Designing of Surface and Interface of Electrodes for Highly-stable Li Ion Batteries, Li-S Batteries and Metal-Air Batteries

ALD Vanadium Oxides for 3D Thin-film Lithium Ion Batteries

PE-ALD of Transition Metal Phosphates as Lithium-Ion Battery Electrode Materials

Comparing Temporal and Spatial Atomic Layer Deposition for Enhanced Performance of Li Ion Battery Electrodes

All-Solid-State Thin-Film Battery with a Novel Organic Cathode Material by Atomic/Molecular Layer Deposition

Atomic Layer Deposition of Hierarchical CNTs@FePO₄ Architecture as a 3D Electrode for Lithium-Ion and Sodium-Ion Batteries

Unravelling The Role of ALD Al₂O₃ and TiO₂ Protective Coatings on Lithium-Ion Battery Electrodes.

ALD Layer Opportunties for Reversible Bonding of Ultrathin Glass Substrates

Atomic Layer Deposition and Precursor Development for Chemoresistive Gas Sensing Materials

Physics with and Physics of Atomic Layer Deposited Nanofilms

Highly Resistive ALD Coatings for Microchannel Plates Operating at Cryogenic Temperatures

Reactions on ALD TiO₂, ZnO, and Al₂O₃ Metal Oxides during Nucleation of UiO-66-NH₂ MOF Thin Films as Hydrolysis Catalysts for Chemical Warfare Agent Simulants.

Functional Materials using Atomic Layer Deposition for Emerging Display Applications

Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer Deposition

Color Coating of Electronic Textiles via Control of Refractive Index by Atomic Layer Deposition

Comprehensive Studies of Atomic Layer Deposited InGaO Thin Films using InCA-1, TMGa and H₂O₂ for Oxide Semiconductor Thin Film Transistor Applications

Highly Sensitive VOCs Sensor Based on Atomic Layer Deposition of TiO₂ on Carbon Nanotubes

In-situ Real-time and in-vacuo Study of the Temperature Impact on the Al₂O₃ ALD Nucleation upon Pristine Monolayer Graphene

Investigation of the Influence of Plasma Parameters During Aluminum Nitride Atomic Layer Epitaxy using Grazing Incidence Small Angle X-ray Scattering

Studies of Surface Structure and Surface Chemistry During Plasma-Assisted Atomic Layer Epitaxial Growth of InN Semiconductor Thin Films on GaN Substrates

Plasma Gas Chemistry Influence on Growth of InN Films by Atomic Layer Epitaxy

Spectroscopic Ellipsometry of WO₃ Thin Films from ALD: In-situ Layer-by-Layer Growth Monitoring and ex-situ Optical Characterization

Photo-assisted ALD of Oxides and Metals

Oxidation State Discrimination in the Atomic Layer Deposition of Vanadium Oxides

Controlled B Doping in ZnO Atomic Layer Deposition using Boric Acid in Methanol as the B Source

Atomic Layer Deposition of Cobalt(II) Oxide/Hydroxide Thin Films

High Purity Indium Oxide Films Prepared by Modified ALD using Liquid Ethylcyclopentadienyl Indium

A New Scandium Precursor for the ALD of Scandium Oxide

ALD Y₂O₃ Film Using Liquid Yttrium Precursor and Water

Thermal ALD of Gold Thin Films

Nucleation Behavior of Ru on SiO₂ by Atomic Layer Deposition Using Cyclopentadienylethyl(dicarbonyl)Ruthenium and Oxygen

Mechanistic Aspects of Ru ALD Based on Ru(DMBD)(CO)₃ using Downstream Quadrupole Mass Spectrometry

Atomic Layer Deposition for Rhenium Based Materials

Plasma-enhanced Atomic Layer Deposition of Silver using the Ag(fod)(PEt₃)-precursor and NH₃-plasma

Tuning Material Properties by Ion Energy Control during Remote Plasma-ALD on Planar and 3D Substrates

Stress Control of Plasma ALD Films Deposited at Low Temperature by Application of Substrate Biasing

Benefits of an O₂ Plasma in a Bi₂O₃ ALD Process

High Quality Thin Films Produced by Innovative PEALD Equipment with Microwave ECR Plasma

ALD of Aluminum Fluoride using Al(CH₃)₃ and SF₆ Plasma

Ferroelectricity in Undoped ZrO₂ Thin Films on Pt Electrode without Post-Annealing Treatment

Improving the Conductivity (<10^-3 Ω cm) of HfN_x by Ion Energy Control during Plasma-assisted ALD

Plasma Technology for Spatial ALD of Conductive Layers

Atomic Layer Deposition of Lithium Titanate on Planar and 3D-Structured 200 mm Silicon Substrates

Nano-ceramic Composite Separator Modified by ALD for Lithium Ion Batteries of Improved Safety and Reliability

Physical and Electrical Characteristics of ALD Tin Disulfide Multilayer

PEALD Platinum Nano-island SET Fabrication and Electrical Characterization

Thermal Annealing Effects on Electron Emission Properties of ALD MgO