Substrate and Attachment Chemistry Effects on Adsorption and Single-Base Mismatch Discrimination on Immobilized Oligonucleotide Arrays

Investigation of DNA Hybridization on Surfaces by Surface Plasmon Fluorescence Spectroscopy (SPFS)

Fluorescence Detection of Surface DNA Hybridization Reactions Based on Surface Structural Changes

Silicon Surface Chemistry for DNA Immobilization

BARC: A Magnetoresistive Biosensor¹

A Biosensor Based on Force Differentiation¹

Encapsulation of Smart Polymers in Silica: Stimuli-Responsive Porous Hybrid Materials That Incorporate Molecular Nano-Valves

Adsorption Behavior and Optical Properties of Surface-Adsorbed Polystyrene Nano Particles

Formation and Patterning of Supported Fluid Lipid Bilayers on a High Refractive Index Substrate

High Density Thin Film Ferroelectric Nonvolatile Memories

Process Window Extension of TiN Diffusion Barrier using Pre-oxidation of Ru and RuO_x Film for (Ba,Sr)TiO₃ Dielectric Film

Atomic Polarization and Screening Charge by Variable Temperature Scanning Probe Microscopy of Ferroelectric Surfaces

Film-formation Mechanisms, Microstructure, and Properties of BST Thin Films Grown By MOCVD

Epitaxial (Ba,Sr)TiO₃ on MgO for Room Temperature Microwave Phase Shifters

High Temperature Etch Processing for FeRAM MFM Capacitor Stack Fabrication

In-situ Control of Wet Chemical Etching of Patterned Bulk-GaAs using Real Time Spectroscopic Ellipsometry

In- and Ex-situ Characterization by Second-harmonic Generation of the RPECVD Oxidation and Nitridation of Silicon and Ex-situ Comparisons with Other Optical Techniques

What Is Needed and What Is Practically Available for Small Area, Small Depth, Chemistry Sensitive Analysis in the Semiconductor Wafer Processing Industry

Dopant-Induced Contrast of Si Devices in PEEM

Elemental Mapping of Sub-µm Particles and Structures by LASER-SNMS and TOF-SIMS

Dose Quantity Effects on Nano-scaled Dot Size and Depth Profile of Gallium Implantation on Silicon by Finely Focused Ion Beam

Ion Channeling Effects on the FIB Milling of Crystalline Materials

XPS Analysis of Si Samples Prepared Using the FIB Lift-Out Technique

Determining Area Selectivity in Small-Area XPS Analysis¹

The Determination of Magnetostriction for Spin-Valve Devices with 5.0 nm and 10.0 nm Permalloy Layers

Properties of GMR Multilayers Grown by RF Diode Sputtering

GMR Sensing Elements for the Detection of Magnetic Microbeads in Biosensor Array

Preparation of Magnetic Tunnel Junctions by Ionized Atom Beams

Nonlinear Magneto-Optical Investigations of Magnetic Interfaces

"Acoustical" and "Optical" Spin Modes of a Fe/Cr/Fe/Cr/Fe Multilayer with Ferro- and Anti-ferromagnetic Couplings

Analysis of Tunneling Magnetoresistance Structures by Low Energy Electron Nanoscale Luminescence Spectroscopy

Magneto-optical and Optical Spectroscopies of Fe/Si Multilayered Films

Stress Measurement in MEMS Devices

Issues in MEMS Reliability and Characterization

MOCVD PZT as a Pathway to Integrated Piezoelectric MEMS

Deposition of Highly Oriented LiCoO₂ Thin Films for Use as Cathodes in Thin Film Batteries

Microstructure and Mechanical Properties of Polysilicon and Poly-SiC Films for MEMS

Comparison of In-situ Boron-doped and In-situ Phosphorus-doped Polysilicon Films for Microelectromechanical Systems

Investigation of the Friction and Adhesion Properties of BPT and BPTC Self-assembled Monolayers by AFM

Viewing a Moving Surface Contact: An STM-QCM Study of Vapor Deposited Films on Metal Surfaces

Challenges in Modeling & Simulation of Semiconductor Equipment & Processes

Modeling of Oxide CMP and Polish Pad Conditioning

Mechanical Properties of a Cu­Ta Interface by Molecular Dynamics

Integrating Process Models, Equipment Logistics, and Factory Flow for Manufacturing Systems Optimization

Plasma Reactor Simulation to Improve Film Deposition Uniformity

First Principles Modeling of Gas-Surface Interactions in Low Pressure CVD Processes

Etching of Silicon in HBr Plasmas for High Aspect Ratio Features

Contamination Removal from Wafer with Deep Trenches

In Situ Metrology for Cu Electroplating

Optical Sieves - How to Get the Light through Subwavelength Holes

Near-field Optical Measurements of Two Types of the Super-resolution Near-field Structures

Near Field Surface Photovoltage Microscopy

Dual-Wavelength Scanning Near-Field Optical Microscopy

Novel Scanning Near-field Optical Spectroscopy/Atomic Force Microscope Probes with High Polarisation Single/Double Slit and Cross Aperture Tips

Optical Properties of Strained GaInP/InP Quantum Dots Studied with STM Based Electro-luminescence

