AVS1999 Monday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, October 25, 1999
2:00 PM 3:00 PM 4:00 PM 5:00 PM
AS1-MoA
Interpretation of Static SIMS Spectra
Characterization of Polymer Additives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
Secondary Ion Emission from LB-Layers Under Molecular Primary Ion Bombardment
Enriched Spectral-information from TOF-SIMS Spectra of Self Assembled Monolayers: More Than Just Molecular Ions
Static SIMS with Polyatomic Primary Ions
Quantitative ToF-SIMS and XPS Studies of Surface Structures in Alkyl Side-Chain Polyetherurethanes
Molecular Secondary Neutral Emission from Molecular Overlayers under SF5+-Bombardment
AS2-MoA
Determination by XPS of the Reactions Taking Place at the Semiconductor/'Heteropolyanion Solution' Interface
Sputter Deposition and Annealing of Ta, TaSi and Ta4B Composite Films and Their Application in Next Generation Lithography Masks
XPS Sputter Depth Profiling at the Pd/Y Interface*
Thin Film Characterization through combined X-ray Photoelectron Spectroscopy (XPS) and X-ray Diffraction (XRD)
Photoelectron Spectroscopic Investigation of Interfaces and Thin Layers for Microelectronics: Composition and Chemistry as a Function of Depth
Analytical Conditions for Semi-Quantitative Auger Analysis of TaN
Investigation of InP(110) Surface Damage Induced by Low Energy Ar and He Ion Bombardment
Phase Transformation of Cubic Boron Nitride Induced by Ion Bombardment
Guided Ion-beam Studies of Low Energy Cu+ and Cu2+ Ion Interactions with Ni(100)
BI-MoA
Formation of 2D Crystals of Proteins on Solid-Supported Lipid Bilayers Followed by AFM
Light Activated Affinity Micropatterning of Proteins
Oriented Protein Binding via Silane-SAMs Using His-tagged Proteins
Complement Activation by IgM Immobilized on Methylated Silicon
Theoretical and Experimental Studies of the Interaction of Water with Oligo (ethylene glycol) Terminated Self Assembled Monolayers
Protein Resistant Surfaces Based on Reactions of Thiol-Terminated Polyethylene Oxides with Gold
Protein Adsorption on Mixed Polyethylene Glycol/Methyl Terminated Alkane Thiol Self-Assembled Monolayers
Properties of Oligo(ethylene glycol)- Terminated Alkanethiolates on Gold: Influence of Lateral Hydrogen Bonding
1-Thiaoligo(Ethylene Oxide) SAMs: Biomimetic Matrix Structure Tuned via Hydrophilic Spacer Length & Packing Density
Reduction of Protein Adsorption on Polyethylene Glycol Covered Silica Surfaces
EM-MoA
GaN-Based Diode Structures for Optoelectronic Applications in the Near Ultraviolet Range of the Spectrum
High Breakdown Voltage Au/Pt/GaN Schottky Diode
Negative Electron Affinity and Electron Emission at Cesiated GaN and AlN Surfaces
Inductively Coupled Plasma-Induced Etch Damage of GaN p-n Junctions
Schottky Diode Measurements of Dry Etch Damage in n- and p-type GaN
Process Development for Dry-etched Laser Facets on GaN
Photo-Assisted RIE of III-V Nitrides in BCl3/Cl2/Ar/N2
Effect of N2 Discharge Treatment on AlGaN/GaN HEMT Ohmic Contact Using Inductively Coupled Plasma
In-Situ Plasmas Diagnostics for the Etchings of AlGaN/GaN Heterostructures
FP-MoA
Critical Issues Related to Processing and Properties of Laser Deposited Luminescent Oxide Thin Films
