ALD2017 Atomic Layer Etching Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(537KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| ALE-SaP | Saturday, July 15, 2017 6:00 PM | Atomic Layer Etching Poster Session |
| ALE-SuA | Sunday, July 16, 2017 1:30 PM | Atomic Layer Etching Session I (1:30-3:30 pm) and II (4:00-5:30 pm) |
| ALE-MoM | Monday, July 17, 2017 8:00 AM | Atomic Layer Etching Session III (8:00-10:00 am) and Session IV (10:45 am-12:00 pm) |
| ALE+AF-MoA | Monday, July 17, 2017 1:30 PM | Atomic Layer Etching Session V (1:30-3:30 pm)/ALD Fundamentals: Process Development (4:00-5:45 pm) |