AVS1999 Monday Afternoon

Interpretation of Static SIMS Spectra

Characterization of Polymer Additives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Secondary Ion Emission from LB-Layers Under Molecular Primary Ion Bombardment

Enriched Spectral-information from TOF-SIMS Spectra of Self Assembled Monolayers: More Than Just Molecular Ions

Static SIMS with Polyatomic Primary Ions

Quantitative ToF-SIMS and XPS Studies of Surface Structures in Alkyl Side-Chain Polyetherurethanes

Molecular Secondary Neutral Emission from Molecular Overlayers under SF₅⁺-Bombardment

Determination by XPS of the Reactions Taking Place at the Semiconductor/'Heteropolyanion Solution' Interface

Sputter Deposition and Annealing of Ta, TaSi and Ta₄B Composite Films and Their Application in Next Generation Lithography Masks

XPS Sputter Depth Profiling at the Pd/Y Interface^*

Thin Film Characterization through combined X-ray Photoelectron Spectroscopy (XPS) and X-ray Diffraction (XRD)

Photoelectron Spectroscopic Investigation of Interfaces and Thin Layers for Microelectronics: Composition and Chemistry as a Function of Depth

Analytical Conditions for Semi-Quantitative Auger Analysis of TaN

Investigation of InP(110) Surface Damage Induced by Low Energy Ar and He Ion Bombardment

Phase Transformation of Cubic Boron Nitride Induced by Ion Bombardment

Guided Ion-beam Studies of Low Energy Cu⁺ and Cu₂⁺ Ion Interactions with Ni(100)

Formation of 2D Crystals of Proteins on Solid-Supported Lipid Bilayers Followed by AFM

Light Activated Affinity Micropatterning of Proteins

Oriented Protein Binding via Silane-SAMs Using His-tagged Proteins

Complement Activation by IgM Immobilized on Methylated Silicon

Theoretical and Experimental Studies of the Interaction of Water with Oligo (ethylene glycol) Terminated Self Assembled Monolayers

Protein Resistant Surfaces Based on Reactions of Thiol-Terminated Polyethylene Oxides with Gold

Protein Adsorption on Mixed Polyethylene Glycol/Methyl Terminated Alkane Thiol Self-Assembled Monolayers

Properties of Oligo(ethylene glycol)- Terminated Alkanethiolates on Gold: Influence of Lateral Hydrogen Bonding

1-Thiaoligo(Ethylene Oxide) SAMs: Biomimetic Matrix Structure Tuned via Hydrophilic Spacer Length & Packing Density

Reduction of Protein Adsorption on Polyethylene Glycol Covered Silica Surfaces

GaN-Based Diode Structures for Optoelectronic Applications in the Near Ultraviolet Range of the Spectrum

High Breakdown Voltage Au/Pt/GaN Schottky Diode

Negative Electron Affinity and Electron Emission at Cesiated GaN and AlN Surfaces

Inductively Coupled Plasma-Induced Etch Damage of GaN p-n Junctions

Schottky Diode Measurements of Dry Etch Damage in n- and p-type GaN

Process Development for Dry-etched Laser Facets on GaN

Photo-Assisted RIE of III-V Nitrides in BCl₃/Cl₂/Ar/N₂

Effect of N₂ Discharge Treatment on AlGaN/GaN HEMT Ohmic Contact Using Inductively Coupled Plasma

In-Situ Plasmas Diagnostics for the Etchings of AlGaN/GaN Heterostructures

Critical Issues Related to Processing and Properties of Laser Deposited Luminescent Oxide Thin Films

The Effect of Carbon Deposit on Electron Beam Degradation of Oxide Thin Film Phosphors

Blue Luminescence Properties of Zinc Oxide Doped with Low Concentration of Tungsten

Progress in TFEL Technology

Multicolor Emitting TFEL Devices using Ga₂O₃ Phosphors Co-doped with Mn and Cr

Effect of Ce₂O₃ and Ag/Cu Codoping on the Brightness and Efficiency of RF Magnetron Sputtered ZnS:TbOF Alternating Current Thin Film Electroluminescent Displays

