Study of ALD HfO₂-Based High-k for GaN Power Devices and Ferroelectric Devices

The Effect of Oxygen Source on Ferroelectricity of Atomic Layer Deposited Hf_0.5Zr_0.5O₂ Thin Film

Deposition of Inherently Ferroelectric Films by ALD Using ZrD-04 and HfD-04

Ferroelectricity of 300°C Low Temperature Fabricated Hf_xZr_1−xO₂ Thin Films by Plasma-Enhanced Atomic Layer Deposition using Hf/Zr Cocktail Precursor

Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling

Atomic Layer Annealing of AlN to Template The Growth of High Thermal Conductivity Heat Spreader Films

Precision Defect Engineering of Metal/Insulator/Metal (MIM) Diodes Using Localized ALD Transition Metal Impurities

Two-Dimensional Electron Gas at the Interface of an Atomic-Layer-Deposited Binary Oxides Ultrathin (< 5 nm) Film Heterostructures

Area-Selective Atomic Layer Deposition of 2D WS₂ Nanolayers using Inhibitor Molecules

Kinetic Modeling of Ru Area-Selective Atomic Layer Deposition on Nanopatterns

Area-Selective Atomic Layer Deposition on Chemically Similar Materials

Area-Selective Atomic Layer Deposition Al₂O₃ using a Small Thiol Inhibitor and Effects of Precursor Size

Effect of Copper Surface Condition on Passivation Characteristics for Applications to Area Selective Atomic Layer Deposition

Top and Bottom Ta₂O₅ Topographical Selective Deposition on 3D structures by Plasma Enhanced Atomic Layer Deposition

Enhanced Stretchability in Inorganic-Organic Alucone Thin Films Deposited from Long-Chain Organic Precursors

Self-Terminating Molecular Layer Deposition of Polyurea and Growth Rejuvenation via Precursor Linking Group Selection

Vapor-Phase Infiltration Synthesis of Organic-Inorganic Hybrid Nanocomposite Resists for Next-Generation Nanolithography

Synthesis of SiAlCO Polymer Derived Ceramics (PDC) Thin Films using Molecular Layer Deposition

Atomistic Simulation of ALD of 2D Transition-Metal Dichalcogenides

ALD of MoSe₂ using New Precursors

Low Temperature Creation of Layered-MoS₂ Thin Films on Large Area High Aspect Ratio Substrates

Gas Sensing Characteristics of Mo_xW_1-xS₂ Synthesized by Atomic Layer Deposition

Visualizing the Nucleation of ALD on Polymers

Pt-Doped In₂O₃ Thin Films: Control of the Chemical State and Structure via ALD

Study of Tuning Size, Coverage and Shape of Pd Nanoparticles Using Atomic Layer Deposition Through X-ray Based In-situ Characterization

Wednesday Tutorial Welcome & Sponsor Thank You

Growth Mechanisms and Selectivity During Atomic Layer Deposition

Self-limiting Surface Reactions for Atomic-level Control of Materials Processing

Fundamentals of ALE – Optimizing Passivation and Etch*

Questions & Answers

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