ALD2023 Tuesday Afternoon

Surface Texture Design of Pt/C Catalyst to Enhance Oxygen Reduction Reaction by FBR-ALD

Stabilization of ALD-grown Iridium Species for the OER Activity

Atomic Layer Deposited Nickel Sulfide as a (Pre)Catalyst for Oxygen Evolution Reaction

Novel Phosphite Doping into ALD SiO₂ to Improve H⁺ and H₂ Permeability in Water Electrolyzers

Atomic Layer Deposition of Copper Catalysts for Electrochemical Recycling of Carbon Dioxide

Stability of Molecular Layer Deposited (MLD) Alucone in Acetonitrile for Photoelectrochemical CO₂ Reduction Applications

Enhanced Green Hydrogen Production Using ALD-based Catalysts for Ammonia Decomposition

Atomic Layer Depositied Silver Catalysts for Anion Exchange Membrane Fuel Cells

Unfolding the Challenges to Prepare Epitaxial Complex Oxide Membranes by Chemical Methods

Tailoring Lattice Match by Cation Substitution in a Functional Ternary Oxide

In situ Atomic Layer Doping of Epitaxially Grown β-Ga₂O₃ Films via Plasma-enhanced ALD at 240 ℃

Plasma Enhanced Atomic Layer Deposition of Niobium Nitride for Scalable Quantum Device Fabrication

Superconducting NbN Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition

Work-Function Modulation using Atomic Layer Deposited TaN and Ternary TaAlN Metal Gate

Plasma Enhanced Atomic Layer Deposition of Silicon Carbonitride

Boron-Carbon Thin Films Deposited via PE-ALD

SiO₂ Electron-Enhanced Atomic Layer Deposition (EE-ALD) at Low Temperature Using Disilane and Ozone or Water as Reactants

ALD of Transition Metal Chalcogenide TaS_X Using TBTDMT Precursor and H₂S Plasma

High Deposition Rate NbN and TiN for Superconducting Resonators for Quantum Devices by PEALD

Black TiO₂ Synthesized using Plasma-Enhanced Atomic Layer Deposition (PEALD)

Optimizing for the Neutral Radicals in Plasma Enhanced ALD

Electron-Enhanced ALD and CVD at Low Temperature Using Reactive Background Gas

ALD of Multicomponent Films Using Precursor Co-Dosing

Controlling the Nucleation and Growth in Atomic Layer Deposition of Ruthenium: The Role of Surface Diffusion

Combining Atomic Layer Deposition Routes and Solvothermal Conversion: Towards Access to Layer Stacking of Porphyrin-Based Mofs

Crystal Phase Transition of Atomic Layer Deposited Antimony Telluride Thin Films with Thickness and Substrate-Dependent Orientations

Molecular Layer Deposition as a Strategy to Direct Polymer Adsorption and Crystallization

Optical Monitoring of MoCl₅ Delivery for Atomic Layer Deposition Applications

In-Situ Analysis of Surface Reactions on Thin Films in Plasma-Assisted Thermal-Cyclic Atomic Layer Etching

Isotropic Atomic Layer Etching Process for HfO₂ Film

Thermal Atomic Layer Etching of CoO by an “Oxidation-Reduction” Mechanism Using Sequential Reactions of Ozone and Acetylacetone

Surface Modification with Neutral Gas Cluster Beams and Its Application to Atomic Layer Etching

Development Plasma-Based Atomic Layer Etching of Zinc Oxide by Using Tetrafluoromethane Plasma and Dimethylaluminum Chloride

Resistive Capillary Array Calorimetry Method for ALD and ALE Processes

Atomic Layer Etching at Cryogenic Temperature

SiO₂ ALE based on High Boiling Point Fluorocarbon Physisorption

Cryogenically Cooled, Saturating Quasi-ALE of Silicon Nitride

High Throughput SiN ALE and Its Damage Control

The Atomic Layer Etching Database: A Valuable Crowd-Sourced Platform for the Community

The Role of Co-Reactant Reactivity and Surface Passivation During Cu-Doping of NiO ALD

Elucidating the Role of Functional Groups of Ligands for Selective Metal Blocking via Vapor-Phase Sam Deposition

Integrating Area-Selective Ald with Electrohydrodynamic-Jet Printing to Enable Additive Nanomanufacturing

Enhanced ALD Nucleation on Polymeric Separator for Improved Li Batteries

Improved Metal Selectivity via Inherent Orthogonal ASD: Polymer ASD Improves Nucleation Inhibition for Metal ASD

Self-Aligned Patterning by Area-Selective Etching of Polymers and ALD

Chemical Vapor Functionalization of Polymer Membranes for Water Treatment

The Molecular Structure of Desalination Polyamides Made by Molecular Layer Deposition

Deposition of an Atomic Layer Inside Microfluidic Channel

Tunable and Scalable Synthesis of ZnO Nanostructures using ALD Seed Layers

Block Copolymer Templated HfOx Nanowires – From Fundamental Understanding to Rational Design

Compressible Polymer Sponge Electrodes via oMLD of PEDOT onto Polyurethane Sponge Supports

Low Cost, Large Area Sers Substrates by All Ald Deposited 3d Porous Filter Papers