A Comparison of the Short Wavelength Performance of ZnS and SrS Thin-Film Electroluminescent Devices via a Rare Earth Doping Study

Role of Cations and Anions in Donor Doping of ZnS:Mn Thin Film Electroluminescent Phosphors

Spectro-Microscopy of Magnetic Materials Using Polarized Soft X-Rays

Micromagnetic Properties and Recording Performance in High Density Magnetic Recording Media

Sub 50 nm Planar Magnetic Nanostructures Fabricated by Ion Irradiation

Crystallographic Texture and Stress in Co-Based Magnetic Recording Media and Underlayers

Noise in GMR Recording Heads

Highly Reliable Ultra Thin Gate Oxide Grown using Water Vapor Generator

High-integrity Ultra-thin Silicon Nitride Film Grown by Plasma Nitridation of Silicon Surface at Low-temperature for Giga Scale Devices

Generation of Positively Charged Particles at an Anode and Transport to Device-wafers in a Real rf-plasma Etching Chamber for Tungsten Etch-back Process

Standardization of the Method to a Moisture Concentration in Hydrogen Chloride Gas with Diode Laser Absorption Spectrometry

Gas Distribution System Using an Advanced Flow Controller

Investigating Molecular Contamination in Cleanrooms

Minimizing Particle Generating Contamination in Polysilicon LPCVD

Highly Concentrated Ozone Gas Supplied at Atmospheric Pressure Condition as a New Oxidizing Reagent for the Formation of SiO₂ Thin Film on Si

A Comparison of VPD, TXRF, and Surface SIMS to Detect Fe, Ni, Cu, and Al on Silicon Wafers

Tribological Properties of Self-Assembled Monolayers on Si Surfaces

Contact Hysteresis, Friction and Conductance of Self-Assembled Monolayers on Au

Energy Dissipation in Defective Alkanethiol Monolayers

Interaction Forces Measured with Functionalized Cantilevers and SFM Modulation Techniques

SPM Tip-Sample Interactions in Primary Alcohols of Varying Chain Length

Sliding Friction of Xenon Monolayers and Bilayers on Pb and Cu Substrates

Tribological Proprties of Single Crystalline Metal Surface

Combined Quartz Crystal Microbalance and Scanning Probe Microscope Studies of Vapor-Deposited Films on Metal Surfaces

Sliding Transitions and Dissipation in Nanoscale Contacts

High Resolution Optical Spectroscopy and Control of Single GaAs Quantum Dots

Quantum Dots; The Small World of Artificial Atoms

Low-Temperature Tunneling Spectroscopy of the Tip-induced Quantum Dot on n-InAs(110)

Coherently Strained Sn Quantum Dot Formation in Si via Phase Separation

Hybrid Electrochemical/Chemical Routes to Epitaxial, Luminescent, and Size Monodisperse Semiconductor Nanocrystals on Surfaces.

High-Bias Conductance of Au Nanowires at 4 K

Quantized Conductance of Metal Nanowires: Is It Useful as a New Device?

Generation and Transport of Charge Carriers in Conjugated Polymers

Resistance of Individual Molecular Semiconductor Grains Measured by Conducting Probe Atomic Force Microscopy

Self-Assembled, Template-Based Nanolithography

Fabrication of Organic Microstructures Using Soft Lithography

Electron Beam Patterning of Amine-Functionalized Self-Assembled Monolayers

Liquid Crystal Imprinting: A New Method for Preparing Uniformly Oriented Thin Films

Electro-Patterning of Conjugated Polymer Films on Conducting Surfaces Using the Precursor Polymer Approach

Diagnostics for Insight into Fluorocarbon Plasma Chemstry

Comparison of Actinometric and Diode-laser Absorption Measurements of [CF] and [CF₂] in an Inductively Coupled Plasma Reactor

Ion Energy Distribution Functions (IEDFs) in NF₃ based Discharges with Various Diluents

Optical Emission Thermometry Applied to the Measurement of Neutral Gas Temperature within a High-density, Inductively-coupled Plasma Abatement Device

Using Optical Emission Spectroscopy (OES) to Monitor Different Parameters for a Contact Hole Etch Process between Wet Clean

