AVS2006 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, November 13, 2006
8:00 AM 9:00 AM 10:00 AM 11:00 AM
AS+
Biomolecular Lithography on GaAs Surfaces
The Effect of Ring Substitution Position on the Structural Conformation of Mercaptobenzoic Acid Self-Assembled Monolayers on Au(111)
XPS Analysis of Arenes and Proteins on Gold Substrates Attached by Electrochemical Reduction of Aryldiazonium Salts
Challenges in the Modification and Characterization of Two- and Three-Dimensional Biointerfaces
Nanoscale Chemical Patterning and Architectures
Tailoring of Functional Nano-Patterned Surfaces for Biosensing Applications by Combination of Plasma Processes and Electron-Beam Lithography
Optically-Stimulated Surface Diffusion Exploited for Directed Self-Assembly on Amorphous Semiconductors
Nanowires and Nanodevices via Assembly of Clusters
DN-MoM
Carbon Nanotube and Thiol Tethered ssDNA Interactions on Gold
Identifying Short DNA-Strands with Redox Markers by in situ Scanning Tunnelling Microscopy
Hybridization Behavior of DNA/Oligo(ethylene glycol) Functionalized Gold Surfaces in Complex Media
Amino-Silane and Chitosan Coated Silicon Substrates for DNA Extraction
Thymine Homo-oligonucleotides as Model Systems for DNA Surface Science
Engineering DNA-DNA Surface Interactions
Quantitative XPS Imaging of DNA Microarray Surfaces
DNA Nanostructure Adsorption and Growth on Inorganic Surfaces
Interfacial Hybridization Reactions Monitored by Surface Plasmon Optical and Electrochemical Techniques
NM+
The Economics of Matter: Nanotechnology & Scale of Manufacturing
Colloidal Nanocrystals of Complex Shape: Synthesis, Properties, Applications
Manufacturing Nanoparticles for Applications in Society
Nanotechnology and High-Efficiency Automobiles
DNA-linked Dendrimer Nanoparticle Systems for Cancer Diagnosis and Treatment
NS-MoM
A Novel Scanning Probe Microscope with MOS Transistor and Nano Tip
Simulation of Electrostatic Force Microscopy Imaging Modes
Chemical Specificity and Defect Characterization on MgO(001)
QPlus Sensor AFM at Low Temperatures with Atomic Resolution on NaCl
Nanoscale Spectroscopy with Optical Antennas
Ultra High-Stability SPM to Study Molecules at Variable Temperature
Mapping Atomic-Scale Interaction Potentials
Electromechanical Imaging of Ferroelectric Materials in a Liquid Environment: Ultrahigh Resolution and Novel Physics
Spatial Resolution, Information Limit, and Contrast Transfer in Scanning Probe Microscopy
Raman Spectroscopy of Strained Silicon Structures for CMOS Technology
PS1-MoM
Fluorocarbon-based Plasma Etching Processes for Silicon Dioxide and Silica Dielectrics - Mechanistic Insights and Current Issues
Effect of Species Density and Ion Bombardment during Ashing of Extreme Ultra Low-κ (eULK) Inter-Level-Dielectric (ILD) Materials
Systematical Evaluation of Etching Damage of Light, Radicals and Ions on Low-k Porous SiOCH Films
Negative Ions in Dual-Frequency Capacitively Coupled Fluorocarbon Plasmas
Plasma and Etching Characteristics for C6F6 Gas
New Challenges in Etching Ultra Low-k Dielectrics for 45nm and Beyond
Analysis of Plasma-Induced Modification of Porous SiOCH Low-k Materials during Etching and Post-Etching Plasma Processes
Material Modifications and Surface Roughness during Porous SiOCH Etching Processes
Grain Size Effects on Plasma-based Copper Etch Process
PS2-MoM
Plasma Etch Challenges in Non-Planar Device Fabrication
Effect of Photoresist Trimming and Plasma Treatments on Line Roughness, Necking, and Bending During High Density Plasma Polysilicon Gate Etching
Understanding the Impact of Chamber Walls during Plasma Etching: a Key to Control Plasma Processes In ULSI
Effect of Etching Process on Gate LER
Plasma Atomic Layer Etching Using Conventional Plasma Equipment*
Impact of Plasma Damage on Cobalt Silicidation
Plasma Etching Challenges of New Materials Involved in Gate Stack Patterning for sub 45 nm Technological Nodes
Ta and Mo-based Metal Etch for Advanced Gate Stacks
Influence of Stopping Layer Nature on Poly-Si/Metal Gate Patterning Process
Plasma Etching of Tungsten Nitride for sub 45nm Metal Gate
SS1-MoM
Activation of Au for Nitrogen Addition Reactions
Toward Computational Screening in Heterogeneous Catalysis: Pareto-Optimal Methanation Catalysts
Double-Bond Isomerization in Cyclic Olefins Adsorbed on Platinum Surfaces.
Catalysis Science of Surface Metal Oxide Catalytic Active Sites
Methanethiol Desulfurization on Titania-Supported Ni Clusters
Chiral Surface Structure and Enantioselectivity
Diffusion of Adsorbates: on "Walking" and "Dancing" Molecules
Comparison of the Stability of Small Molecules On Rh(111) and Rh(553)
SS2-MoM
Biphasic Substrate-Adsorbate Energy Transfer Following Subpicosecond Photoexcitation
Influence of Film Thickness on the Reactions of Gas Phase Radicals with Self Assembled Monolayers
Activated Dissociative Chemisorption: Distinguishing Between Statistical and Dynamical Behavior
Vibrational Energy Flow in a Gas-Surface Reaction
Ultrafast Structural Dynamics in Complex Materials using Femtosecond Visible and X-ray Pulses
Direct Probing of the Surface Dangling Bond by Means of Evanescent Wave Cavity Ring Down Spectroscopy
Image and Image-Derived States Formed by Molecular Thin Film Structures
Reaction Dynamics of NO Gas on Iron Phthalocyanine Thin Films
TF-MoM
Spatially Controlled Nano-Scale Doping of Er3+ in Y2O3 by Atomic Layer Deposition
MnO2 and MgO Atomic Layer Deposition Using Bis(Ethylcyclopentadienyl) Precursors and H2O
A New Fabrication Method of Nanostructural Materials by Using Selective Atomic Layer Deposition
Mechanism of Al2O3 Atomic Layer Deposition Using Trimethylaluminum and Ozone
Atomic Layer Deposition of Y2O3-Al2O3 Nanolaminate Thin Films and Compounds
Plasma Enhanced Atomic Layer Deposition of TiO2 and HfO2: Plasma Source Configuration and Film Properties
Interface Properties of Hafnium Oxide Films Grown by Atomic Layer Deposition on Native, Chemical Oxide and H-Terminated Si Surfaces
Atomic Layer Deposition of Aluminium Silicate Films
Structure and Electrical Properties of BN Atomic Layer Deposition Grown in a Quasi-static Viscous Flow Reactor
Plasma Controlled Atomic Layer Deposition for Sealing Pores in Low-k Materials
Sessions | Time Periods | Topics | Schedule Overview