The Effect of Carbon Deposit on Electron Beam Degradation of Oxide Thin Film Phosphors
Blue Luminescence Properties of Zinc Oxide Doped with Low Concentration of Tungsten
Progress in TFEL Technology
Multicolor Emitting TFEL Devices using Ga2O3 Phosphors Co-doped with Mn and Cr
Effect of Ce2O3 and Ag/Cu Codoping on the Brightness and Efficiency of RF Magnetron Sputtered ZnS:TbOF Alternating Current Thin Film Electroluminescent Displays
A Comparison of the Short Wavelength Performance of ZnS and SrS Thin-Film Electroluminescent Devices via a Rare Earth Doping Study
Role of Cations and Anions in Donor Doping of ZnS:Mn Thin Film Electroluminescent Phosphors
MI+
Spectro-Microscopy of Magnetic Materials Using Polarized Soft X-Rays
Micromagnetic Properties and Recording Performance in High Density Magnetic Recording Media
Sub 50 nm Planar Magnetic Nanostructures Fabricated by Ion Irradiation
Crystallographic Texture and Stress in Co-Based Magnetic Recording Media and Underlayers
Noise in GMR Recording Heads
MS-MoA
Highly Reliable Ultra Thin Gate Oxide Grown using Water Vapor Generator
High-integrity Ultra-thin Silicon Nitride Film Grown by Plasma Nitridation of Silicon Surface at Low-temperature for Giga Scale Devices
Generation of Positively Charged Particles at an Anode and Transport to Device-wafers in a Real rf-plasma Etching Chamber for Tungsten Etch-back Process
Standardization of the Method to a Moisture Concentration in Hydrogen Chloride Gas with Diode Laser Absorption Spectrometry
Gas Distribution System Using an Advanced Flow Controller
Investigating Molecular Contamination in Cleanrooms
Minimizing Particle Generating Contamination in Polysilicon LPCVD
Highly Concentrated Ozone Gas Supplied at Atmospheric Pressure Condition as a New Oxidizing Reagent for the Formation of SiO2 Thin Film on Si
A Comparison of VPD, TXRF, and Surface SIMS to Detect Fe, Ni, Cu, and Al on Silicon Wafers
NS1-MoA
Tribological Properties of Self-Assembled Monolayers on Si Surfaces
Contact Hysteresis, Friction and Conductance of Self-Assembled Monolayers on Au
Energy Dissipation in Defective Alkanethiol Monolayers
Interaction Forces Measured with Functionalized Cantilevers and SFM Modulation Techniques
SPM Tip-Sample Interactions in Primary Alcohols of Varying Chain Length
Sliding Friction of Xenon Monolayers and Bilayers on Pb and Cu Substrates
Tribological Proprties of Single Crystalline Metal Surface
Combined Quartz Crystal Microbalance and Scanning Probe Microscope Studies of Vapor-Deposited Films on Metal Surfaces
Sliding Transitions and Dissipation in Nanoscale Contacts
NS2-MoA
High Resolution Optical Spectroscopy and Control of Single GaAs Quantum Dots
Quantum Dots; The Small World of Artificial Atoms
Low-Temperature Tunneling Spectroscopy of the Tip-induced Quantum Dot on n-InAs(110)
Coherently Strained Sn Quantum Dot Formation in Si via Phase Separation
Hybrid Electrochemical/Chemical Routes to Epitaxial, Luminescent, and Size Monodisperse Semiconductor Nanocrystals on Surfaces.
High-Bias Conductance of Au Nanowires at 4 K
Quantized Conductance of Metal Nanowires: Is It Useful as a New Device?
