Fundamental Studies of Self-Assembling Monolayers as Model Systems for Biological Interfaces

Protein Adsorption and Cellular Responses to Polysaccharide Coatings

Film Formation of Self-assembled Monolayers of Thiol-modified Polyethylene Glycol on Gold

Synthesis and Characterization of Functionalized Polymerizable Diacetylene Containing Thiol Monolayers

Modification of Metal Oxide Surfaces for Biosensor and Biomaterial Applications Based on Assembled, Functionalized Poly(L-lysine)-g-poly(ethylene glycol)

Design and Characterization of Specific Biorecognition Interfaces using Derivatized Poly(L-lysine)-grafted-poly(ethylene glycol) Monolayers

Analysis of Protein Absorption on PEG-covered Silica Surfaces by ATR-FTIR

Combining Polymer Chemistry and Photolithography to Manipulate Gene Expression and Protein Synthesis

Investigation of Protein Interactions with Poly (Ethylene Glycol) Modified Liposomes

Materials Considerations for High-K Gate Dielectrics for Scaled CMOS

New High k Thin Films with Improved Physical and Electrical Properties

Chemical and Microstructural Separation of Homogeneous Plasma Deposited (ZrO₂)_x(SiO₂)_(1-x) films (x ≤ 0.5) into SiO₂ and ZrO₂ Phases after Rapid Thermal Annealing in Ar at 900°C

A Study of ZrO₂ and Zr-silicate Thin Film for Gate Oxide Applications

Ultra-thin Zirconium Oxide Films Deposited by Rapid Thermal CVD for MOSFET Applications

High-quality Ultrathin Fluorinated Silicon Nitride Gate Dielectric Films Prepared by Plasma Enhanced Chemical Vapor Deposition Employing NH₃ and SiF₄

Elimination of Carbon Impurities in the Metalorganic Chemical Vapor Deposition (MOCVD) of Titanium Dioxide on Silicon

Microscopic Understanding of the Interface for the Heteroepitaxy of Crystalline Oxides on Silicon

Formation of Ultrathin Yttrium Silicate by Thermal Oxidation of Yttrium on Silicon

Spin-dependent Behavior in Magnetic / Semiconductor Heterostructures

MBE Growth of Ni₂MnIn/InAs (001) Heterostructure

Investigation of the Microstructural Dependence of Magnetic Properties for MnSb/Bi Multilayers Grown on Sapphire

Ferromagnetic Fe/Ag-GaAs Waveguide Structures for Wideband Microwave Notch Filter Devices

Non-Volatile Reprogrammable Logic Elements using a Hybrid RTD-GMR Circuit¹

Magnetization-Controlled Resonant Tunneling in Magnetic Heterostructures

Surface Micromachining - Process Modeling

Application of Magnetic Neutral Loop Discharge Plasma in Deep Silica Etching

Application of Deep Silicon Etching and Wafer Bonding in the MicroManufacturing of Turbochargers and Micro Gas Turbine Engines

MEMS Fabrication Technology Applied to Large Area X-ray Image-sensor Arrays

Switching of Interfacial Energies in Polymeric Coatings

A Novel Anti-Stiction Method Using the Harmonic Excitation on the Microstructure

Control of Residual Stress in Thick Sputtered Metal Films

SiC Surface Micromachining Process Development and Device Characterization

Micro- and Nanotube Fabrication using Deposited Porous Silicon

Integration Challenges for Copper Metallization with Low-k Dielectrics

Adventure of the first 300mm Pilot Line

Cluster Formation on Copper Evaporated Onto Dow Cyclotene 3022

FSG Film Characterization and Process Development for Copper/Damascene Technology

300mm Manufacturing Meterology Needs

Selective-Area Chemical Vapor Deposition Using AFM-Patterned Silicon Nitride Growth Mask

Fabrication of Nanoscale Templates by Chemical Lithography

National Nanotechnology Initiative: Overview

Electronic Conductivity and Thermoelectric Measurements of Bismuth Nanoline Structures

Quantum-wire Arrays Fabricated by a High-pressure High-temperature Injection Process

