralization
|
Incorporation of Dye Molecules into Calcium Oxalate Host Crystals
|
Molecular Orientation in Artificial Joint Polymers: Characterizing the Precursors of Wear with Soft X-ray Absorption
|
Peptide Functionalized Titanium Alloy Surfaces for Orthopedic and Dental Materials
|
||
| EM1-ThM |
Strength of Nanoscale Copper Under Shear
|
A Discussion of the Interconnection Science and Technologies
|
Electrochemical Deposition Cu Films for ULSI Applications
|
Complete Filling of High-Purity Copper in Subquarter-Micron Trench Structure Using Plasma CVD Reactor with H Atom Source
|
The Stability of Thin TiN and TaN Layers as Diffusion Barriers for Copper under Thermal Annealing and Bias Temperature Stress Conditions
|
Surface Modification and Cleaning Enhancement of TaSiN Films with Dilute Hydrofluoric Acid*
|
Fluroinated Amorphous Carbon - A Low Dielectric Constant Material for Multilevel Interconnect Applications
|
Multilayered Si-Based Organic Thin Films with Low-Dielectric-Constant Formed by Plasma-Enhanced Chemical Vapor Deposition from Hexamethyldisiloxane
|
Low-k Si-O-C-H Composite Films Prepared by Plasma Enhanced Chemical Vapor Deposition using BTMSM(bis-trimethylsilylmethane) Precursor
|
||
| EM2-ThM |
Dielectric Passivation/Oxides on Compound Semiconductors
|
Study of GaAs Oxidation in H2O2 and H2O using Spectroscopic Ellipsometry
|
The Effective Two-step Passivation of Metal/GaAs Interface with Sulfur and Hydrogen Plasma
|
Advanced Selective Dry Etching of GaAs/AlGaAs in High Density Inductively Coupled Plasmas
|
Characterization of Hydrogen Passivation in p-type InP (100)
|
Synchrotron Radiation-Induced Wet Processing of GaAs*
|
|||||
| MI+ |
1-D Propagation of a Magnetic Domain Wall in Submicron Magnetic Wire
|
Magnetism of Interconnected Co Nanodots Grown on the N-modified Cu(001) Surface
|
Periodic Magnetic Microstructures using Glancing Angle Deposition
|
Magnetic Quantum Cellular Automata
|
Growth, Magnetization, and Magnetoresistance of Self-Assembled Lateral Multilayers
|
Stripe Domains in Ultraflat Fe/Cu(001) Particles
|
Magnetic Properties of Iron Clusters Deposited on Graphite
|
Magnetic Properties of Co and Fe Particles on Sapphire Single Crystal Surfaces
|
Magnetic Behavior of Nanosize Cobalt Particles in (SiO2, MgO, CoO) Matrix
|
||
| MM+ |
Magnetic Micromachining Technology: From Materials to Components to Actuators
|
Fabrication and Characterization of Polycrystalline Silicon Thin Films with Hydrofluoric Acid Permeability for Sacrificial Etching of Underlying Oxide Layers
|
A New Chemistry for Rapid Etching of SiO2
|
Residual Stress Characterization of Thick PECVD Oxide Films for MEMS Applications
|
Process and Fabrication of a Thin Film PZT Pressure Sensor
|
Microfabricated Low-Power Broad-Band Light Source Utilizing Tungsten Filaments
|
|||||
| MS+ |
ESH as One of the Key Criteria for Semiconductor Process Development
|
The Environmental Impact of Perfluorinated Compounds used in the Semiconductor Industry
|
Optimization of Processing Plasmas in the Semiconductor Industry for Minimal Environmental Impact
|
PFC Abatement in Inductively Coupled Plasma Reactors using O2, H2 and H2O as Additive Gases1
|
Modeling of Nonisothermal, Coupled Neutral/Plasma Dynamics in PFC Abatement Plasmas
|
Remote Plasma Sources for Cleaning CVD Reactors: Development and Implementation of a Technology for Green Manufacturing of Integrated Circuits
|
Study of NF3-Based High Density Plasma Oxide Etch Processes for Reduced Global Warming Emissions
|
Environmentally Harmonized Silicon Oxide Selective Etching Process Employing Novel Radical Injection Technique
|
|||
| NT+ |
Carbon Nanotube Molecular Electronics
|
Electrical Transport in Single-Wall Nanotube Rings: Coherence and Localization
|
Analysis of Carbon Nanotube Field-Effect-Transistors (FETs)
|
Novel Length Scales in Nanotube Devices
|
Field Emission from Carbon Nanotubes and Its Application to Electron Sources in Display Elements
|
Emission Properties of Large-area, Fully-sealed Carbon Nanotube Field Emission Display
|
The Structure of Nanotubes Observed with Thermal Field Emission
|
Fabrication and Field Emission Properties of Adherent Carbon Nanotube Films
|
Characterization of Oriented Carbon Nanotube Cathodes for Field Emission Flat Panel Display and Light Source Applications
|
||
| PS-ThM |
Theoretical Analysis of the Interactions of Chemically Reactive Clusters from Silane Plasmas with Crystalline and Amorphous Silicon Surfaces
|
Hydrogen Atom Reactions in a-SiC:H Film Growth
