AVS2002 Plasma Science Sessions

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Session Code Start Session Name
PS-MoM Monday, November 4, 2002 8:20 AM Conductor Etch I
PS1-MoA Monday, November 4, 2002 2:00 PM Dielectric Etch I
PS2-MoA Monday, November 4, 2002 2:00 PM Plasma Processing for Large Area Substrates
PS+MS-TuM Tuesday, November 5, 2002 8:40 AM Plasma Diagnostics and Sensors
PS-TuM Tuesday, November 5, 2002 8:20 AM Atmospheric Pressure and Other Emerging Plasma Applications
PS1-TuA Tuesday, November 5, 2002 2:00 PM Microdischarges
PS2-TuA Tuesday, November 5, 2002 2:00 PM Plasma Surface Interactions I
PS-TuP Tuesday, November 5, 2002 5:30 PM Plasma Applications
PS+NT-WeM Wednesday, November 6, 2002 8:20 AM Plasma Science and Technology for Nanostructures
PS-WeM Wednesday, November 6, 2002 8:20 AM Conductor Etch II
PS+TF-WeP Wednesday, November 6, 2002 11:00 AM Plasma Etching & Deposition
PS+BI-WeA Wednesday, November 6, 2002 2:00 PM Plasma Processing for Biocompatible Surfaces
PS+MM-WeA Wednesday, November 6, 2002 2:00 PM Feature Profile Evolution /Plasma Processing for MEMS
PS+TF-ThM Thursday, November 7, 2002 8:20 AM Plasma Enhanced Deposition
PS-ThA Thursday, November 7, 2002 2:00 PM Dielectric Etch II
PS-FrM Friday, November 8, 2002 8:20 AM Plasma Surface Interactions II
Topics | Time Periods | Schedule Overview