Transport Study of Single Bismuth Nanowire Fabricated by Silver and Silicon Nanowire Shadowmask

Conductance Anisotropy in a Mesoscopic Array of Atomic Wires: Ga/Si(112)¹

Time Evolution of Ag Nanowires Grown on Ag/GaAs(110) Surfaces

Ion Implanted Contacts to Nanostructures and Metallic Monolayers on Clean Surfaces

Rates of Interfacial Electron Transfer Across Well-Defined Model Interfaces

Charge Transfer in Alkanethiol Self-Assembled Monolayers on Au Surfaces

Low Energy Electron Microscopy Studies of the Growth of Thin Pentacene Films

Self-assembled Monolayers on Silicon Surfaces via Si-O Linkages

Friction Force Microscopy Study on Photodegradation of Organosilane Self-assembled Monolayers Irradiated with a Vacuum Ultraviolet Light at 172 nm

Generation of Reactive Intermediates on Platinum by Photolysis of Pyridyl-α-Diazocarbonyl Self Assembled Monolayers

X-Ray Induced Changes in Thiol-SAMs on Gold

Surface Stress of Self-Assembled Alkanethiols on Gold-Coated Cantilevers

Self-assembled Monolayers of 6-Phenyl-n-Hexanethiol and 6-(p-Vinylphenyl)-n-Hexanethiol on Au: An Investigation of Structure, Stability and Reactivity

Supervision of Plasma Processes using Multiway Principal Component Analysis

Sensors and Control in Plasma Processing

Run-to-Run and Real Time Process Control of Plasma Processes using an Inductive Antenna with Microsecond Resolution

Improved Utility of Microwave Energy for Semiconductor Plasma Processing through RF System Stability Analysis and Enhancement

Modeling and Real-time Control of RF Diode Sputtering for GMR Thin Film Deposition

Productivity Solutions for Eliminating Within-Wafer and Wafer-to-Wafer Variability in a Silicon Etch Process through Plasma and Surface Diagnostics

Source Optimization for Magnetron Sputter-Deposition of NbTiN Tuning Elements for SIS THz Detectors

Multiwavelength In-Situ Ellipsometry for Optical Coatings Fabrication: Optimal Control Strategies and Results

Low Open Area Endpoint Detection of Plasma Etching Processes - Limitations and Signal to Noise Characterization

Undercut and Bowing Characterisation in High Aspect Ratio Trenches of Poly-Si Etched in an ICP Reactor using Cryogenic SF6/O2 Chemistry Process

Origin of Sidewall Deposition during Cl₂/O₂ Etching of Sub Micron Features in Inductively Coupled Plasma Reactors

Profile Simulation of Poly-Silicon Gate Features Etched with Cl2/HBr/O2 Plasmas

Feature Profile Evolution during Pulsed Plasma Etching: Effects of Redeposition of Time-Dependent Etch Products

A Model for Si Etching in an Inductively Coupled SF₆/C₄F₈ Discharge

An Integrated Model for Oxide Etch using Fluorocarbon Plasmas

Modeling of Trench Filling During Ionized Metal Physical Vapor Deposition¹

Process Characterization for Tapered Contact Etch

Understanding the Evolution of Trench Profiles in the Via-First Dual Damascene Integration Scheme

Microtrenching, Etching and Sidewall Passivation in Contact Holes and Edge Regions

Si-Ge Heterostructures

Critical Behavior of Epitaxial Si_1-xGe_x/Si(001) Islands

Growth of Coherent Three-dimensional Si Islands on Ge(111)

Adatom Assisted Stabilization of Ad-dimers on Ge(001)

C Incorporation during the Growth Of Ge_1-yC_y/Ge(001) from Hyperthermal Beams

Growth and Characterization of Metastable Ge_1-xC_x Thin Films on Si(100) Substrate.

