ALD2019 WeM Sessions , Wednesday, July 24, 2019 8:00 AM

Wednesday Morning

Abstract Timeline | Time Periods | Topics | Schedule Overview

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Session Code Topic Session Name
AA1-WeM AA ALD for Memory Applications II
AA2-WeM AA ALD for ULSI Applications I
ALE1-WeM ALE Integration & Application of ALE
ALE2-WeM ALE Materials Selective ALE
AM1-WeM AM Spatial ALD, Fast ALD, and Large-Area ALD
EM1-WeM EM Molecular Layer Deposition
EM2-WeM EM Organic-Inorganic Hybrid Materials
EM3-WeM EM Epitaxial Growth and III-V Materials
Abstract Timeline | Time Periods | Topics | Schedule Overview