Plasma Diagnostics and Sources II (PS-ThM)
Thursday, Oct 24 2019 8:00AM, Room A222
Moderated by: David Lishan, Plasma-Therm LLC; Geun Young Yeom, Sungkyunkwan University, Republic of Korea
Abstracts (Use Expand/Collapse icon in first column to see/hide details)
SchedulePaper #Invited TalkTitle
8:00 AMPS-ThM-1Measurement of Plasma Neutral Densities in a Very High Frequency Ar/NH3 Plasma with a Line-of-sight Threshold Ionization Mass Spectrometry
8:20 AMPS-ThM-2Radical Probe System for In-Situ Measurements of Hydrogen, Oxygen and Nitrogen Radical Densities
8:40 AMPS-ThM-3Post Charge Separation Grid Ion Flux Evaluation in Inductive Coupled Plasma Source Downstream Asher
9:00 AMPS-ThM-4Development of a Novel Langmuir Probe for the Investigation of Dusty Non-thermal Plasmas
9:20 AMPS-ThM-5Historical Review of Microwave Plasma Diagnostics using Plasma Cutoff Phenomenon
11:00 AMPS-ThM-10Characterization of Inductive Coupled Plasma Source RF Power Pulsing for Advanced Surface Treatment Applications
11:20 AMPS-ThM-11In-situ Measurement of Deposited Tilm Thickness and Electron Density by Double Curling Probe
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