|
An In Situ Study of Plasma Deposition of Hydrogenated Amorphous Silicon Using Multiple Total Internal Reflection Infrared Spectroscopy
|
Plasma and Surface Chemistry in a Remote Silane Plasma Studied By Various Diagnostics and Related to a-Si:H Film Quality
|
Competition Between Etching and Deposition in Methane/Hydrogen Plasma Interactions with the Si(100) Surface
|
A Multi-dimensional Model for an Inductively Coupled Ar/C4F8 Discharge
|
Inorganic Plasma Low-k Materials - Aurora 2.7 -
|
Plasma Modification of Polymeric Membranes
|
Polymer Surfaces Modified Using RF Plasma
|
||
| SS1+ |
Two-Dimensional Phase Transitions in Amphiphile Monolayers
|
Surface Phase Transitions of Asymmetric Dialkyl Disulfide Self-Assembled Monolayers
|
Structure, Bonding and Reactivity of Self-assembled Monolayers
|
Structure of Partially Fluorinated n-alkanethiols on Polycrystalline Gold and Silver Surfaces
|
Controlling the Placement of Molecules in the Self Assembly and Directed Assembly of Organic Monolayers
|
Protein Adsorption to Model Surfaces: Probe Adhesion Between Fibrinogen and Patterned SAMs
|
Modification of Self-Assembled Monolayers by X-ray, Electron and Thermal Treatments
|
Electron-induced Damage in Thio-functionalized Alkanethiol Monolayers
|
Sensitivity of Alkanethiol Self-assembled Monolayers toward Low-energy Electron Irradiation
|
||
| SS2+ |
Evolving Surface Morphology: An In Situ STM Study of 2-20 nm SiGe Quantum Wells Grown on 75 mm Si (100) Wafers
|
Hydrogen-Mediated Surface Morphological Evolution in Si0.7Ge0.3/Si(001) Layers Grown by Hydride Gas-source Molecular Beam Epitaxy
|
Interdiffusion During Growth of Ge on Si(100)
|
Confined Intermixing of Ge and Si
|
Surface Segregation and Surface Reactivity in Heteroepitaxial Vapor Phase Thin Film Growth: Si1-xGex on Si(111)
|
The Role of Arsenic Surfactant in the Growth of Germanium Thin Films on Si(100) Surfaces
|
The Dynamics of the Si(111) (7x7) to (1x1) Phase Transition Investigated by Low Energy Electron Microscopy
|
The Motion of Atomic Steps on Ultra-Flat Si(111)
|
Novel Growth Behavior of Ge on Pb Covered Si(111) Surface
|
The Growth of High Density, Small Ag Islands at the Si(111)7x7 Surfaces with Adatom Defects
|
|
| SS3+ |
Determination of Sticking Probability and Transition State Energy by Line-of-Sight Detection: Halocarbons on Cu(111)
|
Demonstration of Angle Resolved Auger-photoelectron Coincidence Spectroscopy from a Solid: First Results from the Cu(111) Surface
|
Multiple Atom Resonant Photoemission: A New Tool for Determining Near-Neighbor Atomic Identities and Bonding
|
Incident Beam Diffraction in Electron Stimulated Desorption
|
Direct Atomistic Observation of Structural Dynamics in Surfaces and Interfaces by Time-Resolved High-Resolution Transmission Electron Microscopy
|
Ionization Mechanisms of Water in High Interfacial Electric Fields
|
Free Electron Laser Nanospectroscopy Interface Applications
|
Imaging and Charge Transport Measurements using Dual-Probe Scanning Tunneling Microscopy
|
The Miniature Cylindrical Mirror Analyzer: A New Tool For Surface Analysis
|
Investigations of Surface Reactions on Thin Film-Supported Catalysts Using Microhotplate Arrays
|
|
| TF-ThM |
Thin Films from Slow and Energetic Cluster Impact
|
Spark-Processing - A Novel Technique to Prepare Light-Emitting, Nanocrystalline Silicon Films
|
Interesting Properties of Nanophase Films Deposited from a High-rate, Nanoparticle Beam
|
Simulation of Fundamental Physical Phenomena in the Deposition of Nanophase Thin Films using a Sputtering Based Source
|
Deposited Porous Silicon on Insulator Substrates
|
Optical Properties of Chiral Thin Film Nanostructures and Composites
|
Solid State Electrochromic Devices for Thermal Emittance Control
|
Correlation Between Phase Constituency and Near Ultraviolet Optical Absorption in Nanophase Titania Films
|
|||
| VT-ThM |
A Comparison of Outgassing Rates from Stainless and Carbon Steels
|
Experiments with Thin-Walled Stainless Steel Vacuum Chamber
|
Review of Models for the Outgassing of Water Vapor from Metallic Surfaces
|
Measuring and Locating Internal Helium Leaks in the RHIC Insulating Vacuum System
|
Contraflow Leak Detectors with Improved Sensitivity Under High Helium Background Conditions*
|
LIGO Beam Tube Component and Module Leak Testing
|
Low-flow Measurements Techniques for Calibrating Mass Flow Controllers
|
Dimensionless Parameters for Laminar Flowmeters
|
Decay Rate of Photoresist Outgassing from Ion Implantation
|
||