Optical Properties of Bulk GaSe and InSe Single Crystals

Ellipsometric Porosimetry for the Microstructure Characterization of Plasma-Deposited SiO₂-Like Films

Industrial Applications of Spectroscopic Ellipsometry

Spectroscopic Ellipsometry Studies of Sputtered Vanadium Oxide Thin Films

Real Time Spectroscopic Ellipsometry Studies of Si:H and Ge:H Thin Films for Microbolometer Applications

Non-destructive Determination of Spatial Distributions of Free-Charge-Carriers in Low Doped Semiconductors using THz Ellipsometry

Ellipsometric Depth Profiling of Polymer-Blend Films for Organic Electronics and Photovoltaics

Thickness Variations Determined by Spectroscopic Ellipsometry in Organometallic Chemical Vapor Deposition: Connection to Growth Processes

Optical Anisotropy Induced by Oblique Incidence Ion Bombardment of Ag(001)

Self-assembling and Biofunctionalization of Plasmonic Gallium and Gold Nanoparticles on Semiconductors for Label Free Bio- and Chemo-sensing

Geometry and Interactions: How Shape and Intermolecular Interactions Direct the Self-Assembly of Cage Molecules on Au{111}

On the Role of Supramolecular Nanostructure in determining Interfacial Energy and Biological Interactions

Can We Make Alkanethiol SAM's on Surface of Gold Nanorods?

Size-selective Placement of Nanoparticles on a Single Particle Level

Graphene-based Materials

Investigation of Process Dependence of Graphene Growth on Nickel Thin Film

Evolution of Electrical, Chemical, and Structural Properties of Transparent and Conducting Chemically Derived Graphene Thin Films

Plasma-based Approach to Controlling the Oxygen Concentration in Graphene Oxide

Graphene Growth on Transition-Metal Thin Films

Is Fullerene-Intercalation in Graphite a Vehicle to Graphene Surface Layer Doping?

1 nm Thin Carbon Nanosheets: Two-Dimensional Functional Materials

Catalytic Property and Morphology of Pt Clusters on Graphite Surface

Marconi and the First "Vacuum Tube": More than 100 years of Nothing at Work

Charles Herrold, Inventor of Radio Broadcasting

Mutual Evolution of Vacuum and Broadcasting Technology

Zirconia Nanoplatelets for use in Dental Restoratives

Formation of Metallic Nanoclusters on TiO₂ by Deposition and Sputtering

Towards Emergence of New Function by Engineering Materials: Colloidal Nanocrystals as Building Blocks for Nanocomposites and Assemblies

The Direct Writing of Nanoscale Patterns of Nanoparticles and Polymer–Nanoparticle Composites

Synthesis and Structural Characterization of Fe-O Nanonetworks

Synthesis of Shape Controlled Sinter Resistant Nanoparticles

Fabrication and Characterization of Carbon Nanostructures; Optical, Mechanical and Chemical Properties

Microscopic and Spectroscopic Studies of Photoactive Supermolecular Porphyrin Assemblies

Solid-State Tunneling Spectroscopy of Individual Nanoparticles

Modification Mechanisms of Porous Low-k SiOCH Film during Plasma Ashing Processes

Oxygen Plasma and Radical Interactions with Ultralow-K Organosilicates; Fundamental Damage Mechanisms

Synergistic Damage Effects of Vacuum Ultraviolet Photons and O₂ in SiCOH Ultra-Low-k Dielectric Films

Sidewall Modification of Porous SiOCH Ultra Low k Materials Induced by Reducing and Oxidizing Post Etching Plasma Treatments

Reaction Mechanism and Profile Evolution for Porous Low-k Dielectric Sealing by Combined He and NH₃ Plasma Treatment

Materials Interactions as a Challenge for BEOL RIE at 22nm Node and Beyond

Challenges in Porous Ultra Low-k for 22nm Dual Damascene Trench Etch

Sidewall Roughness Transfer during Advanced Interconnect Patterning: Impact of Masking Strategies and Plasma Etching Processes

Post Etch Treatments as Solution to Limit or Prevent Residue Growth on Metallic Hard Mask after Porous SiOCH Etching in Fluorocarbon Based Plasma

Plasma Etching and Texturing of Multi-Crystalline for Silicon Solar Cells using Remote-Type Pin-To-Plate Dielectric Barrier Discharge

Production of Crystalline Si Nanoparticles for Third Generation Photovoltaics using a Multi-Hollow Discharge Plasma CVD Method

Novel Model-Based Sensor for Thin Film Deposition on Large Area Substrates

Plasma Processing of Thin Silicon Films for Photovoltaic Applications

Atomic Hydrogen Induced Defect Kinetics in Hydrogenated Amorphous Silicon: An In Situ Real Time Study

Hydrogen-dominated Plasma, Due to Silane Depletion, for Microcrystalline Silicon Deposition

Plasma Uniformity Measurements in a Scalable, Multi-Electrode, VHF/UHF Plasma Source

Development of Highly Functional Visible Light-responsive TiO₂ Thin Film Photocatalyst Materials by a RF Magnetron Sputtering Method and their Applications for our better Environment and Production of Clean Energies using Sunlight