OE+
Generation and Transport of Charge Carriers in Conjugated Polymers
Resistance of Individual Molecular Semiconductor Grains Measured by Conducting Probe Atomic Force Microscopy
Self-Assembled, Template-Based Nanolithography
Fabrication of Organic Microstructures Using Soft Lithography
Electron Beam Patterning of Amine-Functionalized Self-Assembled Monolayers
Liquid Crystal Imprinting: A New Method for Preparing Uniformly Oriented Thin Films
Electro-Patterning of Conjugated Polymer Films on Conducting Surfaces Using the Precursor Polymer Approach
PS-MoA
Diagnostics for Insight into Fluorocarbon Plasma Chemstry
Comparison of Actinometric and Diode-laser Absorption Measurements of [CF] and [CF2] in an Inductively Coupled Plasma Reactor
Ion Energy Distribution Functions (IEDFs) in NF3 based Discharges with Various Diluents
Optical Emission Thermometry Applied to the Measurement of Neutral Gas Temperature within a High-density, Inductively-coupled Plasma Abatement Device
Using Optical Emission Spectroscopy (OES) to Monitor Different Parameters for a Contact Hole Etch Process between Wet Clean
Radical Detection using Appearance Potential Mass Spectrometry
C4F8 Dissociation Rate Control for Oxide Etch Process Plasma by Changing EEDF
Plasma and Surface Diagnostics in Cl2/O2 Discharges in Transformer Coupled Plasma Reactors
Oxide Etch Studies in an Inductively Coupled GEC Reference Cell C2F6 Discharge using Diode Laser Spectroscopy
SS1+
Nucleation and Growth of Copper Islands on TiO2(110): Evidence for Self-limited Island Sizes
Influence of Surface Reactions on Morphology: Ag Nanoclusters on TiO2(110)
Kinetics and Dynamics of Substrate and Metal Atoms on TiO2
Nucleation and Growth of Pt Nanoclusters on TiO2 Rutile and Anstase Surfaces
Role of Surface Vacancies and Water Products in Metal Nucleation: Pt/MgO(100)
Metal Particles on Single Crystal Oxides as Model Catalysts
High-Pressure STM Studies of Pt Nano-clusters on Al2O3/NiAl(110)
Cu Interaction with Al2O3 Substrates: Effects of Defects and Coverage
Nucleation and Growth of Tungsten on SiO2 During Atomic Layer Deposition Using Sequential Surface Reactions
SS2-MoA
Surface Chemistry on Stepped Pt Surfaces - What Happens at the Steps?
Investigations of the Role of Edges on the Reaction Kinetics on Nanometer-sized Catalyst Particles using Monte Carlo Simulations
Dissociation and Desorption of NO and N2 on Rh(100) and Rh(111), Effect of Surface Structure on Elementary Reaction Steps
Interactions between CO and NO on Rh Loaded Ceria Films
Non-linear Behaviour in the NO-H2 Reaction over Pt Group Metals: A Comparison
Chemical Diffusion, Percolation, and Order-Disorder Transitions in a Model for CO-Oxidation with c(2x2)-O Ordering
CO-oxidation Reaction as a Probe of Oxygen States at Oxygen-rich Ru(0001)
Metastable States of Nitrogen Atoms Adsorbed on Ru(0001)
Atomic Scale Chemistry: Desorption of Ammonia from Cu(111) Induced by Tunneling Electrons
TF-MoA
Plasma Interaction Effects in Ion-Beam Assisted Pulsed Laser Deposition of Al-O-N Films
Time-of-Flight Measurements of Sputtered Species using Novel Pulsed High Plasma Density Magnetron Discharge
Modeling of I-PVD Systems for TiN Film Deposition in Inductively Coupled Plasmas
Origin and Evolution of Sculptured Thin Films
Ionized Physical Vapor Deposition (PVD) using Hollow-Cathode Magnetron (HCM) Source for Advanced Metallization
Gas Phase Dynamics of Copper Ionized Metal Plasmas
Effects of Copper Seedlayer Deposition Method for Electroplating
Steel Coating by Self-induced Ion Plating, a New High Throughput Metallization Ion Plating Technique
Analysis of Mode Transistions in I-PVD and Conventional PVD Reactive Sputtering of Refractive Diffusion Barrier Materials
TF+
Characterization of PVD TiN/CNx and TiN/Si3N4 Multilayer Coatings
Effects of Interface Mixing on Adhesion of Amorphous Carbon Films Synthesized by Variable-Energy Direct Carbon Ion Beam Deposition
Synthesis of Diamondlike Carbon Films with Superlow Friction and Wear Properties
Optical Characteristics of Carbon Nitride: Relationship with Mechanical Behavior and Possible Fullerene-like Microstructure
Preparation and Properties Enhancement of Silicon Carbonitride Films Using Reactive Magnetron Sputtering
Bonding Structure and Optical Properties of Si-doped Diamond-like Films Synthesized by Plasma Immersion Ion Processing
Surface Acoustic Wave Propagation Properties of Nitrogenated Diamond-like Carbon Films
High Deposition Rate Diamondlike Carbon Films Deposited using Permanenet Magnet Electron Cyclotron Resonance Plasmas
Polymerization in Remote Hydrocarbon Deposition Plasmas
Sessions | Time Periods | Topics | Schedule Overview