Electrical and Optical Properties of Silicon : Germanium Alloys prepared by DC Magnetron Sputtering

Preparation and Characterization of Highly Li-doped a-Se Alloy Films for Thermal Neutron Detectors

Instability in Atomic Step Morphology during the Sublimation of Si(111)

Metal/Metal-Oxide Interactions and Structures in Bulk Truncated and Thin Film Systems --The Theoretical View

Ultrathin Fe Oxides on Cu(001): a Search for Half-Metallic Films

Low Temperature Microcalorimetric Heats of Adsorption and Sticking Probabilities of Metals on Oxide Surfaces

Electronic Structure of Grain Boundaries in TiO2 from Ab-Initio Calculations

Surface Defects on MgO Thin Films: Formation, Detection, Electronic and Chemical Properties

Metallic Electronic States on SrTiO₃ (110) Surface -- An In Situ Conduction Measurement

First-Principles Calculations on Al₂O₃/TiC Growth and Interface

Self-Diffusion in Ceria

Defect Characterization on MgO(100) Using Adsorption of Small Molecules

The Role of Two-dimensional Compressibility in Physisorption, Competitive Adsorption and Dynamic Displacement

Molecular Adsorption and Growth of n-butane Adlayers on Pt(111)

Optical Effects of Monolayer and Multilayer Adsorption: Formic Acid and Methanol on Cu(100)

Precursor-mediated Dissociation and Trapping Desorption of Oxygen on Cu(001)-2√2x√2-O

The Effect of Deposition Pressure on Adsorbate Structure and Coverage: Oxygen on W(110)¹

STM Investigation of Benzene Adsorption on Ag(110)

Scanning Tunneling Microscopy and Spectroscopy of Metal Tetraphenylporphyrins on Au(111)

Theory of Oxygen Adsorption on Ag(111): A DFT-GGA Investigation

Adsorption of Propylene on Clean and Oxygen Covered Au(111) and Au(100)

Adsorbate Structure Determination on Surfaces using Normal-Incidence X-ray Standing Waves

Oriented Quantum Dots By Buffer Layer Growth Process

Direct Observations of Ordered Domain Structures and their Dynamics : Pb on Cu(111)¹

Normal Incidence X-ray Standing Wave and Medium-energy Ion Scattering Investigation of the Structure of Ultra-thin Films on Cu(111)

Low Energy Dynamics for S/Cu

Does Adsorbed Oxygen Change the Electron Density in Cu?

Soft X-ray Photoelectron Spectroscopy Studies of Faceting and Alloying for Ultra Thin Films of Ruthenium on W(111) and W(211)

Oxygen Induced Faceting of Ir(210)

Evolution of Ni(110) Surface with Low Energy Ion Sputtering

Monitoring of Thin Film Metallization by Metastable He Atom Scattering

Ultraviolet Absorption Spectroscopy of Polytetrafluoroethylene Deposition by Pyrolytic CVD

Near-edge Valence Band Structure of Amorphous Hydrogenated SiC Thin Films by a Combined use of Auger and Photoemission Processes

Growth of Oxygen-rich Films on Ru(0001)

In-situ Characterization of Thin Film Growth

Characterization of the Phase Evolution of Boron Nitride Thin Films using Real Time Multichannel Ellipsometry from 1.5 to 6.5 eV

Deposition of Hard Amorphous Hydrogenated Carbon Films from Hyperthermal Hydrocarbon Radicals, Studied by In Situ Real Time Infrared Spectroscopy

In-Situ Monitoring of Adsorption and Film Growth Using Infrared Reflection Absorption Spectroscopy

Investigation of the Subsonic Beam behaviour of an Expanding Thermal Plasma used to Deposit Silicondioxide like Films

A Test Problem for the Holweck Pump

Significance of Bulk Flow Velocity for Turbopump Design

A Quantitative Test of Slip-Flow Theory using the Spinning Rotor Gauge

Power Dissipation in Gaede Stages of Turbomolecular-drag Pumps in Viscous High-pressure Regime

Modelling Micro-Channel Flows with DSMC and a Particle Continuum Method

Flow of Moderately Rarefied Gases Through Short Circular Tubes

A Method for Calculation of Gas Flow in the Whole Pressure Regime Through Ducts of Any Length

Conic Peak/Dimple Roughness Model for Explaining the Reduction of Flow Rate through Passages with Rough Walls

Free Jets in Vacuum Technologies