ALD2023 Sunday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Sunday, July 23, 2023
1:00 PM 2:00 PM 3:00 PM 4:00 PM 5:00 PM
TS-SuA
Design Rules for Precursors and Why You Should Break Them
A Brief Introduction to Low-Temperature Plasmas: Physics, Diagnostics, and Applications in Atomic Layer Processing
The Application of Atomic Layer Deposition for Batteries
Break
Surface Reaction Mechanisms of Thermal and Plasma-Enhanced Atomic Layer Etching (Ale) Processes
Surface Functionalization of Powder Materials using Fluidized Bed Reactor ALD
Atomic Layer Deposition of Active and Passive Films for Electronic Devices
Sessions | Time Periods | Topics | Schedule Overview