ALD/ALE 2021 Sunday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Sunday, June 27, 2021
10:00 AM 11:00 AM 12:00 PM 1:00 PM 2:00 PM
TS1-SuM
Tutorial Opening Remarks & Welcome
ALE and ALD: Two Biotopes of a Kind in Atomic-Scale Processing
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Fundamentals of Atomic Layer Deposition: An Introduction ("ALD 101”)
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Let's Talk Dirty - Battling Impurities in ALD Films
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Seeing Is Believing: In situ Techniques for Atomic Layer Deposition (ALD) Process Development and Diagnostics
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ALD Powder Manufacturing
Closing Remarks & Thank You!
Sessions | Time Periods | Topics | Schedule Overview