Plasma Diagnostics and Sources I (PS-TuM)
Tuesday, Oct 22 2019 8:00AM, Room A226
Moderated by: Tetsuya Tatsumi, Sony Semiconductor Solutions Corporation; Geun Young Yeom, Sungkyunkwan University, Republic of Korea
Abstracts (Use Expand/Collapse icon in first column to see/hide details)
SchedulePaper #Invited TalkTitle
8:00 AMPS-TuM-1Optimizing Power Delivery in a Pulsed Inductively Coupled Plasma Using Set-Point Impedance Match and Frequency Tuning
8:20 AMPS-TuM-2Compact Surface Wave Plasma Source
8:40 AMPS-TuM-3Overview of Linear Plasma Sources as Applied to Ribbon ion and Plasma Beam Processing of Scanned Substrates
9:20 AMPS-TuM-5Online Diagnostics of Non-Thermal Plasma Nanoparticle-Laden Systems by Ion Mobility Spectrometry
9:40 AMPS-TuM-6Experiment-Model Comparisons in Capacitively Coupled Plasmas at Moderate Pressures for Argon, Helium and Nitrogen
11:00 AMPS-TuM-10Optical and Mass Spectrometric Measurements of O2 and NF3 Dissociation in a Low Frequency, High Density, Remote Plasma
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