AVS1997 Friday Morning

Tribology and Lubricant Issues in Thin-Film Hard Disk System

Flow of Thin Viscous Polymer Films on Rotating Disks: Importance to Disk Drive Lubrication

Molecular Deformation of Ultrathin Perfluoropolyether Lubricant Films Adsorbed on Amorphous Carbon Substrates

Lubricant Degradation Mechanisms in Disk Drives

Carbon Overcoat Composition and Structure using Secondary Ion Mass Spectrometry (SIMS)

Calibrating Perfluoropolyether Lubricant Thickness Measurements

Evaluation of the Lubricant Thickness Measurement by XPS/ESCA on Current Hard Disk Surfaces.

Evidence for Galvanic Corrosion of Aluminum, Iron, and Nickel by a Polyperfluoroether Lubricant

Process Modeling Fundamentals for Microelectronics Manufacturing

Modeling of Ultathin Oxynitride Gate Dielectrics Formed by Remote Plasma Nitridation of Silicon Dioxide

Combined Beam Profile Reflectometry, Beam Profile Ellipsometry, and Ultraviolet-Visible Spectrometry Characterization of Ultrathin Oxide-Nitride-Oxide Films on Silicon

Interface Studies of Titanium Nitride and Tungsten Nitride Composite Metal Gate Electrodes with Thin Dielectric Layers

High Resolution 2D Imaging of Dopant Profiles using Small Area Contact C-V Measurement

Time and Length Scales in Plasma Etching

Equipment Simulation of a Deep Silicon Trench Etch Reactor

Analytic Simulation of Silicon Etch Profiles from a HDP Plasma

Si Self-Interstitial Effective Diffusivity in the Presence of Carbon

Trends in Real-Time Process Control

The Software Controls Challenge: Delivering Solutions to OEMs and End-Users

Sensor-based RF Power Monitoring and Control in an Inductively Coupled Plasma Etcher

Feedback Control of Inductively Coupled Plasma Reactors¹

Automatic Matching Algorithms with Improved Convergence for Inductively Coupled Plasma Sources

Run-to-Run Process Control and Endoint Detection on a Dual-Coil TCP with FWI and OES

Non-Periodic Lot Processing, Random Measurement Delays, and Intermittent Lot Processing with an Extended Predictor Corrector Controller

Challenges from the NTRS for Interconnects

Low k Dielectrics Etching : Application to via Level for Sub-quarter Micron Technology

Effect of Precursors on the Properties of Pulsed Plasma Enhanced Chemical Vapor Deposited Fluorocarbon Thin Films

Structure and Chemical Composition of Fluorinated SiO₂ Films Deposited Using SiF₄/O₂ and SiF₄/SiH₄/O₂ Plasmas

Nuclear Magnetic Resonance (NMR) Spectroscopy of Low-k Fluorocarbon Films from Pulsed Plasma Enhanced Chemical Vapor Deposition

Stability of Si-O-F Low-K Dielectrics: Ab Initio Calculations of Reactions between Water Molecules and Si-F Bonding Groups

Pulsed Plasma Deposition of SiO_x Barrier Coatings from HMDSO/O₂ Mixtures.

Investigation of the Chemistry, Morphology and Growth Mechanisms of SiO₂ Films Deposited on Silanized PET and Polycarbonate Substrates by PECVD

Transparent Barrier Coatings on PET by Dual-Frequency PECVD.

In-Situ Probing of Metal-Liquid-Gas Catalytic Interfaces Using Surface-Enhanced Raman Spectroscopy

Creating Ordered Chiral Templates to Stereodirect Reactions at Metal Surfaces

Vibrational Study of CH₂ and CH₃ Radicals on the Cu(111) Surface by HREELS

Hydrogen Induced C-N Bond Activation in C6 Amines on Ni and Pt Surfaces

A Comparison of H Atom Induced C-C Bond Activation on the Nickel and Platinum(111) Surfaces

Acetylene Cyclization to Benzene on Pd/W(211)*

Reaction Mechanisms and Kinetics in Hydrotreating Models on Palladium: A Study of Furan, Thiophene, and Pyrrole on Pd(111) using LITD/FTMS and STM

An STM Investigation of the Adsorption and Chemistry of Cyclic Aromatic Hydrocarbons on Pd(111)

A Scanning Tunneling Microscopy Study of Benzene Adsorption on Si(100)-(2x1)

Benzene/Si(100): Metastable Chemisorption and Binding State Conversion

Vibrational Spectroscopic Studies of Diels-Alder Reactions with a Si(100)-2x1 Surface as a Dienophile.

Structure and Properties of Thin ZnO Films

Efficient Investigations of Processing/Property/Performance Relationships for Metal/Oxide Sensing Films Using Micromachined Platforms

Microstructure-Dependent Ferroelectric Properties in SrBi₂Ta₂O₉ Thin Films Fabricated by the Radio Frequency Magnetron Sputtering Techniques

Preparation and Properties of Ferroelectric SrBi₂Ta₂O₉ Thin Films On SrTiO₃ and MgO Substrates By Radio Frequency Magnetron Sputtering

Compositional Effect on Sputtered Multicomponent Oxide Thin Films.

XPS Study of TiN Films Produced with TDMAT and Selected N-Containing Precursors on SiO₂

Preparation of High Quality RuO₂ Electrodes for High Dielectric Thin Films by Low Pressure Metal Organic Chemical Vapor Deposition

Magnetoresistance Effect in as-grown La-Ca-Mn-O Films Prepared by MBE Co-evaporation Technique

Abstract Epitaxial Growth and Surface Morphology of Ferroelectric BaTiO₃ Thin Films.

Characterization and Thickness Effects on Sputtered Ba_{0.5√sub 0.5}TiO₃ Thin Films