Atomic Scale Processing Focus Topic Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
AP+2D+EM+PS+TF-MoMArea Selective Deposition and Selective-Area PatterningOralMonday, 08:20 AMA210
2D+AP+EM+MI+MN+NS+PS+TF-MoANanostructures including Heterostructures and Patterning of 2D MaterialsOralMonday, 01:40 PMA124-125
2D+AP+EM+MI+NS+PS+TF-MoA2D Materials Growth and FabricationOralMonday, 01:40 PMA122-123
TF+2D+AP+EL+SS-MoAALD and CVD: Nucleation, Surface Reactions, Mechanisms, and KineticsOralMonday, 01:40 PMA216
EM+2D+AP+NS+PS-TuMNew Devices and Materials for Electronics and PhotonicsOralTuesday, 08:00 AMA210
TF+AP-TuMALD and CVD: Precursors and Process DevelopmentOralTuesday, 08:00 AMA216
AP+EL+MS+PS+SS+TF-TuAAdvancing Metrology and Characterization to enable Atomic Layer ProcessingOralTuesday, 02:20 PMA226
AP+BI+PS+TF-WeMSurface Reaction Analysis and Emerging Applications of Atomic Scale ProcessingOralWednesday, 08:00 AMA226
AP+PS+TF-ThMThermal Atomic Layer EtchingOralThursday, 08:00 AMA226
SS+2D+AP+AS+OX+SE-ThADynamics at Surfaces/Reactions and Imaging of Oxide SurfacesOralThursday, 02:20 PMA220-221
AP-ThPAtomic Scale Processing Poster SessionPosterThursday, 06:30 PMUnion Station AB