Plasma Science and Technology Sessions

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PS1-MoM Monday, November 13, 2006 8:00 AM Etch for Advanced Interconnect I
PS2-MoM Monday, November 13, 2006 8:00 AM Advanced Gate Fabrication
PS-MoA Monday, November 13, 2006 2:00 PM Manufacturing and Scientific Challenges for Plasma Processing at 32 nm
PS1+MS+NM-TuM Tuesday, November 14, 2006 8:00 AM Plasma Patterning
PS2-TuM Tuesday, November 14, 2006 8:00 AM Plasma Surface Interactions I: Joint AVS-AIChE Session
PS1-TuA Tuesday, November 14, 2006 2:00 PM Emerging Plasma Applications
PS2-TuA Tuesday, November 14, 2006 2:00 PM Etch for Advanced Interconnect II
PS1-TuP Tuesday, November 14, 2006 6:00 PM Etching of High-K, Compound Semiconductors and Advanced Materials Poster Session
PS2-TuP Tuesday, November 14, 2006 6:00 PM Etching and Process Integration Poster Session
PS3-TuP Tuesday, November 14, 2006 6:00 PM Advanced Plasma Deposition Poster Session
PS1-WeM Wednesday, November 15, 2006 8:00 AM Plasma-Surface Interactions II
PS2+TF-WeM Wednesday, November 15, 2006 8:00 AM Plasma Deposition
PS1-WeA Wednesday, November 15, 2006 2:00 PM Plasma-Wall Interactions and Plasma Sources
PS2-WeA Wednesday, November 15, 2006 2:00 PM Atmospheric and Microplasmas
PS1+BI-ThM Thursday, November 16, 2006 8:00 AM Plasmas in Bioscience
PS2-ThM Thursday, November 16, 2006 8:00 AM Plasmas and Polymers
PS1-ThA Thursday, November 16, 2006 2:00 PM Plasma Processing for High-K/III-V’s and Smart Materials
PS2-ThA Thursday, November 16, 2006 2:00 PM Plasma Modeling
PS-ThP Thursday, November 16, 2006 5:30 PM High Pressure Discharges and Novel Diagnostics & Sources Poster Session
PS1-FrM Friday, November 17, 2006 8:00 AM Plasma-Surface Interactions III
PS2-FrM Friday, November 17, 2006 8:00 AM Diagnostics
Topic List