Spectroscopic Ellipsometry Focus Topic Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
TF+2D+AP+EL+SS-MoAALD and CVD: Nucleation, Surface Reactions, Mechanisms, and KineticsOralMonday, 01:40 PMA124-125
AP+EL+MS+PS+SS+TF-TuAAdvancing Metrology and Characterization to enable Atomic Layer ProcessingOralTuesday, 02:20 PMB130
EL+AS+EM+TF-WeMOptical Characterization of Thin Films and NanostructuresOralWednesday, 08:00 AMA212
EL+EM-WeASpectroscopic Ellipsometry: Novel Applications and Theoretical ApproachesOralWednesday, 02:20 PMA212
EL-ThASpectroscopic Ellipsometry Late News SessionOralThursday, 02:20 PMA215
TF+AS+EL+PS+RA-ThACharacterization of Thin Film Processes and PropertiesOralThursday, 02:20 PMA124-125
EL-ThPSpectroscopic Ellipsometry Focus Topic Poster SessionPosterThursday, 06:30 PMUnion Station B