Silicon Nanostructures via Intense Ultrafast Electronic Excitation

Microstructural and Optical Properties of Porous SiC

Development of a Photon Detection STM for Inelastic Light Emission

Plasma Surface Modification of PET and Acrylic Coating Surfaces

Exploring Chemical Mechanisms behind Hydrophilic Surface Modification of Polymeric Membranes by Low-temperature Plasma Treatment

The Mechanisms of Anisotropy Control in Plasma Etching Processes

Pulsed Plasma Polymerisation of Acrylic Acid

Control of Ion Energies in RF Plasmas used for the Surface Modification of Polymers

Surface Chemical Patterning by Plasma Polymerization

The Relationship between Deprotection and Film Thickness Loss during Plasma Etching of Chemically Amplified Resists

Study of Defects Induced on Graphite Surface by Low Pressure Argon Plasma

Novel Technique to Enhance Etch Selectivity of Carbon ARC over PR based on O₂/CHF₃/Ar Gas Chemistry

Ion Energy Control for Enhanced Plasma Etch Selectivity

Temperature and Bias Effects in ICP Etching of Silicon Dioxide

Control of Incident Fluxes and Surface Reactions in the Etching of Dielectric Materials

Reaction Mechanisms and SiO₂ Profile Evolution in Fluorocarbon Plasmas: Bowing and Tapering¹

Etching Mechanism of Silicon Nitride Film in Self-aligned Contact Etching Process

High-performance Silicon Dioxide Etching for High-aspect Contact Holes

Selective Etching of SiO₂ in High Density Fluorocarbon Plasmas for Applications in Micro-systems

Trench Etch Processes for Dual Damascene Patterning of Low-k Dielectrics

Kinetics of GaN Growth and Decomposition

Carbonization of Si (111) by Gas Source Molecular Beam Epitaxy using Triethyl Gallium and Subsequent GaN Growth

Epitaxial III-V Nitride Growth on SiC(0001) by Means of A³Σ_u⁺ Metastable Molecular Nitrogen

Crystal Growth Kinetics and Transport in GaN Epitaxial Lateral Overgrowth

Thick GaN on Si Substrate by Hydride Vapor Phase Epitaxy using Epitaxial Lateral Overgrowth Technique

Growth and Electronic Structure of ScN, a New Refractory III-V Semiconductor

Structure and Optical Properties of ScN(001) Grown by Molecular Beam Epitaxy

ScN Thin Films and Thin Film Devices

Real Time TEM Observations of the Oxidation of Silicon

Comparison of Electrochemical Corrosion Properties and Oxidation Kinetics of Ozone- and Oxygen-formed Aluminum Oxide Films

Temperature Dependent Adsorption of Oxygen on TiO₂ (110): A Photoemission Study

Water Reactions at Plutonium Oxide: Surface Chemistry

Studies of Water Plasma Treatments on Silicon Oxide Films

The Nature of Oxygen at Rocksalt and Spinel Oxide Surfaces

Direct Observation of Native Hydrogen Adatoms on Rutile TiO₂(110) Surface

Work Function Changes and Surface Chemistry of Oxygen and Hydrogen on Indium Tin Oxide

Adsorption of Atomic Hydrogen on Both Polar Surfaces of ZnO

Friction at High Speeds¹

Energy Dissipation Thresholds During Interfacial Shear

Chemical and Mechanical Contributions to the Friction In Self-Assembled Monolayers on Au Surfaces

Atomic and Molecular Level Insight into Discreet Frictional Events

Molecular Tribology of Highly Ordered Monolayers

The Effect of C60 on Interfacial Friction and Wetting of Toluene

Mechanical Behaviour of Confined Films: An In-situ Study of Silane Monolayers by Second Harmonic Generation (SHG)

New Aspects of Friction Force Microscopy in Ultra-high Vacuum

Criteria for Choosing Transparent Conductors

Preparation of Transparent Conducting Thin Films using Multicomponent Oxides Composed of ZnO and V₂O₅ by Magnetron Sputtering

Properties of Transparent conducting CdO-In₂O₃-SnO₂ Thin Films Prepared by Pulse Laser Deposition (PLD)

Expanding Thermal Plasma Deposition of Natively Textured ZnO for Thin Film Solar Cell Applications

Effects of Excess Oxygen Introduced during Sputter Deposition and Post Annealing under a High Oxygen Pressure on Carrier Mobility in Indium-tin Oxide Films

Preparation and Properties of Transparent Conductive Aluminum-doped Zinc Oxide Thin Films by Sol-Gel Process

Synthesis and Characterization of TCO Cobalt-Nickel Spinel Films

Effect of Vacuum Deposited Polymer Substrate Roughness on ITO Electrical and Optical Properties

Properties of Sol-Gel Prepared (ZnO)_y(CdO)_1-y Thin Films, with Low Concentrations of Cd in Solution

A Practical Guide to the use of Bayard-Alpert Ionization Gauges

The Ultimate Resolution of Commercial Spinning Rotor Gauges

Extending the Upper Pressure Limits of Cold-Cathode Gauges

An Absolute Vacuum Gage Based on the Q Value of the Vibration of a Silicon Micro Cantilever

Performance of the Axial-symmetric Transmission Gauge Improved for the Measurement of Wide Pressure Range

Study of Thermal Transpiration of Capacitance Diaphragm Gauge by DSMC Method

Intelligent Flow Measurement and Control

Summary of the Extreme High Vacuum and Surface Conditioning Workshop