ALD2023 Tuesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, July 25, 2023
1:30 PM 2:30 PM 3:30 PM 4:30 PM
Surface Texture Design of Pt/C Catalyst to Enhance Oxygen Reduction Reaction by FBR-ALD
Stabilization of ALD-grown Iridium Species for the OER Activity
Atomic Layer Deposited Nickel Sulfide as a (Pre)Catalyst for Oxygen Evolution Reaction
Novel Phosphite Doping into ALD SiO2 to Improve H+ and H2 Permeability in Water Electrolyzers
Atomic Layer Deposition of Copper Catalysts for Electrochemical Recycling of Carbon Dioxide
Stability of Molecular Layer Deposited (MLD) Alucone in Acetonitrile for Photoelectrochemical CO2 Reduction Applications
Enhanced Green Hydrogen Production Using ALD-based Catalysts for Ammonia Decomposition
Atomic Layer Depositied Silver Catalysts for Anion Exchange Membrane Fuel Cells
Break & Exhibits
Unfolding the Challenges to Prepare Epitaxial Complex Oxide Membranes by Chemical Methods
Tailoring Lattice Match by Cation Substitution in a Functional Ternary Oxide
In situ Atomic Layer Doping of Epitaxially Grown β-Ga2O3 Films via Plasma-enhanced ALD at 240 ℃
Plasma Enhanced Atomic Layer Deposition of Niobium Nitride for Scalable Quantum Device Fabrication
Superconducting NbN Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition
Work-Function Modulation using Atomic Layer Deposited TaN and Ternary TaAlN Metal Gate
Plasma Enhanced Atomic Layer Deposition of Silicon Carbonitride
Boron-Carbon Thin Films Deposited via PE-ALD
SiO2 Electron-Enhanced Atomic Layer Deposition (EE-ALD) at Low Temperature Using Disilane and Ozone or Water as Reactants
ALD of Transition Metal Chalcogenide TaSX Using TBTDMT Precursor and H2S Plasma
High Deposition Rate NbN and TiN for Superconducting Resonators for Quantum Devices by PEALD
Black TiO2 Synthesized using Plasma-Enhanced Atomic Layer Deposition (PEALD)
Optimizing for the Neutral Radicals in Plasma Enhanced ALD
Break & Exhibits
Electron-Enhanced ALD and CVD at Low Temperature Using Reactive Background Gas
ALD of Multicomponent Films Using Precursor Co-Dosing
Controlling the Nucleation and Growth in Atomic Layer Deposition of Ruthenium: The Role of Surface Diffusion
Combining Atomic Layer Deposition Routes and Solvothermal Conversion: Towards Access to Layer Stacking of Porphyrin-Based Mofs
Crystal Phase Transition of Atomic Layer Deposited Antimony Telluride Thin Films with Thickness and Substrate-Dependent Orientations
Molecular Layer Deposition as a Strategy to Direct Polymer Adsorption and Crystallization
Optical Monitoring of MoCl5 Delivery for Atomic Layer Deposition Applications
In-Situ Analysis of Surface Reactions on Thin Films in Plasma-Assisted Thermal-Cyclic Atomic Layer Etching
Isotropic Atomic Layer Etching Process for HfO2 Film
Thermal Atomic Layer Etching of CoO by an “Oxidation-Reduction” Mechanism Using Sequential Reactions of Ozone and Acetylacetone
Surface Modification with Neutral Gas Cluster Beams and Its Application to Atomic Layer Etching
Development Plasma-Based Atomic Layer Etching of Zinc Oxide by Using Tetrafluoromethane Plasma and Dimethylaluminum Chloride
Resistive Capillary Array Calorimetry Method for ALD and ALE Processes
Break & Exhibits
Atomic Layer Etching at Cryogenic Temperature
SiO2 ALE based on High Boiling Point Fluorocarbon Physisorption
Cryogenically Cooled, Saturating Quasi-ALE of Silicon Nitride
High Throughput SiN ALE and Its Damage Control
The Atomic Layer Etching Database: A Valuable Crowd-Sourced Platform for the Community
The Role of Co-Reactant Reactivity and Surface Passivation During Cu-Doping of NiO ALD
Elucidating the Role of Functional Groups of Ligands for Selective Metal Blocking via Vapor-Phase Sam Deposition
Integrating Area-Selective Ald with Electrohydrodynamic-Jet Printing to Enable Additive Nanomanufacturing
Enhanced ALD Nucleation on Polymeric Separator for Improved Li Batteries
Improved Metal Selectivity via Inherent Orthogonal ASD: Polymer ASD Improves Nucleation Inhibition for Metal ASD
Self-Aligned Patterning by Area-Selective Etching of Polymers and ALD
Break & Exhibits
Chemical Vapor Functionalization of Polymer Membranes for Water Treatment
The Molecular Structure of Desalination Polyamides Made by Molecular Layer Deposition
Deposition of an Atomic Layer Inside Microfluidic Channel
Tunable and Scalable Synthesis of ZnO Nanostructures using ALD Seed Layers
Block Copolymer Templated HfOx Nanowires – From Fundamental Understanding to Rational Design
Compressible Polymer Sponge Electrodes via oMLD of PEDOT onto Polyurethane Sponge Supports
Low Cost, Large Area Sers Substrates by All Ald Deposited 3d Porous Filter Papers
Sessions | Time Periods | Topics | Schedule Overview