Radical Detection using Appearance Potential Mass Spectrometry

C₄F₈ Dissociation Rate Control for Oxide Etch Process Plasma by Changing EEDF

Plasma and Surface Diagnostics in Cl₂/O₂ Discharges in Transformer Coupled Plasma Reactors

Oxide Etch Studies in an Inductively Coupled GEC Reference Cell C₂F₆ Discharge using Diode Laser Spectroscopy

Nucleation and Growth of Copper Islands on TiO₂(110): Evidence for Self-limited Island Sizes

Influence of Surface Reactions on Morphology: Ag Nanoclusters on TiO₂(110)

Kinetics and Dynamics of Substrate and Metal Atoms on TiO₂

Nucleation and Growth of Pt Nanoclusters on TiO₂ Rutile and Anstase Surfaces

Role of Surface Vacancies and Water Products in Metal Nucleation: Pt/MgO(100)

Metal Particles on Single Crystal Oxides as Model Catalysts

High-Pressure STM Studies of Pt Nano-clusters on Al₂O₃/NiAl(110)

Cu Interaction with Al₂O₃ Substrates: Effects of Defects and Coverage

Nucleation and Growth of Tungsten on SiO₂ During Atomic Layer Deposition Using Sequential Surface Reactions

Surface Chemistry on Stepped Pt Surfaces - What Happens at the Steps?

Investigations of the Role of Edges on the Reaction Kinetics on Nanometer-sized Catalyst Particles using Monte Carlo Simulations

Dissociation and Desorption of NO and N₂ on Rh(100) and Rh(111), Effect of Surface Structure on Elementary Reaction Steps

Interactions between CO and NO on Rh Loaded Ceria Films

Non-linear Behaviour in the NO-H₂ Reaction over Pt Group Metals: A Comparison

Chemical Diffusion, Percolation, and Order-Disorder Transitions in a Model for CO-Oxidation with c(2x2)-O Ordering

CO-oxidation Reaction as a Probe of Oxygen States at Oxygen-rich Ru(0001)

Metastable States of Nitrogen Atoms Adsorbed on Ru(0001)

Atomic Scale Chemistry: Desorption of Ammonia from Cu(111) Induced by Tunneling Electrons

Plasma Interaction Effects in Ion-Beam Assisted Pulsed Laser Deposition of Al-O-N Films

Time-of-Flight Measurements of Sputtered Species using Novel Pulsed High Plasma Density Magnetron Discharge

Modeling of I-PVD Systems for TiN Film Deposition in Inductively Coupled Plasmas

Origin and Evolution of Sculptured Thin Films

Ionized Physical Vapor Deposition (PVD) using Hollow-Cathode Magnetron (HCM) Source for Advanced Metallization

Gas Phase Dynamics of Copper Ionized Metal Plasmas

Effects of Copper Seedlayer Deposition Method for Electroplating

Steel Coating by Self-induced Ion Plating, a New High Throughput Metallization Ion Plating Technique

Analysis of Mode Transistions in I-PVD and Conventional PVD Reactive Sputtering of Refractive Diffusion Barrier Materials

Characterization of PVD TiN/CN_x and TiN/Si₃N₄ Multilayer Coatings

Effects of Interface Mixing on Adhesion of Amorphous Carbon Films Synthesized by Variable-Energy Direct Carbon Ion Beam Deposition

Synthesis of Diamondlike Carbon Films with Superlow Friction and Wear Properties

Optical Characteristics of Carbon Nitride: Relationship with Mechanical Behavior and Possible Fullerene-like Microstructure

Preparation and Properties Enhancement of Silicon Carbonitride Films Using Reactive Magnetron Sputtering

Bonding Structure and Optical Properties of Si-doped Diamond-like Films Synthesized by Plasma Immersion Ion Processing

Surface Acoustic Wave Propagation Properties of Nitrogenated Diamond-like Carbon Films

High Deposition Rate Diamondlike Carbon Films Deposited using Permanenet Magnet Electron Cyclotron Resonance Plasmas

Polymerization in Remote Hydrocarbon Deposition Plasmas