The Effect of Nb Additions on the Synthesis, Photo-Response, and Photo-Activity of TiO₂ Thin Films

Identification of Carbon Sensitization for the Visible Light Photocatalytic Titanium Oxide

Effects of Oxygen Vacancies on Electro-Optic Properties of Reactively Co-Sputtered Nb-doped Titania Films

Micro-Structure of Photo-Catalytic TiO₂ Films Deposited by Oxygen Ion Assist Reactive Evaporation Method and Reactive Sputtering

Enhancement of Visible-Light Activities of Photocatalytic WO₃ Films Deposited by Sputtering

Optimization of Photovoltaic Performance through the Integration of Electrodynamic Dust Shield Layers

Industrialization of Metal Ion Sputtering

Structural and Mechanical Behavior of Fullerene-Like and Amorphous Carbon Nitride Thin Films Deposited by HPPMS

Effects of the Working Pressure and Pulse Parameters on the Ion Energy and Mass Distributions in Modulated Pulse Power Sputtering Plasma

Effects of HiPIMS Plasma Transport on Thin Film Deposition

Deposition Rates of High Power Impulse Magnetron Sputtering: Physics and Economics

Optical Diagnostics of HIPIMS Discharges: Dependence of Film Growth on Control Parameters

Time-resolved Plasma Characterization in Modulated Pulse Power (MPP) Magnetron Sputtering

Reaction of Phenylenediamines on Ge(100)-2x1: The Effects of Functional Group Spacing on Reactivity

Electronic and Steric Effects in the Reactions of Isocyanates and Isothiocyanates at the Ge(100)-2x1 Surface

Surface Transamination Reactions for Thin Film Deposition on NH_x-Precovered Silicon

Si ALE using Molecular Disilane on Si(100)-(2x1)

Adsorption Studies of Molecular Disilane on p-type Ge(100) at Room Temperature

High-stability Molecular Interfaces to TiO₂ Surfaces

HREELS Study on the Doping of ZnO by H and Cu Atoms

Reactions of NO₂ with BaO and Ba(OH)₂ on Pt(111)

In-situ Spectroscopy Studies of Surface Species on Pd Surfaces during CO Oxidation

Surface Structures of TiO_x Thin Films on Au (111)

Geometric Structure of the TiO₂(011) (2x1) Surface by Low Energy Electron Diffraction (LEED)

Metal Oxide Surfaces: Defects, Dopants, and Reactivity

Controlled Manipulation of Oxygen Vacancies on TiO₂(110)-1x1 Using LT-STM

Oxygen Reactivity on Reduced TiO₂(110)

Oxygen Interactions with Hydroxylated TiO₂(110) Surfaces

The Photochemistry of Trifluoroacetone on TiO₂(110)

TiO₂ with Subsurface Metallic Nanoclusters for Stimulating Photochemistry

Switching of Sulfur Lattice Sites in S-doped TiO₂(110) Under Controlled Annealing Environments

Photoluminescence Properties of SrAl₂O₄:Eu²⁺,Dy³⁺ Thin Phosphor Films Grown by Pulsed Laser Deposition

Multifunctional Double Perovskite Thin Films and Heterostructures

Influence of Nanostructure on Charge Transport in RuO₂ Thin Films

Electrical and Structural Properties of Ultrathin Polycrystalline and Epitaxial TiN Films Grown by Reactive dc Magnetron Sputtering

Cubic and Wurtzite Sc_1-xAl_xN Solid Solutions Grown by Reactive Magnetron Sputter Epitaxy onto ScN (111) and AlN(0001) Seed Layers

Process Control of Vanadium Oxide Thin Films Grown by Pulsed-dc Reactive Sputtering for Microbolometer Applications

Compositional and Structural Evolution of Sputtered Ti-Al-N

ALD of Metal Chalcogenide Thin Films

Molybdenum ALD and Mo/W Alloy Growth Using MoF₆, WF₆ and Si₂H₆ as the Reactants

Vapor Deposition of Ruthenium Thin Films from an Amidinate Precursor

Thermal and Remote Plasma ALD of Ru from CpRu(CO)₂Et and O₂

Atomic Layer Deposition of Platinum-Iridium Mixed Metal Layers

Electrically Conductive Fiber Media by Atomic Layer Deposition of Tungsten

Interconnect Reliability Improvement by Selective CVD of Co Capping Layer on SAM Treated Copper/Low-k Surface

From Chemisorption to Steady-State Growth: Initial Stages of ALD Examined using In Situ X-ray Photoelectron Spectroscopy

Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance

Modeling Decontamination of Vacuum Chambers by Downstream Plasma Cleaning

Methods for Measuring Outgassing for Qualification of Materials, Components and Systems

Outgassing Characterization of Elastomeric Seals Used in Semiconductor Wafer Processing

Permeation Through Elastomers: Comparison of Viton^® and Chemraz^® 653 O-rings under Controlled Compression and Temperature

Controlled Formation of Condensed Frost Layers in Cryogenic High Vacuum Pumps

Combination of Compact NEG and Small Ion Pumps for UHV Systems

Water Vapor Cryopumping: Refrigerant Phaseout Compliance

Vacuum Processing for the 21^st Century