Atomic Scale Processing Poster Session (AP-ThP)
Thursday, Oct 24 2019 6:30PM, Room Union Station AB
Moderated by:
Abstracts (Use Expand/Collapse icon in first column to see/hide details)
SchedulePaper #Invited TalkTitle
6:30 PMAP-ThP-1Atomic Resolution Characterization of Atomic Layer Etching Normally-off AlGaN/GaN Hetrostructure Device by Using Aberration-corrected STEM
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